KR100395363B1 - 용제의 정제방법 및 장치 - Google Patents

용제의 정제방법 및 장치 Download PDF

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Publication number
KR100395363B1
KR100395363B1 KR1019960008292A KR19960008292A KR100395363B1 KR 100395363 B1 KR100395363 B1 KR 100395363B1 KR 1019960008292 A KR1019960008292 A KR 1019960008292A KR 19960008292 A KR19960008292 A KR 19960008292A KR 100395363 B1 KR100395363 B1 KR 100395363B1
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KR
South Korea
Prior art keywords
solvent
evaporator
impurities
mist
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019960008292A
Other languages
English (en)
Korean (ko)
Other versions
KR970009840A (ko
Inventor
가즈키 고바야시
고지 마츠오카
겐스케 야노
노리오 아다치
다츠오 다카미
히로시 모리카와
Original Assignee
샤프 가부시키가이샤
기무라 가고키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 샤프 가부시키가이샤, 기무라 가고키 가부시키가이샤 filed Critical 샤프 가부시키가이샤
Publication of KR970009840A publication Critical patent/KR970009840A/ko
Application granted granted Critical
Publication of KR100395363B1 publication Critical patent/KR100395363B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14—Fractional distillation or use of a fractionation or rectification column
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/06—Evaporators with vertical tubes
    • B01D1/10—Evaporators with vertical tubes with long tubes, e.g. Kestner evaporators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0057—Condensation of vapours; Recovering volatile solvents by condensation in combination with other processes
    • B01D5/006—Condensation of vapours; Recovering volatile solvents by condensation in combination with other processes with evaporation or distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/36—Regeneration of waste pickling liquors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04—Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
KR1019960008292A 1995-08-04 1996-03-26 용제의 정제방법 및 장치 Expired - Fee Related KR100395363B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21974895A JP3172401B2 (ja) 1995-08-04 1995-08-04 溶剤の再生回収方法及び再生回収装置
JP95-219748 1995-08-04

Publications (2)

Publication Number Publication Date
KR970009840A KR970009840A (ko) 1997-03-27
KR100395363B1 true KR100395363B1 (ko) 2003-12-01

Family

ID=16740382

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960008292A Expired - Fee Related KR100395363B1 (ko) 1995-08-04 1996-03-26 용제의 정제방법 및 장치

Country Status (4)

Country Link
US (1) US5925224A (https=)
JP (1) JP3172401B2 (https=)
KR (1) KR100395363B1 (https=)
TW (1) TW305767B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100858047B1 (ko) 2005-09-30 2008-09-10 니폰 리파인 가부시키가이샤 용제 회수 장치 및 용제 회수 방법
KR100891747B1 (ko) * 2007-09-05 2009-04-03 주식회사 코렉스 포토레지스트 스트리퍼의 재생장치

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3721016B2 (ja) 1999-09-30 2005-11-30 宮崎沖電気株式会社 レジスト処理装置
JP4476356B2 (ja) * 2007-09-05 2010-06-09 コレックス コーポレーション フォトレジストストリッパー廃液の再生方法及び再生装置、並びにその再生回収率の改善方法
US8961744B2 (en) * 2013-02-25 2015-02-24 Korex Corporation System and method for recycling high-boiling-point waste photoresist stripper
CN105060602B (zh) * 2015-09-17 2017-05-24 天津科技大学 工业废水超声协同处理和超声蒸发结晶一体化工艺及装置
KR102612139B1 (ko) * 2017-08-02 2023-12-08 주식회사 쿠라레 회수 레지스트 박리제로부터의 디메틸술폭시드의 회수 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3073755A (en) * 1959-08-11 1963-01-15 Laporte Chemical Concentration of hydrogen peroxide
US5348588A (en) * 1993-06-29 1994-09-20 Church & Dwight Co., Inc. Evaporative treatment of inorganic saponifier wash water
TW305821B (https=) * 1993-09-13 1997-05-21 Mitsubishi Gas Chemical Co

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100858047B1 (ko) 2005-09-30 2008-09-10 니폰 리파인 가부시키가이샤 용제 회수 장치 및 용제 회수 방법
KR100891747B1 (ko) * 2007-09-05 2009-04-03 주식회사 코렉스 포토레지스트 스트리퍼의 재생장치

Also Published As

Publication number Publication date
JP3172401B2 (ja) 2001-06-04
US5925224A (en) 1999-07-20
TW305767B (https=) 1997-05-21
JPH0949093A (ja) 1997-02-18
KR970009840A (ko) 1997-03-27

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