KR100303322B1 - 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법 - Google Patents

반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법 Download PDF

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Publication number
KR100303322B1
KR100303322B1 KR1019990018261A KR19990018261A KR100303322B1 KR 100303322 B1 KR100303322 B1 KR 100303322B1 KR 1019990018261 A KR1019990018261 A KR 1019990018261A KR 19990018261 A KR19990018261 A KR 19990018261A KR 100303322 B1 KR100303322 B1 KR 100303322B1
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KR
South Korea
Prior art keywords
data
unit
history
wafer
master unit
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KR1019990018261A
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English (en)
Korean (ko)
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KR20000074361A (ko
Inventor
손명승
조원수
장진호
Original Assignee
박종섭
주식회사 하이닉스반도체
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 박종섭, 주식회사 하이닉스반도체 filed Critical 박종섭
Priority to KR1019990018261A priority Critical patent/KR100303322B1/ko
Priority to DE10024735A priority patent/DE10024735A1/de
Priority to NL1015251A priority patent/NL1015251A1/xx
Priority to CNB001226681A priority patent/CN1213367C/zh
Priority to FR0006508A priority patent/FR2793916B1/fr
Priority to JP2000150555A priority patent/JP2001035760A/ja
Priority to GB0012374A priority patent/GB2352058B/en
Priority to IT2000MI001128A priority patent/IT1317658B1/it
Priority to TW089109913A priority patent/TW482967B/zh
Publication of KR20000074361A publication Critical patent/KR20000074361A/ko
Application granted granted Critical
Publication of KR100303322B1 publication Critical patent/KR100303322B1/ko

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32074—History of operation of each machine
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32196—Store audit, history of inspection, control and workpiece data into database
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35291—Record history, log, journal, audit of machine operation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • General Factory Administration (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Control By Computers (AREA)
KR1019990018261A 1999-05-20 1999-05-20 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법 KR100303322B1 (ko)

Priority Applications (9)

Application Number Priority Date Filing Date Title
KR1019990018261A KR100303322B1 (ko) 1999-05-20 1999-05-20 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법
DE10024735A DE10024735A1 (de) 1999-05-20 2000-05-19 System und Verfahren zum automatischen Verwalten von Halbleiterproduktionsbuchten
NL1015251A NL1015251A1 (nl) 1999-05-20 2000-05-19 System and method for automatically managing semiconductor production bays. Systeem en werkwijze voor het automatisch beheren van halfgeleidercompartimenten.
CNB001226681A CN1213367C (zh) 1999-05-20 2000-05-20 自动地管理半导体制造间的系统和方法
FR0006508A FR2793916B1 (fr) 1999-05-20 2000-05-22 Systeme et procede de gestion automatique d'unites de production de semiconducteurs
JP2000150555A JP2001035760A (ja) 1999-05-20 2000-05-22 半導体生産ベイを自動的に管理するためのシステム、方法及び記録媒体
GB0012374A GB2352058B (en) 1999-05-20 2000-05-22 System and method for automatically managing semiconductor production bays
IT2000MI001128A IT1317658B1 (it) 1999-05-20 2000-05-22 Sistema e metodo per gestire automaticamente baie di produzione disemiconduttori
TW089109913A TW482967B (en) 1999-05-20 2000-05-23 System and method for automatically managing semiconductor production bays

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019990018261A KR100303322B1 (ko) 1999-05-20 1999-05-20 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법

Publications (2)

Publication Number Publication Date
KR20000074361A KR20000074361A (ko) 2000-12-15
KR100303322B1 true KR100303322B1 (ko) 2001-09-26

Family

ID=19586791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019990018261A KR100303322B1 (ko) 1999-05-20 1999-05-20 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법

Country Status (9)

Country Link
JP (1) JP2001035760A (xx)
KR (1) KR100303322B1 (xx)
CN (1) CN1213367C (xx)
DE (1) DE10024735A1 (xx)
FR (1) FR2793916B1 (xx)
GB (1) GB2352058B (xx)
IT (1) IT1317658B1 (xx)
NL (1) NL1015251A1 (xx)
TW (1) TW482967B (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100755136B1 (ko) 2005-12-28 2007-09-04 동부일렉트로닉스 주식회사 제조실행 시스템에서 그룹별 반도체 제품군의 공정상태파악방법

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JP2001176763A (ja) * 1999-12-14 2001-06-29 Nec Corp 製品ウェハを含む非製品ウェハの自動化処理方法ならびにシステム及び同方法が記録された記録媒体
WO2002095515A1 (fr) * 2001-05-24 2002-11-28 Yamatake Corporation Unite de commande de procede, dispositif de recueil d'informations relatives a un produit et programme de traçage de procede
ITBO20010330A1 (it) 2001-05-25 2002-11-25 Gd Spa Metodo per la stima dell'efficienza di una macchina automatica
US7123974B1 (en) * 2002-11-19 2006-10-17 Rockwell Software Inc. System and methodology providing audit recording and tracking in real time industrial controller environment
KR100520062B1 (ko) * 2003-03-11 2005-10-11 삼성전자주식회사 자동반송시스템 및 그 제어방법
US6931303B2 (en) * 2003-10-02 2005-08-16 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated transport system
JP4673548B2 (ja) * 2003-11-12 2011-04-20 東京エレクトロン株式会社 基板処理装置及びその制御方法
JP2005294754A (ja) * 2004-04-05 2005-10-20 Toshiba Corp 電子ビーム描画装置、電子ビーム描画方法、電子ビーム描画プログラム及び直接描画方式を用いた半導体装置の製造方法
JP2006237365A (ja) * 2005-02-25 2006-09-07 Agilent Technol Inc 半導体特性評価装置の管理方法及びそのプログラム
US7206653B1 (en) * 2005-11-29 2007-04-17 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer-based planning methods and systems for batch-based processing tools
BRPI1105249A2 (pt) * 2010-02-18 2016-05-03 Nippon Steel Corp aparelho de suporte de regulagem de orientação de operação, sistema de suporte de operação, e programa de computador
TWI571908B (zh) * 2014-08-15 2017-02-21 力晶科技股份有限公司 製程控制方法與製程控制系統
CN109240224B (zh) * 2018-08-17 2022-04-15 张家港康得新光电材料有限公司 一种收料方法、装置、设备及存储介质
CN110290194A (zh) * 2019-06-20 2019-09-27 苏州工业园区恒越自动化科技有限公司 一种基于semi标准的secs通信方法
CN114924536B (zh) * 2022-05-26 2024-01-30 江苏泰治科技股份有限公司 一种光伏电池片生产控制方法

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JPH06338552A (ja) * 1993-05-31 1994-12-06 Sony Corp 半導体シミュレーション装置
US5654896A (en) * 1994-10-31 1997-08-05 Ixys Corp Performance prediction method for semiconductor power modules and ICS
JPH1050571A (ja) * 1996-08-05 1998-02-20 Nec Corp 生産制御方法及び生産制御装置
KR19980035088A (ko) * 1996-11-11 1998-08-05 김광호 반도체 제조장비의 관리시스템 및 관리방법
KR19980068469A (ko) * 1997-02-20 1998-10-15 김광호 반도체 설비 통합 제어시스템
KR19980074797A (ko) * 1997-03-27 1998-11-05 윤종용 반도체 제조용 설비의 관리방법
JPH10335193A (ja) * 1997-05-30 1998-12-18 Toshiba Corp 製造工程仕様作成運営システム、プロセスデータ作成システム及び半導体装置の製造方法

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JPH06203040A (ja) * 1992-12-28 1994-07-22 Honda Motor Co Ltd 製造経歴管理システム
IT1272036B (it) * 1993-11-05 1997-06-11 Marelli Autronica Sistema di registraziome per una linea di produzione.
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WO2000036479A1 (en) * 1998-12-16 2000-06-22 Speedfam-Ipec Corporation An equipment virtual controller

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06338552A (ja) * 1993-05-31 1994-12-06 Sony Corp 半導体シミュレーション装置
US5654896A (en) * 1994-10-31 1997-08-05 Ixys Corp Performance prediction method for semiconductor power modules and ICS
JPH1050571A (ja) * 1996-08-05 1998-02-20 Nec Corp 生産制御方法及び生産制御装置
KR19980035088A (ko) * 1996-11-11 1998-08-05 김광호 반도체 제조장비의 관리시스템 및 관리방법
KR19980068469A (ko) * 1997-02-20 1998-10-15 김광호 반도체 설비 통합 제어시스템
KR19980074797A (ko) * 1997-03-27 1998-11-05 윤종용 반도체 제조용 설비의 관리방법
JPH10335193A (ja) * 1997-05-30 1998-12-18 Toshiba Corp 製造工程仕様作成運営システム、プロセスデータ作成システム及び半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100755136B1 (ko) 2005-12-28 2007-09-04 동부일렉트로닉스 주식회사 제조실행 시스템에서 그룹별 반도체 제품군의 공정상태파악방법

Also Published As

Publication number Publication date
KR20000074361A (ko) 2000-12-15
TW482967B (en) 2002-04-11
NL1015251C2 (xx) 2004-10-19
FR2793916B1 (fr) 2005-06-03
NL1015251A1 (nl) 2000-11-21
FR2793916A1 (fr) 2000-11-24
CN1213367C (zh) 2005-08-03
DE10024735A1 (de) 2001-02-01
JP2001035760A (ja) 2001-02-09
ITMI20001128A1 (it) 2001-11-22
GB2352058A (en) 2001-01-17
ITMI20001128A0 (it) 2000-05-22
GB2352058B (en) 2003-08-13
CN1278621A (zh) 2001-01-03
IT1317658B1 (it) 2003-07-15
GB0012374D0 (en) 2000-07-12

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