KR100426757B1 - 반도체 제조를 위한 생산 라인 제어 방법 및 장치 - Google Patents

반도체 제조를 위한 생산 라인 제어 방법 및 장치 Download PDF

Info

Publication number
KR100426757B1
KR100426757B1 KR10-2001-0010348A KR20010010348A KR100426757B1 KR 100426757 B1 KR100426757 B1 KR 100426757B1 KR 20010010348 A KR20010010348 A KR 20010010348A KR 100426757 B1 KR100426757 B1 KR 100426757B1
Authority
KR
South Korea
Prior art keywords
wip
trajectory
processing
node
queue
Prior art date
Application number
KR10-2001-0010348A
Other languages
English (en)
Korean (ko)
Other versions
KR20010085714A (ko
Inventor
브라우닝레이몬드
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20010085714A publication Critical patent/KR20010085714A/ko
Application granted granted Critical
Publication of KR100426757B1 publication Critical patent/KR100426757B1/ko

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Computer And Data Communications (AREA)
KR10-2001-0010348A 2000-02-28 2001-02-28 반도체 제조를 위한 생산 라인 제어 방법 및 장치 KR100426757B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/514,864 2000-02-28
US09/514,864 US6714830B2 (en) 2000-02-28 2000-02-28 Push-type scheduling for semiconductor fabrication

Publications (2)

Publication Number Publication Date
KR20010085714A KR20010085714A (ko) 2001-09-07
KR100426757B1 true KR100426757B1 (ko) 2004-04-13

Family

ID=24048985

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0010348A KR100426757B1 (ko) 2000-02-28 2001-02-28 반도체 제조를 위한 생산 라인 제어 방법 및 장치

Country Status (6)

Country Link
US (1) US6714830B2 (US06714830-20040330-M00001.png)
EP (1) EP1128246B1 (US06714830-20040330-M00001.png)
JP (1) JP2001332464A (US06714830-20040330-M00001.png)
KR (1) KR100426757B1 (US06714830-20040330-M00001.png)
DE (1) DE60141055D1 (US06714830-20040330-M00001.png)
TW (1) TW526404B (US06714830-20040330-M00001.png)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU5670701A (en) * 2000-05-12 2001-11-20 Incs Inc. Method and device for executing work consisting of a plurality of steps under computer control
JP4657540B2 (ja) * 2001-09-28 2011-03-23 三菱電機株式会社 半導体装置製造管理装置
US7054702B1 (en) * 2001-10-23 2006-05-30 Advanced Micro Devices, Inc. Lot start agent that determines delta virtual WIP time for each bottleneck station in a multi-product and multi-bottleneck manufacturing environment
EP1365299A1 (en) * 2002-05-16 2003-11-26 Lucas Automotive Gmbh Method of determining a potential capacity overload
US20030225474A1 (en) * 2002-05-31 2003-12-04 Gustavo Mata Specialization of active software agents in an automated manufacturing environment
US7426419B2 (en) * 2002-08-13 2008-09-16 Texas Instruments Incorporated Scheduling system and method
US7778721B2 (en) 2003-01-27 2010-08-17 Applied Materials, Inc. Small lot size lithography bays
US7221993B2 (en) 2003-01-27 2007-05-22 Applied Materials, Inc. Systems and methods for transferring small lot size substrate carriers between processing tools
JP4272494B2 (ja) * 2003-08-20 2009-06-03 パナソニック株式会社 製造プロセスの開発方法
US7054703B2 (en) * 2003-09-09 2006-05-30 Taiwan Semiconductor Manufacturing Co., Ltd. Control system and methods for managing a production operating under time constaraints
US7720557B2 (en) 2003-11-06 2010-05-18 Applied Materials, Inc. Methods and apparatus for enhanced operation of substrate carrier handlers
US7218983B2 (en) 2003-11-06 2007-05-15 Applied Materials, Inc. Method and apparatus for integrating large and small lot electronic device fabrication facilities
TWI290875B (en) 2004-02-28 2007-12-11 Applied Materials Inc Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
US7274971B2 (en) 2004-02-28 2007-09-25 Applied Materials, Inc. Methods and apparatus for electronic device manufacturing system monitoring and control
TWI316044B (en) 2004-02-28 2009-10-21 Applied Materials Inc Methods and apparatus for material control system interface
US7386353B2 (en) * 2004-04-26 2008-06-10 Taiwan Semiconductor Manufacturing Co., Ltd. Parallel control method for sequential process control flow
US7179664B2 (en) * 2004-05-06 2007-02-20 Taiwan Semiconductor Manufacturing Company Method for generating work-in-process schedules
US7715941B1 (en) * 2004-11-03 2010-05-11 Advanced Micro Devices Method and apparatus for scheduling a plurality of processing tools
US20080275582A1 (en) * 2004-11-19 2008-11-06 Nettles Steven C Scheduling AMHS pickup and delivery ahead of schedule
US8054487B2 (en) * 2004-12-16 2011-11-08 International Business Machines Corporation Mechanism to create a reservation against a future scheduling object instantiation
US7151972B2 (en) * 2005-01-05 2006-12-19 International Business Machines Corporation Method for autonomic control of a manufacturing system
CN100386702C (zh) * 2005-06-10 2008-05-07 同济大学 基于信息素的用于半导体生产线的动态调度方法
US7966089B1 (en) * 2005-07-05 2011-06-21 Advanced Micro Devices, Inc. Method and apparatus for automated fab control
US7979798B2 (en) * 2005-12-30 2011-07-12 Sap Ag System and method for providing user help tips
US7379782B1 (en) 2007-03-26 2008-05-27 Activplant Corporation System and method of monitoring and quantifying performance of an automated manufacturing facility
US9747575B2 (en) * 2007-04-17 2017-08-29 Zih Corp. Flow metering of vehicles using RTLS tracking
US7937177B2 (en) * 2007-06-27 2011-05-03 International Business Machines Corporation Manufacturing work in process management system
US8965539B2 (en) * 2008-09-27 2015-02-24 Jda Software Group, Inc. System and method for a demand driven lean production control system
CN102253662A (zh) * 2011-04-11 2011-11-23 同济大学 基于多蚁群优化的半导体生产线排程方法
KR102072200B1 (ko) * 2011-04-22 2020-01-31 에이에스엠엘 네델란즈 비.브이. 리소그래피 머신들의 클러스터를 위한 네트워크 아키텍처 및 프로토콜
US10054936B2 (en) * 2014-02-28 2018-08-21 Schneider Electric Software, Llc Manufacturing execution system and method of determining production metrics for a line
CN104244605B (zh) * 2014-09-03 2017-03-22 东莞市诸葛流智能系统有限公司 一种提高smt贴片生产效率和设备使用率的方法
US10295979B2 (en) * 2015-09-15 2019-05-21 Applied Materials, Inc. Scheduling in manufacturing environments
CN106444649B (zh) * 2016-07-05 2019-01-11 同济大学 一种半导体生产线闭环调度控制方法
CN107871194B (zh) * 2016-09-28 2020-10-16 北京北方华创微电子装备有限公司 一种生产线设备的调度方法和装置
TWI758578B (zh) * 2018-03-01 2022-03-21 日商荏原製作所股份有限公司 排程器、基板處理裝置、及基板搬送方法
FR3081740B1 (fr) * 2018-06-05 2021-03-12 Psa Automobiles Sa Procede d’assemblage de pieces sur une ligne d’assemblage
CN111258277A (zh) * 2018-12-03 2020-06-09 威纶科技股份有限公司 生产设备的控制方法及生产设备控制系统
US20220011757A1 (en) * 2020-06-22 2022-01-13 Changxin Memory Technologies, Inc. Laser Machine Automatic Operating Method and System
TWI755299B (zh) * 2021-03-10 2022-02-11 財團法人工業技術研究院 產線排程方法、產線系統及電腦可讀取媒體

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000003307A (ko) * 1998-06-27 2000-01-15 윤종용 반도체 제조설비 관리시스템의 로트 플로우 제어방법

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4896269A (en) 1988-02-29 1990-01-23 General Electric Company Job shop scheduling and production method and apparatus
US5170355A (en) * 1988-12-14 1992-12-08 Siemens Corporate Research, Inc. Apparatus and a method for controlling the release of jobs from a pool of pending jobs into a factory
JP2651245B2 (ja) * 1989-06-30 1997-09-10 株式会社日立製作所 生産進行制御装置および半導体装置の製造方法
US5212791A (en) 1989-09-27 1993-05-18 International Business Machines Corporation Dynamic scheduling
US5255181A (en) 1990-06-01 1993-10-19 Motorola, Inc. Method of planning organizational activities
US5495417A (en) 1990-08-14 1996-02-27 Kabushiki Kaisha Toshiba System for automatically producing different semiconductor products in different quantities through a plurality of processes along a production line
JP2753142B2 (ja) * 1990-11-27 1998-05-18 株式会社東芝 半導体装置の生産システムにおける生産管理方法、生産管理装置および製造装置
US5402350A (en) 1991-06-28 1995-03-28 Texas Instruments Incorporated Scheduling for multi-task manufacturing equipment
US5432887A (en) 1993-03-16 1995-07-11 Singapore Computer Systems Neural network system and method for factory floor scheduling
JP2546159B2 (ja) * 1993-08-05 1996-10-23 日本電気株式会社 生産管理システム
US5446671A (en) 1993-10-22 1995-08-29 Micron Semiconductor, Inc. Look-ahead method for maintaining optimum queued quantities of in-process parts at a manufacturing bottleneck
US5444632A (en) * 1994-04-28 1995-08-22 Texas Instruments Incorporated Apparatus and method for controlling and scheduling processing machines
US5787000A (en) * 1994-05-27 1998-07-28 Lilly Software Associates, Inc. Method and apparatus for scheduling work orders in a manufacturing process
US5544350A (en) 1994-07-05 1996-08-06 Taiwan Semiconductor Manufacturing Co. Ratio of running work in progress
US5546326A (en) 1995-04-04 1996-08-13 Taiwan Semiconductor Manufacturing Company Ltd Dynamic dispatching rule that uses long term due date and short term queue time to improve delivery performance
US5612886A (en) 1995-05-12 1997-03-18 Taiwan Semiconductor Manufacturing Company Ltd. Method and system for dynamic dispatching in semiconductor manufacturing plants
JP2973884B2 (ja) * 1995-07-31 1999-11-08 日本電気株式会社 生産制御装置
KR970066969A (ko) 1996-03-19 1997-10-13 모리시다 요이치 제조계획 입안방법 및 제조계획 입안장치
US5826238A (en) * 1996-04-02 1998-10-20 Taiwan Semiconductor Manufacturing Daily target generation and machine allocation with priority
US5778386A (en) 1996-05-28 1998-07-07 Taiwan Semiconductor Manufacturing Company Ltd. Global view storage management system for semiconductor manufacturing plants
US5751580A (en) 1996-07-26 1998-05-12 Chartered Semiconductor Manufacturing, Ltd. Fuzzy logic method and system for adjustment of priority rating of work in process in a production line
US5706200A (en) 1996-08-15 1998-01-06 The Board Of Trustees Of The University Of Il. Scheduling system and scheduling method for reentrant line processes
US5818716A (en) 1996-10-18 1998-10-06 Taiwan Semiconductor Manufacturing Company Ltd. Dynamic lot dispatching required turn rate factory control system and method of operation thereof
US5889673A (en) 1996-12-27 1999-03-30 Vanguard International Semiconductor Corporation Manufacturing method and system for dynamic dispatching of integrated circuit wafer lots
US5880960A (en) 1997-01-27 1999-03-09 Taiwan Semiconductor Manufacturing Company, Ltd. Method to improve WIP balance in a manufacturing line
US5748478A (en) 1997-03-17 1998-05-05 Vanguard International Semiconductor Corporation Output management of processing in a manufacturing plant
US5950170A (en) 1997-04-11 1999-09-07 Vanguard International Semiconductor Corporation Method to maximize capacity in IC fabrication
US5838565A (en) 1997-05-15 1998-11-17 Vanguard International Semiconductor Corporation Manufacturing control method for IC plant batch sequential machine
US6243612B1 (en) * 1998-11-09 2001-06-05 Advanced Micro Devices, Inc. Processing system having a scheduling system based on a composite ratio of process scheduling factors
US6360133B1 (en) * 1999-06-17 2002-03-19 Advanced Micro Devices, Inc. Method and apparatus for automatic routing for reentrant process
US6636599B1 (en) * 2000-03-09 2003-10-21 Avaya Technology Corp. Reserving resources for anticipated work items via simulated work items
US6591153B2 (en) * 2000-10-12 2003-07-08 Manugistics, Inc. System and methods for scheduling manufacturing resources

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000003307A (ko) * 1998-06-27 2000-01-15 윤종용 반도체 제조설비 관리시스템의 로트 플로우 제어방법

Also Published As

Publication number Publication date
TW526404B (en) 2003-04-01
EP1128246A2 (en) 2001-08-29
US6714830B2 (en) 2004-03-30
EP1128246A3 (en) 2004-10-27
DE60141055D1 (de) 2010-03-04
EP1128246B1 (en) 2010-01-13
US20030158618A1 (en) 2003-08-21
KR20010085714A (ko) 2001-09-07
JP2001332464A (ja) 2001-11-30

Similar Documents

Publication Publication Date Title
KR100426757B1 (ko) 반도체 제조를 위한 생산 라인 제어 방법 및 장치
JP4276434B2 (ja) 交通管理システム、および交通バランスおよび交通密度を使用した材料取扱い方法
US5838566A (en) System and method for managing empty carriers in an automated material handling system
US6662076B1 (en) Management of move requests from a factory system to an automated material handling system
Singh et al. AGV scheduling for automated material distribution: a case study
JP3487774B2 (ja) 半導体装置製造工程の搬送方法
US7039495B1 (en) Management of multiple types of empty carriers in automated material handling systems
JP3419186B2 (ja) 半導体基板の生産制御装置
CN114864456A (zh) 半导体清洗设备调度方法、系统、装置及存储介质
CN112016802A (zh) 设备调度方法、装置及电子设备
JP4262482B2 (ja) 一体型スケジューラおよび材料制御システム
Bilge et al. Multi-attribute responsive dispatching strategies for automated guided vehicles
Hammel et al. Empowering existing automated material handling systems to rising requirements: FA: Factory automation
Varadarajan et al. A survey of dispatching rules for operational control in wafer fabrication
JP2988472B1 (ja) 生産システム
JP3170025B2 (ja) 半導体製造管理方法
JPH03293712A (ja) 半導体ウェーハの処理装置
JP2009037406A (ja) 生産管理方法および生産管理システム
JPH0573574A (ja) 生産制御装置
JPH0744614A (ja) 生産管理装置および生産管理方法
JPH0846006A (ja) 生産管理方法及び生産ライン
JP2003347388A (ja) 搬送システム
JPH0945596A (ja) 生産制御装置
JP3527172B2 (ja) ロットの搬送装置および方法
JP2004323141A (ja) 自動倉庫の搬送制御システム及び搬送制御方法

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20090223

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee