JP3851679B2 - 空間光変調器 - Google Patents

空間光変調器 Download PDF

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Publication number
JP3851679B2
JP3851679B2 JP09704196A JP9704196A JP3851679B2 JP 3851679 B2 JP3851679 B2 JP 3851679B2 JP 09704196 A JP09704196 A JP 09704196A JP 9704196 A JP9704196 A JP 9704196A JP 3851679 B2 JP3851679 B2 JP 3851679B2
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Japan
Prior art keywords
yoke
address
mirror
pixel
address electrode
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Expired - Fee Related
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JP09704196A
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Japanese (ja)
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JPH08334709A (ja
Inventor
ジェイ．ホーンベック ラリー
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テキサス インスツルメンツ インコーポレイテツド
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
JP09704196A 1995-04-18 1996-04-18 空間光変調器 Expired - Fee Related JP3851679B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US424021 1995-04-18
US08/424,021 US5535047A (en) 1995-04-18 1995-04-18 Active yoke hidden hinge digital micromirror device

Publications (2)

Publication Number Publication Date
JPH08334709A JPH08334709A (ja) 1996-12-17
JP3851679B2 true JP3851679B2 (ja) 2006-11-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP09704196A Expired - Fee Related JP3851679B2 (ja) 1995-04-18 1996-04-18 空間光変調器

Country Status (8)

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US (1) US5535047A (enExample)
EP (1) EP0738910B1 (enExample)
JP (1) JP3851679B2 (enExample)
KR (1) KR100416679B1 (enExample)
CN (1) CN1160218A (enExample)
CA (1) CA2173637C (enExample)
DE (1) DE69634222T2 (enExample)
TW (1) TW295631B (enExample)

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EP0738910A2 (en) 1996-10-23
JPH08334709A (ja) 1996-12-17
DE69634222T2 (de) 2006-01-05
EP0738910B1 (en) 2005-01-26
KR960038437A (ko) 1996-11-21
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CA2173637A1 (en) 1996-10-19
EP0738910A3 (en) 2002-11-13
US5535047A (en) 1996-07-09
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TW295631B (enExample) 1997-01-11
KR100416679B1 (ko) 2004-04-30

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