KR100416679B1 - 공간광변조기 - Google Patents

공간광변조기 Download PDF

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Publication number
KR100416679B1
KR100416679B1 KR1019960011751A KR19960011751A KR100416679B1 KR 100416679 B1 KR100416679 B1 KR 100416679B1 KR 1019960011751 A KR1019960011751 A KR 1019960011751A KR 19960011751 A KR19960011751 A KR 19960011751A KR 100416679 B1 KR100416679 B1 KR 100416679B1
Authority
KR
South Korea
Prior art keywords
yoke
mirror
spatial light
address electrode
light modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019960011751A
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English (en)
Korean (ko)
Other versions
KR960038437A (ko
Inventor
제이. 혼벡 래리
Original Assignee
텍사스 인스트루먼츠 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR960038437A publication Critical patent/KR960038437A/ko
Application granted granted Critical
Publication of KR100416679B1 publication Critical patent/KR100416679B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
KR1019960011751A 1995-04-18 1996-04-18 공간광변조기 Expired - Fee Related KR100416679B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/424021 1995-04-18
US08/424,021 US5535047A (en) 1995-04-18 1995-04-18 Active yoke hidden hinge digital micromirror device

Publications (2)

Publication Number Publication Date
KR960038437A KR960038437A (ko) 1996-11-21
KR100416679B1 true KR100416679B1 (ko) 2004-04-30

Family

ID=23681129

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960011751A Expired - Fee Related KR100416679B1 (ko) 1995-04-18 1996-04-18 공간광변조기

Country Status (8)

Country Link
US (1) US5535047A (enExample)
EP (1) EP0738910B1 (enExample)
JP (1) JP3851679B2 (enExample)
KR (1) KR100416679B1 (enExample)
CN (1) CN1160218A (enExample)
CA (1) CA2173637C (enExample)
DE (1) DE69634222T2 (enExample)
TW (1) TW295631B (enExample)

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EP0738910A2 (en) 1996-10-23
US5535047A (en) 1996-07-09
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EP0738910A3 (en) 2002-11-13
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EP0738910B1 (en) 2005-01-26
CA2173637A1 (en) 1996-10-19
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