WO2007023940A1 - アクチュエータ、光ヘッド装置および光情報装置 - Google Patents
アクチュエータ、光ヘッド装置および光情報装置 Download PDFInfo
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- WO2007023940A1 WO2007023940A1 PCT/JP2006/316719 JP2006316719W WO2007023940A1 WO 2007023940 A1 WO2007023940 A1 WO 2007023940A1 JP 2006316719 W JP2006316719 W JP 2006316719W WO 2007023940 A1 WO2007023940 A1 WO 2007023940A1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1392—Means for controlling the beam wavefront, e.g. for correction of aberration
- G11B7/13925—Means for controlling the beam wavefront, e.g. for correction of aberration active, e.g. controlled by electrical or mechanical means
Definitions
- the present invention relates to an apparatus that optically records and Z or reproduces information, and more particularly, to an apparatus that includes a convergence correction element.
- Optical memory technology that uses optical disk media with pit-like patterns as high-density 'large-capacity information storage media is expanding its application to digital audio disks, video disks, document file disks, and data file disks. Practical use is progressing.
- the functions necessary to successfully perform information recording and reproduction on an optical disk medium with a very small laser beam are highly reliable. It is broadly divided into a condensing function that forms a light spot, an optical system focus control (focus servo) function, a tracking control (tracking servo) function, and a pit signal (information signal) detection function.
- the numerical aperture NA of the objective lens mounted on the optical head is increased and the wavelength ⁇ of the light of the light source is shortened, and the light is collected by the objective lens.
- the spot diameter of the emitted light has been reduced.
- the optical disk medium has been provided with a plurality of recording layers for recording information.
- the numerical aperture NA of the objective lens is 0.45, and the wavelength of the light of the light source is 780 nm, whereas higher recording density and higher capacity are achieved.
- the numerical aperture NA is 0.6, and the wavelength of light is 650 ⁇ m.
- the thickness of the substrate (the distance to the surface force recording layer on the light incident side of the optical disk medium) is set so as to cancel out such aberration. It is effective to reduce the thickness of the substrate. m, but 0.6mm for DVD.
- the numerical aperture NA 0.85
- the substrate thickness is 0.1 mm.
- the spherical aberration due to the thickness of the base material protecting the recording layer of the optical disk medium is proportional to the fourth power of the numerical aperture NA. Therefore, when the numerical aperture NA is set to a large value of 0.85 as in the BD standard, means for correcting spherical aberration is provided in the optical system.
- micromachining technology facilitates the fabrication of microstructures such as aberration correction elements.
- this technology has come to be referred to as micromachining technology, and much research and development of microactuators using this technology has been conducted.
- An example of a commercial product is a capacitance detection type acceleration sensor.
- Another example is a spatial light modulation device disclosed in Patent Document 3. This was developed as an image display device for video projectors and is known as DMD (Digital Micromirror Device).
- DMD Digital Micromirror Device
- the driving method of this microactuator uses electrostatic attraction, but there are other electromagnetic force, thermal stress, and light attractive force.
- a particularly frequently used driving method is electrostatic attraction. This method has the advantage that the drive voltage can be kept low with low power consumption, and the response speed is fast.
- Patent Document 4 discloses a deformable mirror having a displacement detection function for detecting its own displacement from a change in capacitance by using electrostatic attraction as a driving force.
- Non-Patent Document 1 discloses a chip on which a temperature sensor, a pressure sensor, and a humidity sensor are mounted together. Each of these sensors is individually designed according to the object to be detected, and different materials are used for each sensor, and each sensor is manufactured.
- Patent Document 1 JP 2000-155979 A
- Patent Document 2 JP 2002-288873 A
- Patent Document 3 JP-A-8-334709
- Patent Document 4 Japanese Patent Application Laid-Open No. 2002-228813
- Non-Patent Document 1 "AN ALL-C AP ACITI VE SENSING CHIP FOR TEMP ERATURE, ABSOLUTE PRESSURE, AND RELATIVE HUMIDIT Y", IEEE 12th International Conference on Solid— State Sensors, Actuators and Microsystems, Boston, MA, June 2003 Disclosure
- each configuration of the optical head device is determined in accordance with those changes. It is desirable to feedback control the elements. For example, it is desirable for laser light sources and photodetectors to be feedback controlled in accordance with changes in temperature and humidity, and for objective lens drive mechanisms and traverse mechanisms to be feedback controlled in accordance with changes in temperature and acceleration. desirable.
- the optical head device In order to detect the temperature, humidity, and acceleration, the optical head device is equipped with a physical condition detector such as a temperature sensor, a humidity sensor, and an acceleration sensor.
- a physical condition detector such as a temperature sensor, a humidity sensor, and an acceleration sensor.
- these sensors are mounted on an optical head device, there is a problem that the optical head device is enlarged.
- the present invention has been made in view of the above-described problems, and includes an optical head device that includes a detection unit that detects a physical condition in the device and that has been downsized, and an optical head device including the optical head device.
- An object is to provide an information device.
- the activator of the present invention is an actuator including a light modulating unit that modulates light, and the light modulating unit includes a base and a light reflecting surface, and is displaceable with respect to the base.
- a movable part, an elastic support part that supports the movable part, a fixed electrode part formed on the base so as to face the movable part, and a physical condition applied to the actuator are detected. And a detector.
- the detection unit is the movable unit and the fixed electrode unit.
- the displacement amount force between the movable part and the fixed electrode part detects the physical condition.
- the physical condition is at least one of temperature, humidity, acceleration, angular velocity, angular acceleration, and pressure.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the light modulation unit.
- the movable part is displaced by an electrostatic attractive force generated between the movable part and the fixed electrode.
- the detection unit is arranged in at least a part of the light modulation unit.
- the detection unit is disposed on at least a part of an outer peripheral portion of the light modulation unit.
- the manufacturing method of the present invention is a manufacturing method of an actuator in which the movable portion is displaced by an electrostatic attractive force generated between the movable electrode and the fixed electrode, and the fixed electrode is formed on a base.
- An optical head device of the present invention includes a light source that outputs laser light, an optical system that irradiates the optical disk medium with the laser light, and an aberration correction unit that corrects the aberration of the laser light.
- the aberration correction unit includes a plurality of mirror units that reflect the laser beam, a plurality of mirror driving units that displace the plurality of mirror units, and a detection that detects a physical condition in the optical head device. And a portion.
- the detection unit includes at least one of the plurality of mirror driving units. Is one mirror drive unit.
- a drive signal generation unit that generates a predetermined drive signal according to the detected physical condition is further provided.
- the physical condition is at least one of temperature, humidity, acceleration, angular velocity, angular acceleration, and pressure.
- the at least one mirror driving unit switches time-divisionally between an operation of driving the at least one mirror unit for aberration correction and an operation of detecting the physical condition.
- the mirror driving unit includes a movable electrode unit and a fixed electrode unit separated by a gap, and the mirror driving unit is provided between the movable electrode and the fixed electrode.
- the mirror portion is displaced by electrostatic attraction generated in the mirror.
- the mirror driving unit includes a piezoelectric element, and the mirror unit is displaced according to deformation of the piezoelectric element.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the mirror driving unit.
- the acceleration sensor includes a movable electrode portion and a fixed electrode portion that are separated via a gap, and the movable electrode and the fixed electrode according to an acceleration generated in the optical head device. The distance between and changes.
- the aberration correction unit includes a base, a movable part having a light reflecting surface, which is displaceable with respect to the base, and an elastic support part that supports the movable part. And a fixed electrode part formed on the base so as to face the movable part.
- the aberration correction unit includes a base, a movable part having a light reflecting surface, which is displaceable with respect to the base, and an elastic support part that supports the movable part. And a piezoelectric member for displacing the movable part.
- the optical information device of the present invention includes the optical head device, a light source driving unit that drives the light source,
- An objective lens mechanism driving unit that drives an objective lens mechanism that controls the position of the objective lens included in the optical system, and a traverse mechanism driving that drives a traverse mechanism that transports the optical head device along the radial direction of the optical disk medium.
- the optical disc medium A rotating mechanism driving unit that drives a rotating rotating mechanism; and at least one of the light source driving unit, the objective lens mechanism driving unit, the traverse mechanism driving unit, and the rotating mechanism driving unit.
- a drive signal generation unit configured to generate a drive signal for driving one according to the detected physical condition.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the mirror driving unit.
- the optical information device of the present invention is an optical information device including the optical head device, and the optical information device tilts at least one of an objective lens provided in the optical system and the optical disk medium.
- the optical information device further includes the tilt mechanism driving unit, the optical element mechanism driving unit, the collision preventing mechanism driving unit, And further comprising a drive signal generator for generating in response to Deingu Organization drive and physical condition detected before Symbol a drive signal for driving at least one of the cooling fan drive.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the mirror driving unit.
- the actuator of the present invention is an actuator including a light modulation unit that modulates light, and the light modulation unit has a base and a light reflection surface, and is displaceable with respect to the base.
- a movable part, an elastic support part that supports the movable part, a piezoelectric member that displaces the movable part, and a detection part that detects a physical condition given to the actuator are provided.
- the detection unit is the piezoelectric member, and detects the physical condition from distortion of the piezoelectric member.
- the physical conditions are temperature, humidity, acceleration, angular velocity, angular acceleration. At least one of degree and pressure.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the light modulation unit.
- the detection unit is arranged in at least a part of the light modulation unit.
- the detection unit is arranged on at least a part of an outer peripheral portion of the light modulation unit.
- the manufacturing method of the present invention is a manufacturing method of an actuator in which the movable portion is displaced by an electrostatic attractive force generated between the movable electrode and the fixed electrode, and the fixed electrode is formed on a base.
- Depositing a sacrificial layer on the fixed electrode; forming the movable electrode and an elastic support portion supporting the movable electrode on the sacrificial layer; and at least the movable electrode and the elastic support portion On the other hand, it includes a step of depositing a material different from the material of the movable electrode and the elastic support portion to form a bimetal structure.
- the aberration correction unit includes a detection unit that detects a physical condition in the optical head device. Since the aberration correction unit detects the physical condition, it is not necessary to mount a separate detection unit, so that the optical head device can be reduced in size, simplified, and reduced in cost. Further, the drive signal generation unit generates a drive signal according to the detected physical condition. As a result, the operation of each component of the optical information apparatus can be controlled according to the detected physical condition.
- FIG. 1 is a diagram showing an optical information device according to an embodiment of the present invention.
- FIG. 2 is a diagram showing time-division driving according to an embodiment of the present invention.
- FIG. 3A is a diagram showing a structure of a detection unit according to an embodiment of the present invention.
- FIG. 3B is a diagram showing a structure of a detection unit according to an embodiment of the present invention.
- FIG. 3C is a diagram showing a structure of a detection unit according to the embodiment of the present invention.
- FIG. 3D is a diagram showing a structure of a detection unit according to the embodiment of the present invention.
- ⁇ 3E] is a diagram showing a structure of a detection unit according to an embodiment of the present invention.
- FIG. 5 is a diagram showing a piezoelectric element type actuator according to an embodiment of the present invention.
- FIG. 6 is a diagram showing sound pressure detection by the microphone according to the embodiment of the present invention.
- FIG. 8 is an exploded perspective view showing a mirror element according to an embodiment of the present invention.
- FIG. 9 A perspective view showing a mirror array structure of an aberration correction element according to an embodiment of the present invention.
- FIG. 10A is a diagram showing a method of manufacturing an aberration correction element according to an embodiment of the present invention.
- FIG. 10B is a diagram showing a method of manufacturing an aberration correction element according to an embodiment of the present invention.
- FIG. 10C is a diagram showing a method of manufacturing an aberration correction element according to an embodiment of the present invention.
- FIG. 10D is a diagram showing a method of manufacturing an aberration correction element according to an embodiment of the present invention.
- FIG. 10E A diagram showing a method of manufacturing the aberration correction element according to the embodiment of the present invention.
- FIG. 10F is a diagram showing a method of manufacturing the aberration correction element according to the embodiment of the present invention.
- FIG. 10G A diagram showing a method of manufacturing an aberration correction element according to an embodiment of the present invention.
- FIG. 10H A diagram showing a method of manufacturing an aberration correction element according to an embodiment of the present invention.
- FIG. 11 is an enlarged view of a trench portion of the aberration correction element according to the embodiment of the present invention.
- FIG. 12A A diagram showing a method for manufacturing an aberration correction element including an acceleration sensor according to an embodiment of the present invention.
- FIG. 12B is a diagram showing a method for manufacturing the aberration correction element including the acceleration sensor according to the embodiment of the present invention.
- FIG. 12C is a diagram showing a method of manufacturing the aberration correction element including the acceleration sensor according to the embodiment of the present invention.
- FIG. 12D is a diagram showing a method for manufacturing the aberration correction element including the acceleration sensor according to the embodiment of the present invention.
- FIG. 13 is a view showing an arrangement of weights of the acceleration sensor according to the embodiment of the present invention.
- FIG. 14A is a diagram showing a method for manufacturing an aberration correction element including a temperature sensor according to an embodiment of the present invention.
- FIG. 14B is a diagram showing a method of manufacturing the aberration correction element including the temperature sensor according to the embodiment of the present invention.
- FIG. 14C is a diagram showing a method for manufacturing the aberration correction element including the temperature sensor according to the embodiment of the present invention.
- FIG. 14D is a diagram showing a method for manufacturing the aberration correction element including the temperature sensor according to the embodiment of the present invention.
- FIG. 14E A diagram showing a method for manufacturing an aberration correction element including a temperature sensor according to an embodiment of the present invention.
- FIG. 14F A diagram showing a method of manufacturing an aberration correction element including a temperature sensor according to an embodiment of the present invention.
- FIG. 16 is a diagram for explaining a method of detecting a displacement amount of a piezoelectric element type mirror element according to an embodiment of the present invention.
- FIG. 19 A diagram illustrating a camera according to an embodiment of the present invention.
- FIG. 20 is a diagram showing a camera according to an embodiment of the present invention.
- ⁇ 22] A diagram showing an image projection apparatus according to an embodiment of the present invention.
- FIG. 1 is a diagram showing an optical information device 101 of the present embodiment.
- the optical information device 101 includes an optical head device 100.
- the optical head device 100 includes a laser light source 1 that outputs laser light and an aberration correction element 6 that corrects the aberration of the laser light 1.
- the aberration correction element 6 includes a detection unit that detects a physical condition in the optical head device 100. Since the optical compensation device 6 detects the physical condition, the optical head device 100 does not need to have a separate detector. Details of the aberration correction element 6 will be described later.
- the optical information device 101 further includes a traverse mechanism 13, a loading mechanism 14, an optical disk medium rotation mechanism 15, an optical disk medium tilt mechanism 16, and a cooling fan 17.
- the optical information device 101 further includes a wavefront pattern generator 103, an objective lens driving mechanism driving unit 104, an optical disk medium tilting mechanism driving unit 105, an optical disk medium rotating mechanism driving unit 106, and a traverse mechanism driving unit 107.
- the laser light source drive unit 108, the collision prevention mechanism drive unit 109, the loading mechanism drive unit 110, the cooling fan drive unit 111, and the optical element drive mechanism drive unit 112 are further provided. These drive units are driven and controlled by a drive signal generated by the detection signal conversion unit according to the detected physical condition.
- the optical head device 100 includes a polarizing beam splitter 2, a collimating lens 3, a beam expander 4, a 1Z4 wavelength plate 5, an objective lens driving mechanism 7, an objective lens 8, and an anti-collision mechanism 9.
- the detection lens 11, the photodetector 12, and the detection signal converter 102 are further provided.
- the polarization beam splitter 2, collimating lens 3, beam expander 4, 1Z4 wavelength plate 5, and object lens 8 are optical systems for irradiating the optical disk medium 10 with laser light.
- the laser light output from the laser light source 1 is reflected by the aberration correction element 6 through the polarization beam splitter 2, the collimating lens 3, and the 1Z4 wavelength plate 5, and condensed by the objective lens 8.
- the laser beam condensed by the objective lens 8 passes through the cover layer 10a of the optical disk medium 10 and forms a spot on the recording layer 10b.
- the reflected light reflected by the optical disk medium 10 is reflected by the polarization beam splitter 2 along the reverse path. And is incident on the photodetector 12 through the detection lens 11.
- the photodetector 12 generates a reproduction signal and servo signals for focus and tracking from the received reflected light.
- the objective lens drive unit 104 performs an arithmetic processing on the servo signal to drive the objective lens drive mechanism 7 and performs focus and tracking servo of the objective lens 8. Further, the objective lens driving mechanism 7 can also function as a tilt mechanism for tilting the objective lens 8 under the control of the optical disc tilt mechanism driving unit.
- the wavelength of the laser beam output from the light source 1 is, for example, a wavelength (405 nm) corresponding to BD.
- the light incident surface force of the optical disk medium 10 mounted on the optical information device 101 also causes spherical aberration depending on the difference in the distance to the recording layer 10b (that is, the thickness of the base material), chromatic aberration generated in the optical system, etc.
- a wavefront pattern that cancels this out is generated by the wavefront pattern generator 103, the aberration correction element 6 is driven to correct the aberration, and a beam spot suitable for recording or reproduction is formed.
- a part of the drive unit of the aberration correction element 6 is also a displacement detector, and the amount of displacement obtained from the displacement detection unit is for feedback control of at least one component of the optical information device 101. Used.
- the displacement amount is used for feedback control of the wavefront pattern generator 103.
- the wavefront non-turn generator 103 is a drive unit that generates a correction wavefront in the micromirror 6b of the convergence correction element 6 in order to correct the wavefront aberration generated in the optical information device 101.
- the micromirror 6b functions as an optical modulation unit that modulates light.
- the aberration correction element 6 includes a base 6a, and micromirrors 6b, which are mirror elements, are two-dimensionally arranged on the base 6a. Each micromirror is tilted with respect to the base. Can be controlled independently to form any wavefront.
- a micromirror array is manufactured on a silicon substrate by a microfabrication technique of a semiconductor manufacturing process. For example, the techniques disclosed in Japanese Patent Application No. 2003-564638 and Japanese Patent Application No. 2004-063518 of Patent Document 6 are suitable.
- FIG. 8 is an exploded perspective view showing a micromirror 6b which is a micro mechanical structure according to the present invention.
- the micro mirror 6b is an electrostatic drive type actuator.
- the micromirror 6b is provided with a base 6a, a light reflecting surface 49, a movable electrode 47 that is displaceable with respect to the base 6a, an elastic support 46 that supports the movable electrode 47, and the movable electrode 47.
- the force movable electrode 47 and the fixed electrode 44 serve as both a mirror driving unit that displaces the light reflecting surface 49 and a detection unit that detects a physical condition given to the micromirror 6b.
- the base 6a is obtained by covering the top layer of the CMOS circuit 6c formed on the silicon substrate with an insulating layer and flattening it.
- a ground electrode 43 and three fixed electrodes 44 are formed on the insulating layer.
- a conductive material capable of being formed at a low temperature of 450 ° C. or lower such as aluminum (A1) alloy, polysilicon germanium (Poly-SiGe), or the like is used.
- Each of the three fixed electrodes 44 is connected to the CMOS circuit by vias (not shown) formed in the insulating layer on the surface of the base 6a.
- the CMOS circuit 6c can apply an independent drive voltage to the fixed electrode 44 within a range of 0 to 5V. This drive voltage can be set as a multi-step value of lObit, for example.
- a support 45 is formed on the ground electrode 43, and the elastic support portion 46 and the movable electrode 47 are formed on the same plane so as to have a predetermined gap with respect to the fixed electrode 44.
- the three elastic support portions 46 are arranged so as to be directed toward the center from the three support posts 45. In the region between the elastic support portions 46, a movable electrode 47 extending from the central portion where the three elastic support portions 46 intersect is formed.
- a vertical rib 48 is formed on the movable electrode 47, and a mirror surface (light reflecting surface) 49 is further formed thereon.
- a vertical rib connecting portion 47b in which the end face of the vertical rib 48 is connected to the movable electrode 47 is indicated by a two-dot chain line.
- the vertical ribs 48 are connected over almost the entire area of the movable electrode 47.
- a region corresponding to the elastic support portion 46 is formed with a notch 48a, and a gap is formed by the level difference.
- the movable electrode 47, the vertical rib 48, and the mirror surface 49 are integrally elastic. It is supported hollow by the support part 46 and functions as a movable part. The movable part is connected to the ground electrode 43.
- the entire movable part When a driving voltage is applied to the fixed electrode 44, the entire movable part is attracted toward the base 6a by the electrostatic force acting between the fixed electrode 44 and the movable electrode 47. Depending on the driving voltage balance of the three fixed electrodes 44, the movable part translates downward or tilts in multiple axes.
- the movable portion When the application of the drive voltage is stopped, the movable portion returns to the original position and the original posture by the elastic restoring force of the elastic support portion 46.
- FIG. 9 shows a mirror array in which such a structure is used as a single cell and these are arranged in a two-dimensional array.
- the mirror portion, the movable electrode, and the elastic support portion are also partially omitted.
- mirror surfaces 49 formed in regular hexagons are arranged with a certain gap (for example, 1 m) therebetween. Between adjacent cells, an elastic support portion 46 is formed so as to share the column 45. Each mirror element shares the base 6a.
- the number of mirror cells is determined by the required wavefront accuracy formed by the mirror array. As the number of mirror cells increases, the accuracy of wavefront approximation improves, but on the other hand, the amount of control data for the mirror becomes enormous, which increases the load on the control circuit. Also, the control data transfer rate becomes a bottleneck, and the response speed of the entire mirror array is greatly reduced. For this reason, it is preferable to minimize the number of mirrors within a range where the necessary approximate accuracy can be obtained.
- the beam diameter of ⁇ 2 mm is divided into 20 and the width of the mirror cell is about 100 ⁇ m.
- the required displacement amount of the mirror is determined by adding the displacement necessary for obtaining the maximum inclination to the half wavelength of the laser beam wavelength.
- the maximum inclination is determined by the amount of aberration to be corrected.
- the maximum displacement is 0.6 m, with a half-wavelength of 203 nm and a tilt of about 400 nm.
- the changing force of the current flowing through the movable electrode 47 can also detect the capacitance C.
- this detection method can detect the capacitance C even while the mirror element is being driven.
- the detection signal converter 102 may detect the capacitance C and the displacement amount.
- the optical head device 100 includes a collision prevention mechanism 9 that prevents the objective lens 8 from contacting the objective lens 8 and the optical disc medium 10. Further, the optical head device 100 includes a beam expander 4 having a drive unit as an optical element that substitutes for the aberration correction function of the aberration correction element 6. When the beam expander 4 is used as an optical element that substitutes the aberration correction function of the aberration correction element 6, the aberration correction element 6 may be changed to an optical element having a reflecting surface.
- the beam expander 4 includes an optical element mechanism that controls the position of the beam expander 4, and is driven by the optical element mechanism driving unit 112.
- the traverse mechanism 13 transports the optical head device 100 along the radial direction of the optical disk medium 10.
- the loading mechanism 14 and the disk tray 41 transport the optical disk medium 10 to the rotating mechanism 15 that rotates the optical disk medium 10.
- the cooling fan 17 cools the components of the optical information apparatus 101 and the electronic substrate on which they are formed.
- the displacement amount obtained from the displacement detector of the aberration correction element 6 is converted into a signal necessary for control by the detection signal converter 102 and fed back.
- the laser light source 1 since the laser light source 1 has a temperature dependency on the current-optical power characteristic, a temperature signal converted into a displacement force is fed back to the laser light source driving unit 108.
- the light quantity of the laser light source 1 is controlled.
- the signal of the photodetector 12, the temperature signal converted by the detection signal conversion unit 102, the acceleration signal, and the angular velocity signal are fed back to the objective lens mechanism driving unit 104 to control the objective lens mechanism unit 7.
- the objective lens mechanism unit 7 performs focusing and tracking servo of the objective lens 8. As a result, temperature compensation of the actuator sensitivity of the objective lens mechanism unit 7 can be performed and control for disturbance can be performed.
- an acceleration signal is fed back to the collision prevention mechanism driving unit 109 to control the collision prevention mechanism 9.
- the collision prevention mechanism 9 intervenes between the objective lens 8 and the optical disk medium 10 so that they do not come into contact with each other.
- the traverse mechanism 13 moves the optical head device 100 in the radial direction of the optical disc medium 10.
- a temperature signal and an acceleration signal are fed back to the traverse mechanism drive unit 107, and the temperature compensation and acceleration control of the motor of the traverse mechanism 13 are performed.
- the loading mechanism 14 transports the optical disk medium 10 to the rotation mechanism 15.
- a temperature signal and an acceleration signal are fed back to the loading mechanism drive unit 110 that drives the loading mechanism 14 to control the temperature compensation and acceleration of the motor of the loading mechanism 14.
- the tilt mechanism 16 tilts the rotation mechanism 15 that rotates the optical disc medium 10 or the optical disc medium 10.
- the temperature signal, the acceleration signal, and the angular acceleration signal are fed back to the optical disk medium rotation mechanism driving unit 106 or the optical disk medium tilting mechanism driving unit 105 to drive the tilt mechanism 16 and to compensate for the temperature of the motor of the rotation mechanism 15. Control of disturbance acceleration and angular velocity is performed.
- the cooling fan 17 cools the inside of the optical information device 101.
- the cooling fan driving unit 111 that drives the cooling fan 17 is fed back with a temperature signal force s and controlled to suppress characteristic fluctuations due to temperature rise.
- the detection signal conversion unit 102 detects the dew point from the temperature signal and the humidity signal in order to limit the operation of the mechanical system at the time of dew condensation or before the dew condensation, and provides feedback to the drive unit of the mechanical system. do it! / [0088] In this way, the amount of displacement detected by the displacement detection unit of the aberration correction element 6 or a signal obtained by converting the amount of displacement is used to individually obtain only detection signals necessary for feedback control. Multiple detectors can be deleted.
- optical information device 101 is an example, and the feedback mechanism is not limited to this! /.
- FIG. 2 shows a state where the light beam 18 is incident obliquely on the surface of the displacement detector 19 of the aberration correction element 6.
- the displacement detector 19 is a part of a micromirror array in which micromirrors 6b for correcting aberrations of the condensing optical system are two-dimensionally arranged, and can form an arbitrary wavefront.
- the displacement detector 19 is an electrostatic drive type actuator that can obtain the amount of displacement of the movable portion of the capacitance changing force.
- a control signal for correcting the aberration of the collecting optical system is sent from the wavefront pattern generator 103 to the micromirror array including the displacement detector 19.
- a part of the micromirror array detects the displacement amount of the capacitance as the displacement detector 19.
- the CMOS circuit 6c switches between driving the displacement detector 19 for correcting aberrations and detecting the amount of displacement from the displacement detector 19 at high speed.
- the displacement amount is detected within a range in which necessary aberration correction is ensured.
- This time-division drive method is particularly effective when the entire surface of the displacement detection unit is irradiated with a light beam.
- the mirror element used as the displacement detection unit may be shifted according to the shift amount.
- the displacement detection unit of the aberration correction element 6 for obtaining the temperature signal, humidity signal, acceleration signal, angular velocity signal, and pressure signal from the signal obtained by converting the displacement amount obtained from the displacement detection unit of the aberration correction element 6. The structure will be described.
- FIG. 3A is a side view showing an example of the structure of a displacement detection unit for obtaining a temperature signal.
- the displacement detection unit has a bimetallic cantilever structure in which an aluminum layer 20 and a silicon layer 21 having different expansion coefficients are bonded to each other.
- An aluminum layer 22 is provided through a cantilever structure and a gap.
- the cantilever structure can be greatly warped due to temperature changes. This warpage changes the capacitance C generated between the bimetallic cantilever structure and the aluminum layer 22. This capacitance C is detected and converted to obtain a temperature signal.
- the movable electrode 47 (FIG. 8) of at least one mirror element 6b has a bimetal cantilever structure as described above, a displacement detector for obtaining a temperature signal can be realized.
- FIG. 3B is a side view showing an example of the structure of the displacement detection unit for obtaining the humidity signal.
- the displacement detection unit has a capacitor structure in which a polymer film 24 is sandwiched between metal thin films of aluminum 23.
- the capacitance C changes according to the amount of moisture absorbed by the polymer film 24.
- the capacitance C of this capacitor structure is detected and converted to obtain a humidity signal.
- a displacement detector for obtaining a humidity signal can be realized.
- FIG. 3C is a side view showing an example of the structure of the displacement detection unit for obtaining the acceleration signal.
- the displacement detection part has a structure in which a weight 25 of a movable part made of silicon is suspended from a panel, and an aluminum layer 26 is formed through the weight 25 and a gap. Due to the displacement of the weight 25 of the movable part, the capacitance C generated between the weight 25 and the aluminum layer 26 changes. This capacitance change and time are detected and converted to obtain an acceleration signal. For example, by providing the weight 25 on the movable part of at least one mirror element 6b, a displacement detection part for obtaining an acceleration signal can be realized.
- FIG. 3D is a perspective view showing the principle of detecting the angular velocity.
- a corrigica ⁇ perpendicular to the vibration direction X acts.
- This Coriolis cocoon is detected and converted to obtain an angular velocity signal.
- Coriolis Y acts on the movable electrode 47, and the movable electrode 47 moves toward the fixed electrode 44.
- Vibration occurs to tilt.
- This inclination changes the capacitance C.
- the change in capacitance due to this inclination is detected and converted to obtain an angular velocity signal. It also vibrates as its tilts
- An angular acceleration signal can be obtained by detecting and converting changes in the period of vibration.
- FIG. 3E is a side view showing an example of the structure of a displacement detection unit for obtaining a pressure signal.
- the upper silicon layer 28 and the lower silicon layer 31 are joined via an oxide film 29 as an insulating layer, and the displacement detector has a structure in which the upper silicon layer 28 is distorted when subjected to pressure.
- a change in capacitance C generated between the aluminum layer 30 provided on the lower silicon 31 and the upper silicon layer 28 when it is distorted is detected and converted to obtain a pressure signal.
- a pressure signal can be obtained by detecting a change in capacitance between the movable electrode 47 and the fixed electrode 44 caused by the distortion of the movable electrode 47 due to pressure.
- FIG. 4 is a side view showing a mirror element of the aberration correction element 6.
- Aluminum layers 32 a and 32 b are formed as fixed electrode portions 32 on silicon 33.
- An aluminum movable electrode 35 is provided through the fixed electrode portion 32 and a space.
- the upper surface of the movable electrode 35 is a reflecting surface that reflects light.
- a voltage is applied to the aluminum layer 32 a that is a fixed electrode, a potential difference is generated between the aluminum layer 32 a and the movable electrode 31.
- This potential difference also generates an electrostatic attractive force 34, causing the movable electrode 31 to tilt.
- this mirror element is used as a detector, the distance between the movable electrode 35 and the fixed electrode 32 changes depending on the physical conditions, and the capacitance C generated between the electrodes changes. Detect the amount of change in capacitance C.
- FIG. 5 is a top view showing a piezoelectric element type actuator structure.
- the silicon movable part 36 can be displaced by applying a voltage to the piezoelectric element 38.
- the upper surface of the silicon movable part 36 is a reflecting surface that reflects light, and the actuator functions as a mirror element. Further, when the silicon movable part 36 is displaced according to the physical condition, a voltage is generated in the piezoelectric element 38. Therefore, a feedback signal can be obtained by detecting and converting the generated voltage. From these two characteristics, a piezoelectric element type actuator can be used as a mirror element. It can be used as a detector.
- FIG. 6 is a diagram showing a microphone 39 provided in the aberration correction element 6.
- the physical condition of pressure includes sound pressure.
- a microphone 39 is provided in the aberration correction element 6 to detect the sound around the aberration correction element 6 and feedback-control the components of the optical information device 101 according to the detected sound. For example, when an abnormal sound that makes it difficult to determine stable control operation occurs in the loading mechanism 14, the rotation mechanism 15, the tilt mechanism 16, etc., the detection signal conversion unit 102 drives each signal to stop the operation. Output to the section.
- the above-described signal transmission procedure is an example, and the detection unit of the aberration correction element 6 that inputs a signal to the detection signal conversion unit 102 and the drive unit that the detection signal conversion unit 102 performs feedback control are used. It is not limited to.
- FIG. 7 is a diagram showing the transmitter 40 included in the aberration correction element 6.
- the aberration correction element 6 is provided with a receiver, bidirectional communication with an external device is also possible.
- FIG. 10A to FIG. 10H a manufacturing process of a mirror element included in the aberration correction element 6 will be described, and a structure of an acceleration sensor formed using the manufacturing process will be described.
- FIG. 10A to FIG. 10H includes a plan view and a sectional view showing each manufacturing process.
- the cross-sectional view is drawn with emphasis on the characteristic part of the structure, and is not necessarily a cross-sectional view faithful to the actual product.
- FIG. 10A shows a state where the ground electrode 43 and the fixed electrode 44 are formed on the base 6a.
- an aluminum film with a thickness of 0.5 m is formed by sputtering and patterned by photolithography.
- the base 6a is obtained by covering the top layer of the CMOS circuit formed on the silicon substrate with the insulating layer and flattening it.
- each electrode is electrically connected to the CMOS circuit section through a contact via provided in the insulating layer.
- sacrificial layer 50 covering ground electrode 43 and fixed electrode 44 is formed.
- the sacrificial layer 50 is formed from a photoresist (for example, AZP4000 series of AZ Electronic Materials) or a photosensitive polyimide (for example, PI2727 manufactured by Hitachi Chemical DuPont). Photoresist or photosensitive polyimide is applied by spin coating, then exposed and developed in a photolithographic process to form via 51, and cured by UV curing.
- a photoresist for example, AZP4000 series of AZ Electronic Materials
- a photosensitive polyimide for example, PI2727 manufactured by Hitachi Chemical DuPont.
- Photoresist or photosensitive polyimide is applied by spin coating, then exposed and developed in a photolithographic process to form via 51, and cured by UV curing.
- the via 51 is a hole for forming the support 45.
- the thickness of the sacrificial layer 50 becomes the gap between the electrodes.
- the electrostatic actuator is displaced by more than one third of the gap between electrodes, it pulls in and becomes uncontrollable. Therefore, the gap between electrodes (that is, the film thickness of the sacrificial layer 50) is maximized so that it can be controlled stably.
- the displacement is 3 m, which is five times the displacement (0.6 m).
- a metal layer constituting elastic support portion 46 and movable electrode 47 is deposited and patterned on sacrificial layer 50.
- An aluminum alloy is used for the metal layer.
- Etching Hall 47a is also put together.
- the thickness of the metal layer is determined by the design of the panel constant of the elastic support portion 46.
- the panel constant is determined so that the maximum displacement can be obtained with a driving voltage of 5 V, and the film thickness is 0.3 m.
- the movable electrode 47 Since the movable electrode 47 has the same film thickness and the bending rigidity equivalent to that of the elastic support portion 46, when the electrostatic drive is continued, the movable electrode 47 is fixed to the fixed electrode 44 simultaneously with the deformation of the elastic support portion 46. It will be deformed. However, since the vertical ribs formed in the subsequent process are connected over almost the entire area of the movable electrode 47, the vertical ribs are reinforced by the height and rigidity, and the above-described deformation is prevented.
- sacrificial layer 52 is applied on the metal layer by spin coating, and via 53 is formed in the region of movable electrode 47.
- the sacrificial layer 52 uses the same material as the sacrificial layer 50.
- a vertical rib described later is connected to the movable electrode 47.
- the vertical rib is formed with a gap corresponding to the film thickness of the sacrificial layer 52.
- the film thickness should be as large as the maximum displacement stroke of the movable part, including variations, and should be thinner than the sacrificial layer 50. Here, it is 1. Sacrifice Layer 52 is also cured by UV curing.
- sacrificial layer 54 is further applied by spin coating, and patterned by photolithography process to form trench 55.
- a high aspect ratio thick resist for example, TSMR-iNlOOOPM manufactured by Tokyo Ohka
- the thickness of the sacrificial layer 54 is determined in consideration of the rigidity of the movable portion including the movable electrode 47, the vertical rib 48, and the mirror surface 49 as the height of the vertical rib 48 described later.
- the sacrificial layer 54 has a thickness of 10 m and a trench width of 1 ⁇ m.
- metal is embedded in trench 55 to form vertical rib 48 and mirror surface 49.
- a method for embedding metal a method capable of forming a film in a deep groove, such as a method of sputtering an aluminum alloy by collimate sputtering or launder slow sputtering, a method of embedding copper or nickel, and the like, is selected.
- the film grows uniformly toward the center of force on both side walls of the trench, and after the coalescence at the center of the trench, the film is continued further upward to form the mirror surface 49.
- a concave portion 58 corresponding to the vertical rib 48 remains on the mirror surface 49. The process of embedding this metal will be described later in detail.
- the surface of mirror surface 49 is polished by CMP (Chemical Mechanical Polishing) to form a mirror surface.
- CMP Chemical Mechanical Polishing
- the outer shape of the mirror is patterned by wet etching to form a gap with the adjacent mirror. If an aluminum alloy is used as the buried metal, it can be used as a mirror surface. When other metals such as copper are used, a mirror surface is formed by further depositing a thin aluminum or silver reflective layer on the surface.
- the sacrificial layer is removed by oxygen plasma etching, and the movable part is released.
- the portion of the sacrificial layer 50 becomes the void 56
- the portion of the sacrificial layer 52 becomes the void 57.
- the movable part composed of the elastic support part 46, the movable electrode 47, and the mirror surface 49 can be displaced, and the mirror element is completed.
- a metal layer is formed in trench 55 formed in sacrificial layer 54.
- the process of embedding 58 will be described.
- the stress gradient is canceled.
- the stress gradient in the Z direction does not occur at the portion of the vertical rib 48 formed inside the trench 55. Therefore, the vertical rib 48 does not have a stress gradient in the Z direction and itself does not generate a bending moment that causes warping. ⁇ Therefore, it is necessary to give the mirror surface 49 sufficient rigidity to correct the warping.
- the movable electrode 47 is also connected to the lower end side of the vertical rib 48. For this reason, even if the movable electrode 47 and the mirror surface 49 are thin, the movable part has a very rigid structure due to the rigidity of the vertical rib 48.
- FIG. 12A to FIG. 1 show the patterning that forms the structure that becomes the weight of the acceleration sensor when the trench 55 is formed in the mirror element manufacturing process shown in FIGS. 10E to 10H.
- patterning is performed such that a part of the sacrificial layer 54 does not remain in the patterning when the trench 55 is formed.
- the width of a part of the trench is formed wider than the other part.
- metal is embedded to form vertical ribs 48 and mirror surfaces 49.
- the weight 59 is also formed in the wide portion.
- the surface of mirror surface 49 is Polished with P to form a mirror surface, and the outer shape of the mirror is patterned by wet etching to form a gap with the adjacent mirror.
- the sacrificial layer is removed by oxygen plasma etching and the movable part is released, as in the manufacturing process shown in FIG. 10H.
- the portion of the sacrificial layer 50 becomes the void 56
- the portion of the sacrificial layer 52 becomes the void 57.
- the movable portion including the elastic support portion 46, the movable electrode 47, the mirror surface 49, and the weight 59 can be displaced.
- the acceleration signal detected in this way can be used for feedback control of at least one component of the optical information device 101 described above.
- the component that is feedback controlled by the acceleration signal is not limited to the movable mechanism.
- FIG. 13 (a) shows the structure of the micromirror 6b of the aberration correction element 6.
- FIG. 13 (b) shows a structure in which the weight 59 of the acceleration sensor is formed in the entire area of the vertical rib 48 of the micromirror 6b.
- Fig. 13 (c) shows a structure in which the weight 59 of the acceleration sensor is placed in a well-balanced position in the vicinity of the support column 45 in the region of the vertical rib 48 of the micromirror 6b (approximately 25% of the surface area in the entire region).
- FIG. 13 (d) shows the area 59 of the acceleration sensor weight 59 and the vertical rib 48 of the micromirror 6b.
- Fig. 6 shows a structure (approximately 8% of the surface area in the entire area) that is unbalanced around the support 45.
- Fig. 13 (e) shows a structure in which the weight 59 of the acceleration sensor is arranged in a well-balanced manner near the support 45 in the region of the vertical rib 48 of the micromirror 6b (surface area of the entire region is about 50%). .
- Fig. 13 (f) shows a structure in which the weight 59 of the acceleration sensor is placed in an unbalanced area near the support 45 in the area of the vertical rib 48 of the micromirror 6b (surface area of the entire area is about 17%). Indicates.
- Fig. 13 (g) shows a structure in which the weight 59 of the acceleration sensor is arranged in a balanced manner on the outer peripheral side of the vertical rib 48 region of the micro mirror 6b (about 75% of the surface area in the entire region).
- Fig. 13 (h) shows a structure in which the weight 59 of the acceleration sensor is unbalanced in the area of the vertical rib 48 of the micromirror 6b and in the vicinity of the support 45 (about 25% of the total surface area). Indicates.
- the shape of the fixed electrode 44 is also formed so as to face these weights 59.
- the shape, the formation region, and the surface area ratio of the weights 59 are merely examples, and are not limited to these.
- FIGS. 14A to 14 (g) A fabrication process of a temperature sensor that can produce a bimetallic structure by adding one process to the fabrication process described with reference to FIG. 1 OA to FIG. 1 OH will be described with reference to FIGS. 14A to 14 (g).
- part of the sacrificial layer 54 is completely patterned and removed.
- the region where the sacrificial layer 54 is completely removed is a region facing the fixed electrode, and a no-metal structure is formed in this region.
- the weight 59 is removed by etching.
- the sacrificial layer 54 is also removed to the same extent as the sacrificial layer 52.
- the thickness of the sacrificial layer 54 is more than twice that of the sacrificial layer 52, there is also a sacrificial layer 50 that is not completely removed. There is no problem.
- a metal layer different from the metal material is deposited on the metal layer (the elastic support portion 46 or the movable electrode 47) exposed by the removal of the sacrificial layer 52, and the photoresist is spun.
- the cantilever 61 is formed by applying the coating method and patterning it by the photolithographic process.
- the sacrificial layer is removed by oxygen plasma etching, and cantilever 61 is released.
- the portion of the sacrificial layer 50 becomes the void 56.
- the cantilever 61 may have the shape shown in FIG. 14F or the shape shown in FIG. 3A. When viewed from the top, the cantilever 61 has a structure having a sufficient width and length with respect to the thickness.
- the temperature signal that also generates the detection force of the deformation of the cantilever 61 can be used for feedback control of at least one of the components of the optical information device 101 described above.
- the component that is feedback-controlled by the temperature signal is not limited to the above-described component.
- FIG. 15 is an exploded perspective view showing a micromirror 6d which is a piezoelectric element type actuator.
- the micromirror 6d functions as an optical modulation unit that modulates light.
- a part of the mirror is cut away to show the lower rib structure.
- the micromirror 6d is provided with a base 6a, a light reflecting surface 49, a movable part 72 that is displaceable with respect to the base 6a, an elastic support part 46 that supports the movable part 72, and a movable part 72.
- a piezoelectric member 71 for displacing.
- the piezoelectric member 71 also serves as a detection unit that detects the physical condition given to the micromirror 6d, and detects the physical condition from the distortion of the piezoelectric member 71.
- the physical conditions to be detected are the same as those of the electrostatically driven micromirror 6b.
- a weight and a bimetal structure are formed on the micromirror 6b in the same process as the manufacturing process of the micromirror 6d. .
- An example of the arrangement of weights is shown in FIG.
- An elastic support portion 46 is formed on the base 6b, and the elastic support portion 46 supports a movable portion 72.
- the movable part 72 has a vertical rib 48 and a mirror surface 49.
- a gap 73 is formed between the movable portion 72 and the base 6b.
- a piezoelectric member 71 is provided on the elastic support portion 46.
- the piezoelectric member 71 includes an upper electrode 71a and a lower electrode 71b, and the piezoelectric member 71 is displaced by applying a voltage to the upper electrode 7la and the lower electrode 71b. When the piezoelectric member 71 is displaced, the movable portion 72 can be displaced.
- the CMOS circuit 6c has a bridge circuit as shown in FIG.
- R represents the resistance of the piezoelectric member in the absence of strain
- AR represents the amount of change in the resistance of the piezoelectric member when strain occurs.
- the resistance change amount ⁇ R force can also calculate the displacement amount of the piezoelectric member.
- FIG. 17 is a diagram showing an image projection apparatus 200 according to the present embodiment.
- the image projection apparatus 200 includes a spatial light modulation element 203.
- the spatial light modulation element 203 has a configuration similar to that of the aberration correction element 6 described above, and includes a mirror element and a detector that detects a physical condition. this Thus, the image projection apparatus 200 can obtain the same effect as that of the optical information apparatus 101.
- the light emitted from the light source 201 passes through the rotating color filter 202 and is converted into red light, green light, and blue light (hereinafter referred to as RGB light).
- the RGB light is incident on the spatial light modulation element 203.
- the spatial light modulation element 203 reflects RGB light in the direction of the projection lens 205 according to the image frame, and reflects light unnecessary for forming an image in the direction of the light absorption plate 204.
- the projection lens 205 enlarges the incident RGB light, and a projection image 206 is obtained. Since the spatial light modulation element 203 includes a detector that detects a physical condition, it is possible to perform feed knock control of the components of the image projection apparatus 200 in accordance with changes in the physical conditions in the image projection apparatus 200. .
- FIG. 18 is a diagram showing the camera 300 according to the present embodiment.
- the camera 300 includes an aberration correction element 302.
- the aberration correction element 302 has the same configuration as the aberration correction element 6 described above, and includes a mirror element and a detector that detects a physical condition. As a result, the camera 300 can achieve the same effect as the optical information device 101.
- the light reflected from the subject passes through the lens group 301 and enters the aberration correction element 302, and the aberration is corrected.
- the aberration-corrected light is reflected by the mirror 303 and enters the video recording unit 304.
- the video recording unit 304 includes a light receiving element, and converts incident light into an image signal for recording.
- the force with which an ordinary camera corrects light aberration with an expensive lens group In the camera 300, aberrations can be corrected with the aberration correction element 302, so that it is not necessary to use an expensive lens group.
- the aberration correction element 302 includes a detector that detects a physical condition
- the components of the camera 300 can be feedback controlled in accordance with a change in the physical condition in the camera 300.
- a feedback signal necessary for camera shake correction can be generated from the acceleration, angular velocity, and angular acceleration detected by the detector.
- by monitoring the gravitational acceleration it is possible to perform a safe operation when the camera is dropped (for example, to return the zoomed lens to its original position).
- FIG. 19 and 20 are diagrams illustrating the camera 400 according to the present embodiment.
- Camera 400 An aberration correction element 402 is provided.
- the aberration correction element 402 has the same configuration as the aberration correction element 6 described above, and includes a mirror element and a detector that detects a physical condition. As a result, the same effect as that of the optical information device 101 can be obtained with the force lens 400.
- the aberration correction element 402 also has a function as a camera shake correction mirror element.
- FIG. 19 shows the optical path when the camera shake correction is not performed
- FIG. 20 shows the optical path when the camera shake correction is performed!
- the lens group 401 passes through the lens group 401 and enters the aberration correction element 402, and the aberration is corrected.
- the aberration correction element 402 corrects camera shake by displacing the mirror element according to the amount of camera shake.
- the light subjected to aberration correction and camera shake correction is reflected by the mirror 403 and enters the video recording unit 404.
- the video recording unit 404 includes a light receiving element, and converts incident light into an image signal for recording.
- the feedback signal required for camera shake correction can be generated from the acceleration, angular velocity, and angular acceleration detected by the detector.
- FIG. 21 is a diagram showing a microscope 500 according to the present embodiment.
- the microscope 500 includes an aberration correction element 506.
- the aberration correction element 506 has the same configuration as the aberration correction element 6 described above, and includes a mirror element and a detector that detects a physical condition. Thereby, the same effect as that of the optical information device 101 can be obtained even in the microscope 500.
- the light reflected from the surface of the sample 501 placed on the sample stage 502 passes through the objective lens 503, the half mirror 504, and the eyepiece lens 505 and enters the pupil 509, so that the sample is observed with the naked eye. Further, part of the light incident on the half mirror 504 from the objective lens 503 is reflected by the half mirror 504 and incident on the aberration correction element 506 to correct the aberration.
- the aberration-corrected light is collected by a condenser lens 507 and imaged by a CCD camera.
- the components of the microscope 500 can be feedback-controlled in accordance with changes in the physical condition in the microscope 500. For example, by controlling the position of the sample stage 502 using the feedback signal generated by the acceleration, angular velocity, and angular acceleration force detected by the detector, it is possible to prevent blurring of the observation image due to vibration and deviation of the observation point during measurement. be able to. In particular, since the field of view is narrowed at high magnification, it is important to prevent image distortion caused by vibration. [Embodiment 17]
- FIG. 22 is a diagram showing an image projection apparatus 600 according to the present embodiment.
- the image projection apparatus 600 includes a spatial light modulation element 604.
- the spatial light modulation element 604 has the same configuration as that of the aberration correction element 6 described above, and includes a mirror element and a detector that detects a physical condition. As a result, the image projection apparatus 600 can obtain the same effect as the optical information apparatus 101.
- the light emitted from the light source 601 passes through the condenser lens 602 and the color filter 603 and enters the spatial light modulator 604.
- the spatial light modulator 604 reflects light toward the projection lens 605 according to the image frame.
- the projection lens 605 magnifies the incident light, and a projection image 608 is obtained.
- the displacement force of the detector provided in the spatial light modulator 604 also detects the gravitational acceleration.
- the calculation unit 605 calculates the tilt angle from the direction of gravitational acceleration, and the control unit 606 feedback-controls the spatial light modulation element 604 according to the calculated tilt angle to correct the trapezoidal distortion of the projected image.
- a tilt sensor is separately mounted. However, when the spatial light modulation element 604 detects the gravitational acceleration, the cost of the entire apparatus can be reduced.
- the light modulation operation and the displacement detection operation are time-divisionally performed. May be switched.
- the micromirror array that best exhibits the effects obtained by the present invention has been adopted as the aberration correction element.
- any element can be used that can set the aberration correction state for each region with good response.
- the same effect can be obtained by providing a displacement detection unit in an aberration correction element such as a liquid crystal element.
- a temperature signal, a humidity signal, an acceleration signal, an angular velocity signal, etc. are generated from the change in electrostatic capacity of the aberration correction element or the displacement amount of the piezoelectric element. Therefore, the number of individual detectors can be reduced, and the optical head device can be downsized, the mechanism can be simplified, and the cost can be reduced.
- the activator of the present invention includes an optical modulation unit that modulates light, and the optical modulation unit includes a base and a light reflecting surface, and the base A movable part displaceable with respect to the elastic member, an elastic support part that supports the movable part, and the movable part.
- a fixed electrode portion formed on the base and a detection portion for detecting a physical condition given to the actuator are provided.
- the detection unit is the movable unit and the fixed electrode unit.
- the displacement amount force between the movable part and the fixed electrode part detects the physical condition.
- the physical condition is at least one of temperature, humidity, acceleration, angular velocity, angular acceleration, and pressure.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the light modulation unit.
- the movable part is displaced by an electrostatic attractive force generated between the movable part and the fixed electrode.
- the detection unit is arranged in at least a part of the light modulation unit.
- the detection unit is disposed on at least a part of an outer peripheral portion of the light modulation unit.
- the manufacturing method of the present invention is a manufacturing method of an actuator in which the movable portion is displaced by an electrostatic attractive force generated between the movable electrode and the fixed electrode, and the fixed electrode is formed on a base.
- An optical head device of the present invention includes an optical head device that includes a light source that outputs laser light, an optical system that irradiates the optical disk medium with the laser light, and an aberration correction unit that corrects the aberration of the laser light.
- the aberration correction unit includes a plurality of mirror units that reflect the laser beam, a plurality of mirror driving units that displace the plurality of mirror units, and a detection that detects a physical condition in the optical head device. And a portion.
- the detection unit is at least one mirror driving unit of the plurality of mirror driving units.
- a drive signal generating unit that generates a predetermined drive signal according to the detected physical condition is further provided.
- the physical condition is at least one of temperature, humidity, acceleration, angular velocity, angular acceleration, and pressure.
- the at least one mirror driving unit switches in time division between an operation of driving at least one of the mirror units for aberration correction and an operation of detecting the physical condition.
- the mirror driving unit includes a movable electrode unit and a fixed electrode unit separated by a gap, and the mirror driving unit is provided between the movable electrode and the fixed electrode.
- the mirror portion is displaced by electrostatic attraction generated in the mirror.
- the mirror driving unit includes a piezoelectric element, and the mirror unit is displaced according to deformation of the piezoelectric element.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the mirror driving unit.
- the acceleration sensor includes a movable electrode part and a fixed electrode part that are separated via a gap, and the movable electrode and the fixed electrode according to the acceleration generated in the optical head device. The distance between and changes.
- the aberration correction unit includes a base, a movable part having a light reflection surface, which is displaceable with respect to the base, and an elastic support part that supports the movable part. And a fixed electrode part formed on the base so as to face the movable part.
- the aberration correction unit includes a base, a movable part having a light reflection surface, which is displaceable with respect to the base, and an elastic support part that supports the movable part. And a piezoelectric member for displacing the movable part.
- the optical information device of the present invention includes the optical head device, a light source driving unit that drives the light source,
- An objective lens mechanism driving unit that drives an objective lens mechanism that controls the position of the objective lens included in the optical system, and the optical head device along the radial direction of the optical disk medium.
- a traverse mechanism drive unit that drives a traverse mechanism to be transferred; a rotation mechanism drive unit that drives a rotation mechanism that rotates the optical disc medium; the light source drive unit; the objective lens mechanism drive unit; the traverse mechanism drive unit; At least of the rotating mechanism drive
- a drive signal generation unit configured to generate a drive signal for driving one according to the detected physical condition.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the mirror driving unit.
- the optical information device of the present invention is an optical information device including the optical head device, and the optical information device tilts at least one of an objective lens provided in the optical system and the optical disc medium.
- the optical information device further includes the tilt mechanism driving unit, the optical element mechanism driving unit, the collision preventing mechanism driving unit, And further comprising a drive signal generator for generating in response to Deingu Organization drive and physical condition detected before Symbol a drive signal for driving at least one of the cooling fan drive.
- the detection unit is an acceleration sensor manufactured by the same process as the manufacturing process of the mirror driving unit.
- the activator of the present invention is an actuator including a light modulating unit for modulating light, and the light modulating unit has a base and a light reflecting surface, and is displaceable with respect to the base.
- a movable part, an elastic support part that supports the movable part, a piezoelectric member that displaces the movable part, and a detection part that detects a physical condition given to the actuator are provided.
- the detection unit is the piezoelectric member, and detects the physical condition from distortion of the piezoelectric member.
- the physical condition is at least one of temperature, humidity, acceleration, angular velocity, angular acceleration, and pressure.
- the detection unit is an acceleration sensor manufactured by the same process as a process of manufacturing the light modulation unit.
- the detection unit is arranged in at least a part of the light modulation unit.
- the detection unit is arranged on at least a part of an outer peripheral portion of the light modulation unit.
- the manufacturing method of the present invention is a manufacturing method of an actuator in which the movable portion is displaced by an electrostatic attractive force generated between the movable electrode and the fixed electrode, and the fixed electrode is formed on a base.
- Depositing a sacrificial layer on the fixed electrode; forming the movable electrode and an elastic support portion supporting the movable electrode on the sacrificial layer; and at least the movable electrode and the elastic support portion On the other hand, it includes a step of depositing a material different from the material of the movable electrode and the elastic support portion to form a bimetal structure.
- the present invention is particularly useful in the technical field of performing aberration correction.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Recording Or Reproduction (AREA)
- Optical Head (AREA)
- Optical Elements Other Than Lenses (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
Claims
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JP2007532196A JPWO2007023940A1 (ja) | 2005-08-26 | 2006-08-25 | アクチュエータ、光ヘッド装置および光情報装置 |
US12/064,650 US8031578B2 (en) | 2005-08-26 | 2006-08-25 | Microarray with actuators inside and outside of light-irradiated region, and optical head device and optical information device incorporating the same |
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JP2008282016A (ja) * | 2007-05-10 | 2008-11-20 | Leica Microsystems (Schweiz) Ag | 振動補償機能を有する光学装置 |
JP2010534862A (ja) * | 2007-07-25 | 2010-11-11 | ユニヴァーシティ オブ ワシントン | 圧電アクチュエータによる光ファイバの作動、及び圧電アクチュエータにより生成される電圧の検出 |
KR20150039875A (ko) * | 2007-08-03 | 2015-04-13 | 하마마츠 포토닉스 가부시키가이샤 | 레이저 가공 방법, 레이저 가공 장치 및 그 제조 방법 |
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JP2008278609A (ja) * | 2007-04-27 | 2008-11-13 | Sanyo Electric Co Ltd | 電磁アクチュエータ |
DE102010063337B9 (de) * | 2010-12-17 | 2020-05-07 | Carl Zeiss Ag | Verfahren zur Maskeninspektion sowie Verfahren zur Emulation von Abbildungseigenschaften |
JPWO2013187003A1 (ja) * | 2012-06-15 | 2016-02-04 | パナソニックIpマネジメント株式会社 | アクチュエータと光学反射素子およびそれを用いた画像形成装置 |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
CN110095858B (zh) * | 2018-12-12 | 2021-06-08 | 中国科学院紫金山天文台 | 自适应光学变形镜弹性模态像差表征方法 |
DE102020207566B4 (de) | 2020-06-18 | 2023-02-16 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zur Charakterisierung einer Maske für die Mikrolithographie |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002355798A (ja) * | 2001-06-04 | 2002-12-10 | Hitachi Ltd | マイクロポンプ、マイクロミキサー、マイクロ機械デバイス、マイクロ可動ミラーおよび光スイッチ |
JP2003198943A (ja) * | 2001-12-28 | 2003-07-11 | Toshiba Corp | 撮像装置 |
JP2003255244A (ja) * | 2002-03-05 | 2003-09-10 | Brother Ind Ltd | 光走査装置及び光走査装置を備えた画像形成装置 |
WO2004041710A1 (ja) * | 2002-11-06 | 2004-05-21 | Matsushita Electric Industrial Co., Ltd. | 変位検出機能を備えたマイクロアクチュエータ、および当該マイクロアクチュエータを備えた可変形ミラー |
JP2004279935A (ja) * | 2003-03-18 | 2004-10-07 | Olympus Corp | 可動ミラー装置および光ファイバ装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5535047A (en) | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
EP0984440A3 (en) | 1998-09-04 | 2000-05-24 | Matsushita Electric Industrial Co., Ltd. | Aberration detection device and optical information recording and reproducing apparatus |
JP4323632B2 (ja) | 1998-09-04 | 2009-09-02 | パナソニック株式会社 | 収差検出装置 |
US6952304B2 (en) * | 2001-01-30 | 2005-10-04 | Matsushita Electric Industrial Co., Ltd. | Variable mirror and information apparatus comprising variable mirror |
JP4576058B2 (ja) * | 2001-01-31 | 2010-11-04 | オリンパス株式会社 | 変位検出機能を備えた可変形状鏡 |
JP2002288873A (ja) * | 2001-03-27 | 2002-10-04 | Ricoh Co Ltd | 光情報記録再生装置 |
WO2003065103A1 (fr) | 2002-01-29 | 2003-08-07 | Matsushita Electric Industrial Co., Ltd. | Miroir a forme variable et dispositif de regulation de lumiere possedant ledit miroir |
JP2004063518A (ja) | 2002-07-25 | 2004-02-26 | Sony Corp | 半導体装置 |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
JP3766413B2 (ja) | 2003-09-10 | 2006-04-12 | 沖電気工業株式会社 | データ並び替え方法 |
JP4265419B2 (ja) * | 2004-01-27 | 2009-05-20 | パナソニック株式会社 | 光ディスク装置および光ディスク装置の記録方法 |
US7859167B2 (en) | 2004-03-08 | 2010-12-28 | Panasonic Corporation | Micro actuator having tilt and vertical displacement and device having such micro actuator |
-
2006
- 2006-08-25 US US12/064,650 patent/US8031578B2/en not_active Expired - Fee Related
- 2006-08-25 JP JP2007532196A patent/JPWO2007023940A1/ja active Pending
- 2006-08-25 WO PCT/JP2006/316719 patent/WO2007023940A1/ja active Application Filing
- 2006-08-25 CN CNA2006800307973A patent/CN101248487A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002355798A (ja) * | 2001-06-04 | 2002-12-10 | Hitachi Ltd | マイクロポンプ、マイクロミキサー、マイクロ機械デバイス、マイクロ可動ミラーおよび光スイッチ |
JP2003198943A (ja) * | 2001-12-28 | 2003-07-11 | Toshiba Corp | 撮像装置 |
JP2003255244A (ja) * | 2002-03-05 | 2003-09-10 | Brother Ind Ltd | 光走査装置及び光走査装置を備えた画像形成装置 |
WO2004041710A1 (ja) * | 2002-11-06 | 2004-05-21 | Matsushita Electric Industrial Co., Ltd. | 変位検出機能を備えたマイクロアクチュエータ、および当該マイクロアクチュエータを備えた可変形ミラー |
JP2004279935A (ja) * | 2003-03-18 | 2004-10-07 | Olympus Corp | 可動ミラー装置および光ファイバ装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008282016A (ja) * | 2007-05-10 | 2008-11-20 | Leica Microsystems (Schweiz) Ag | 振動補償機能を有する光学装置 |
JP2010534862A (ja) * | 2007-07-25 | 2010-11-11 | ユニヴァーシティ オブ ワシントン | 圧電アクチュエータによる光ファイバの作動、及び圧電アクチュエータにより生成される電圧の検出 |
US8437587B2 (en) | 2007-07-25 | 2013-05-07 | University Of Washington | Actuating an optical fiber with a piezoelectric actuator and detecting voltages generated by the piezoelectric actuator |
KR20150039875A (ko) * | 2007-08-03 | 2015-04-13 | 하마마츠 포토닉스 가부시키가이샤 | 레이저 가공 방법, 레이저 가공 장치 및 그 제조 방법 |
US9428413B2 (en) | 2007-08-03 | 2016-08-30 | Hamamatsu Photonics K.K. | Laser working method, laser working apparatus, and its manufacturing method |
KR101711311B1 (ko) * | 2007-08-03 | 2017-02-28 | 하마마츠 포토닉스 가부시키가이샤 | 레이저 가공 방법, 레이저 가공 장치 및 그 제조 방법 |
US10622254B2 (en) | 2007-08-03 | 2020-04-14 | Hamamatsu Photonics K.K. | Laser working method, laser working apparatus, and its manufacturing method |
Also Published As
Publication number | Publication date |
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US8031578B2 (en) | 2011-10-04 |
CN101248487A (zh) | 2008-08-20 |
US20090147636A1 (en) | 2009-06-11 |
JPWO2007023940A1 (ja) | 2009-03-26 |
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