KR100542789B1 - 노광 방법 및 그 장치 - Google Patents

노광 방법 및 그 장치 Download PDF

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Publication number
KR100542789B1
KR100542789B1 KR1020000020253A KR20000020253A KR100542789B1 KR 100542789 B1 KR100542789 B1 KR 100542789B1 KR 1020000020253 A KR1020000020253 A KR 1020000020253A KR 20000020253 A KR20000020253 A KR 20000020253A KR 100542789 B1 KR100542789 B1 KR 100542789B1
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KR
South Korea
Prior art keywords
exposure
deflection
limit value
amount
deflection amount
Prior art date
Application number
KR1020000020253A
Other languages
English (en)
Korean (ko)
Other versions
KR20010014751A (ko
Inventor
야마자끼다쓰야
아사까다쓰히꼬
다께다히또시
사사끼유주루
Original Assignee
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시끼가이샤 도시바 filed Critical 가부시끼가이샤 도시바
Publication of KR20010014751A publication Critical patent/KR20010014751A/ko
Application granted granted Critical
Publication of KR100542789B1 publication Critical patent/KR100542789B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
    • B66C1/42—Gripping members engaging only the external or internal surfaces of the articles
    • B66C1/44—Gripping members engaging only the external or internal surfaces of the articles and applying frictional forces
    • B66C1/445—Gripping members engaging only the external or internal surfaces of the articles and applying frictional forces motor actuated
    • B66C1/447—Gripping members engaging only the external or internal surfaces of the articles and applying frictional forces motor actuated by hydraulic or pneumatic motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C23/00—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes
    • B66C23/18—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes specially adapted for use in particular purposes
    • B66C23/36—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes specially adapted for use in particular purposes mounted on road or rail vehicles; Manually-movable jib-cranes for use in workshops; Floating cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C2700/00—Cranes
    • B66C2700/03—Cranes with arms or jibs; Multiple cranes
    • B66C2700/0321—Travelling cranes
    • B66C2700/0357—Cranes on road or off-road vehicles, on trailers or towed vehicles; Cranes on wheels or crane-trucks

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020000020253A 1999-07-14 2000-04-18 노광 방법 및 그 장치 KR100542789B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11200642A JP2001027813A (ja) 1999-07-14 1999-07-14 露光方法およびその装置
JP99-200642 1999-07-14

Publications (2)

Publication Number Publication Date
KR20010014751A KR20010014751A (ko) 2001-02-26
KR100542789B1 true KR100542789B1 (ko) 2006-01-11

Family

ID=16427797

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000020253A KR100542789B1 (ko) 1999-07-14 2000-04-18 노광 방법 및 그 장치

Country Status (4)

Country Link
JP (1) JP2001027813A (ja)
KR (1) KR100542789B1 (ja)
CN (1) CN1201205C (ja)
TW (1) TW499630B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100429635B1 (ko) * 2001-11-01 2004-05-03 엘지전자 주식회사 섀도우 마스크 제작을 위한 글라스 제조장치 및 그 제조방법
JP3652329B2 (ja) * 2002-06-28 2005-05-25 キヤノン株式会社 走査露光装置、走査露光方法、デバイス製造方法およびデバイス
JP4005881B2 (ja) * 2002-08-30 2007-11-14 株式会社東芝 露光装置の検査方法
TW201200948A (en) 2010-06-22 2012-01-01 Au Optronics Corp Pixel structure and method for manufacturing the same
CN101893797A (zh) * 2010-07-01 2010-11-24 友达光电股份有限公司 画素结构及其制作方法
CN114185187A (zh) * 2021-09-23 2022-03-15 浙江泰嘉光电科技有限公司 一种基于spc控制液晶屏滤光片曝光偏移量的系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63116140A (ja) * 1986-11-04 1988-05-20 Toshiba Corp パタ−ン製作装置
JPH03214536A (ja) * 1989-10-07 1991-09-19 Toshiba Corp 露光方法及び露光装置
JPH07295197A (ja) * 1994-04-22 1995-11-10 Dainippon Screen Mfg Co Ltd シャドウマスク用パターン版製造装置及び製造方法
JPH10214562A (ja) * 1997-01-30 1998-08-11 Toppan Printing Co Ltd シャドウマスクの製造方法
JPH11339653A (ja) * 1998-05-27 1999-12-10 Toppan Printing Co Ltd シャドウマスクの露光状態観測装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63116140A (ja) * 1986-11-04 1988-05-20 Toshiba Corp パタ−ン製作装置
JPH03214536A (ja) * 1989-10-07 1991-09-19 Toshiba Corp 露光方法及び露光装置
JPH07295197A (ja) * 1994-04-22 1995-11-10 Dainippon Screen Mfg Co Ltd シャドウマスク用パターン版製造装置及び製造方法
JPH10214562A (ja) * 1997-01-30 1998-08-11 Toppan Printing Co Ltd シャドウマスクの製造方法
JPH11339653A (ja) * 1998-05-27 1999-12-10 Toppan Printing Co Ltd シャドウマスクの露光状態観測装置

Also Published As

Publication number Publication date
CN1201205C (zh) 2005-05-11
TW499630B (en) 2002-08-21
JP2001027813A (ja) 2001-01-30
KR20010014751A (ko) 2001-02-26
CN1281165A (zh) 2001-01-24

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