FR2807844B1 - Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique - Google Patents

Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique

Info

Publication number
FR2807844B1
FR2807844B1 FR0004910A FR0004910A FR2807844B1 FR 2807844 B1 FR2807844 B1 FR 2807844B1 FR 0004910 A FR0004910 A FR 0004910A FR 0004910 A FR0004910 A FR 0004910A FR 2807844 B1 FR2807844 B1 FR 2807844B1
Authority
FR
France
Prior art keywords
optical switch
optical
realization
process
moving parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0004910A
Other languages
English (en)
Other versions
FR2807844A1 (fr
Inventor
Patrick Pouteau
Jacques Margail
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a l Energie Atomique et aux Energies Alternatives
Original Assignee
Commissariat a l Energie Atomique et aux Energies Alternatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a l Energie Atomique et aux Energies Alternatives filed Critical Commissariat a l Energie Atomique et aux Energies Alternatives
Priority to FR0004910A priority Critical patent/FR2807844B1/fr
Publication of FR2807844A1 publication Critical patent/FR2807844A1/fr
Application granted granted Critical
Publication of FR2807844B1 publication Critical patent/FR2807844B1/fr
Application status is Expired - Fee Related legal-status Critical
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
FR0004910A 2000-04-17 2000-04-17 Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique Expired - Fee Related FR2807844B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0004910A FR2807844B1 (fr) 2000-04-17 2000-04-17 Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
FR0004910A FR2807844B1 (fr) 2000-04-17 2000-04-17 Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique
EP20010925656 EP1275020A1 (fr) 2000-04-17 2001-04-13 Commutateur optique a pieces mobiles et son procede de realisation
US10/239,845 US6833080B2 (en) 2000-04-17 2001-04-13 Optical switch with mobile components and method for making same
JP2001576511A JP2004501382A (ja) 2000-04-17 2001-04-13 動部を備えた光スイッチ及びその製造方法
PCT/FR2001/001158 WO2001079903A1 (fr) 2000-04-17 2001-04-13 Commutateur optique a pieces mobiles et son procede de realisation

Publications (2)

Publication Number Publication Date
FR2807844A1 FR2807844A1 (fr) 2001-10-19
FR2807844B1 true FR2807844B1 (fr) 2003-05-16

Family

ID=8849320

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0004910A Expired - Fee Related FR2807844B1 (fr) 2000-04-17 2000-04-17 Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique

Country Status (5)

Country Link
US (1) US6833080B2 (fr)
EP (1) EP1275020A1 (fr)
JP (1) JP2004501382A (fr)
FR (1) FR2807844B1 (fr)
WO (1) WO2001079903A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3908503B2 (ja) * 2001-10-30 2007-04-25 富士通株式会社 光スイッチ
FR2848477B1 (fr) * 2002-12-17 2006-03-24 Commissariat Energie Atomique Procede et dispositif de confinement d'un liquide
JP2007286172A (ja) * 2006-04-13 2007-11-01 Pentax Corp マイクロミラー、及び、電極形成方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870816A (en) * 1973-05-17 1975-03-11 Xerox Corp Optical system for transmit/receive mode conditioning of facsimile transceivers
FR2523363B1 (fr) * 1982-03-12 1986-07-25 Gentric Alain Dispositif bistable electromagnetique, application a la realisation de dispositifs de deflexion optique et de dispositifs de commutation notamment optique
US4626066A (en) * 1983-12-30 1986-12-02 At&T Bell Laboratories Optical coupling device utilizing a mirror and cantilevered arm
US4844577A (en) * 1986-12-19 1989-07-04 Sportsoft Systems, Inc. Bimorph electro optic light modulator
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5982554A (en) * 1997-12-31 1999-11-09 At&T Corp Bridging apparatus and method for an optical crossconnect device
US6295154B1 (en) * 1998-06-05 2001-09-25 Texas Instruments Incorporated Optical switching apparatus
US6261494B1 (en) 1998-10-22 2001-07-17 Northeastern University Method of forming plastically deformable microstructures
US6034807A (en) * 1998-10-28 2000-03-07 Memsolutions, Inc. Bistable paper white direct view display

Also Published As

Publication number Publication date
EP1275020A1 (fr) 2003-01-15
US6833080B2 (en) 2004-12-21
WO2001079903A1 (fr) 2001-10-25
FR2807844A1 (fr) 2001-10-19
JP2004501382A (ja) 2004-01-15
US20030138191A1 (en) 2003-07-24

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20061230