KR100596022B1 - 디스펜서 스테이지의 글라스 흡착구조 - Google Patents

디스펜서 스테이지의 글라스 흡착구조 Download PDF

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Publication number
KR100596022B1
KR100596022B1 KR1020050090160A KR20050090160A KR100596022B1 KR 100596022 B1 KR100596022 B1 KR 100596022B1 KR 1020050090160 A KR1020050090160 A KR 1020050090160A KR 20050090160 A KR20050090160 A KR 20050090160A KR 100596022 B1 KR100596022 B1 KR 100596022B1
Authority
KR
South Korea
Prior art keywords
stage
glass
dispenser
inclined grooves
suction holes
Prior art date
Application number
KR1020050090160A
Other languages
English (en)
Korean (ko)
Inventor
박종현
김동영
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020050090160A priority Critical patent/KR100596022B1/ko
Priority to TW095111834A priority patent/TWI359970B/zh
Priority to JP2006107504A priority patent/JP2007090322A/ja
Priority to CNB2006100781459A priority patent/CN100439991C/zh
Application granted granted Critical
Publication of KR100596022B1 publication Critical patent/KR100596022B1/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/18—Handling of layers or the laminate
    • B32B38/1858—Handling of layers or the laminate using vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
KR1020050090160A 2005-09-27 2005-09-27 디스펜서 스테이지의 글라스 흡착구조 KR100596022B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020050090160A KR100596022B1 (ko) 2005-09-27 2005-09-27 디스펜서 스테이지의 글라스 흡착구조
TW095111834A TWI359970B (en) 2005-09-27 2006-04-03 Glass adhering structure for dispenser stage
JP2006107504A JP2007090322A (ja) 2005-09-27 2006-04-10 ディスペンサステージのガラス吸着構造
CNB2006100781459A CN100439991C (zh) 2005-09-27 2006-04-28 用于分配器工作台的玻璃附着结构

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050090160A KR100596022B1 (ko) 2005-09-27 2005-09-27 디스펜서 스테이지의 글라스 흡착구조

Publications (1)

Publication Number Publication Date
KR100596022B1 true KR100596022B1 (ko) 2006-07-05

Family

ID=37183543

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050090160A KR100596022B1 (ko) 2005-09-27 2005-09-27 디스펜서 스테이지의 글라스 흡착구조

Country Status (4)

Country Link
JP (1) JP2007090322A (ja)
KR (1) KR100596022B1 (ja)
CN (1) CN100439991C (ja)
TW (1) TWI359970B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101084713B1 (ko) * 2009-07-30 2011-11-22 (주)오토엠아이티 편광필름 흡착 스테이지의 구조

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104199218B (zh) * 2014-08-18 2017-07-25 深圳市华星光电技术有限公司 液晶滴注装置
CN106853432B (zh) * 2016-11-24 2019-04-16 重庆市永川区锐峰玻璃制品有限公司 旋转涂胶台
CN106975586A (zh) * 2017-04-27 2017-07-25 常州亿莱顿电子科技有限公司 一种精密自动点胶机工装及其点胶方法
KR20220125874A (ko) 2021-03-05 2022-09-15 삼성디스플레이 주식회사 윈도우 제조 장치, 윈도우 제조 방법 및 표시장치 제조 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590759B2 (ja) * 1994-10-13 1997-03-12 日本電気株式会社 偏光板貼付装置
JP3493081B2 (ja) * 1995-08-09 2004-02-03 株式会社日本マイクロニクス 表示パネルの吸着テーブル
JP3863245B2 (ja) * 1997-03-26 2006-12-27 東芝電子エンジニアリング株式会社 フラットパネルディスプレイの組立方法および組立装置
JP2000221479A (ja) * 1999-02-01 2000-08-11 Matsushita Electric Ind Co Ltd 液晶パネルの吸着ステージ
JP2001118913A (ja) * 1999-10-18 2001-04-27 Dainippon Printing Co Ltd 基板吸着プレート
JP2002236292A (ja) * 2001-02-09 2002-08-23 Matsushita Electric Ind Co Ltd 液晶パネルの製造方法および基板貼り合わせ装置
JP2002350804A (ja) * 2001-05-29 2002-12-04 Matsushita Electric Ind Co Ltd 液晶パネルの製造方法および液晶パネルの製造装置
KR100966451B1 (ko) * 2003-06-25 2010-06-28 엘지디스플레이 주식회사 액정적하장치
WO2005069366A1 (en) * 2004-01-16 2005-07-28 Sharp Kabushiki Kaisha Substrate adsorption device and substrate bonding device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101084713B1 (ko) * 2009-07-30 2011-11-22 (주)오토엠아이티 편광필름 흡착 스테이지의 구조

Also Published As

Publication number Publication date
CN1940655A (zh) 2007-04-04
JP2007090322A (ja) 2007-04-12
CN100439991C (zh) 2008-12-03
TWI359970B (en) 2012-03-11
TW200712628A (en) 2007-04-01

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