KR100487455B1 - 사진석판술에 의해 유도된 표면 패턴(들)이 있는 연마용 중합체 패드 및 이에 관련된 방법 - Google Patents

사진석판술에 의해 유도된 표면 패턴(들)이 있는 연마용 중합체 패드 및 이에 관련된 방법 Download PDF

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Publication number
KR100487455B1
KR100487455B1 KR10-1999-7006289A KR19997006289A KR100487455B1 KR 100487455 B1 KR100487455 B1 KR 100487455B1 KR 19997006289 A KR19997006289 A KR 19997006289A KR 100487455 B1 KR100487455 B1 KR 100487455B1
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KR
South Korea
Prior art keywords
pad
precursor
pattern
substrate
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR10-1999-7006289A
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English (en)
Korean (ko)
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KR20000070068A (ko
Inventor
리 멜버른 쿡크
데이비드 비. 제임스
니나 지. 체킥
윌리엄 디. 버딩거
Original Assignee
롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드
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Application filed by 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드 filed Critical 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드
Publication of KR20000070068A publication Critical patent/KR20000070068A/ko
Application granted granted Critical
Publication of KR100487455B1 publication Critical patent/KR100487455B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR10-1999-7006289A 1997-01-13 1998-01-12 사진석판술에 의해 유도된 표면 패턴(들)이 있는 연마용 중합체 패드 및 이에 관련된 방법 Expired - Lifetime KR100487455B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3449297P 1997-01-13 1997-01-13
US60/034,492 1997-01-13
PCT/US1998/000317 WO1998030356A1 (en) 1997-01-13 1998-01-12 Polymeric polishing pad having photolithographically induced surface pattern(s) and methods relating thereto

Publications (2)

Publication Number Publication Date
KR20000070068A KR20000070068A (ko) 2000-11-25
KR100487455B1 true KR100487455B1 (ko) 2005-05-09

Family

ID=21876756

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-1999-7006289A Expired - Lifetime KR100487455B1 (ko) 1997-01-13 1998-01-12 사진석판술에 의해 유도된 표면 패턴(들)이 있는 연마용 중합체 패드 및 이에 관련된 방법

Country Status (6)

Country Link
US (2) US6036579A (enExample)
EP (1) EP0984846B1 (enExample)
JP (1) JP4163756B2 (enExample)
KR (1) KR100487455B1 (enExample)
DE (1) DE69827789T2 (enExample)
WO (1) WO1998030356A1 (enExample)

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WO2011013894A1 (ko) * 2009-07-30 2011-02-03 서강대학교 산학협력단 기공이 형성된 ｃｍｐ 연마패드와 그의 제조방법
KR20210123187A (ko) 2020-03-31 2021-10-13 비젼포커스 인크. 블루라이트 커트 콘택트 렌즈, 그 조성물 및 제조 방법

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DE102012017874A1 (de) * 2012-09-11 2014-03-27 Hoerbiger Antriebstechnik Holding Gmbh Verfahren zur Herstellung eines Reibbelags sowie Reibbelag
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CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
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JP6940495B2 (ja) * 2015-10-30 2021-09-29 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 所望のゼータ電位を有する研磨用物品を形成するための装置及び方法
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
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KR20210123187A (ko) 2020-03-31 2021-10-13 비젼포커스 인크. 블루라이트 커트 콘택트 렌즈, 그 조성물 및 제조 방법
KR20230108250A (ko) 2020-03-31 2023-07-18 비젼포커스 인크. 블루라이트 커트 콘택트 렌즈, 그 조성물 및 제조 방법

Also Published As

Publication number Publication date
JP2001507997A (ja) 2001-06-19
EP0984846A4 (en) 2000-03-15
JP4163756B2 (ja) 2008-10-08
KR20000070068A (ko) 2000-11-25
EP0984846A1 (en) 2000-03-15
US6210254B1 (en) 2001-04-03
WO1998030356A1 (en) 1998-07-16
DE69827789T2 (de) 2005-11-10
DE69827789D1 (de) 2004-12-30
US6036579A (en) 2000-03-14
EP0984846B1 (en) 2004-11-24

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