KR100275422B1 - 공간 광 변조기 분광기 및 광 분석 방법 - Google Patents

공간 광 변조기 분광기 및 광 분석 방법 Download PDF

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Publication number
KR100275422B1
KR100275422B1 KR1019920024776A KR920024776A KR100275422B1 KR 100275422 B1 KR100275422 B1 KR 100275422B1 KR 1019920024776 A KR1019920024776 A KR 1019920024776A KR 920024776 A KR920024776 A KR 920024776A KR 100275422 B1 KR100275422 B1 KR 100275422B1
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KR
South Korea
Prior art keywords
spectrometer
slm
mirror device
detector
spectrum
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1019920024776A
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English (en)
Korean (ko)
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KR930013777A (ko
Inventor
로날드이.스태포드
Original Assignee
윌리엄 비. 켐플러
텍사스 인스트루먼츠 인코포레이티드
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Publication of KR930013777A publication Critical patent/KR930013777A/ko
Application granted granted Critical
Publication of KR100275422B1 publication Critical patent/KR100275422B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements
    • G01N2201/0675—SLM

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1019920024776A 1991-12-20 1992-12-19 공간 광 변조기 분광기 및 광 분석 방법 Expired - Fee Related KR100275422B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81250891A 1991-12-20 1991-12-20
US812,508 1991-12-20

Publications (2)

Publication Number Publication Date
KR930013777A KR930013777A (ko) 1993-07-22
KR100275422B1 true KR100275422B1 (ko) 2000-12-15

Family

ID=25209793

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920024776A Expired - Fee Related KR100275422B1 (ko) 1991-12-20 1992-12-19 공간 광 변조기 분광기 및 광 분석 방법

Country Status (7)

Country Link
US (1) US5504575A (enExample)
EP (1) EP0548830B1 (enExample)
JP (1) JPH06207853A (enExample)
KR (1) KR100275422B1 (enExample)
CA (1) CA2084923A1 (enExample)
DE (1) DE69218150T2 (enExample)
TW (1) TW236008B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100897672B1 (ko) * 2006-05-24 2009-05-14 삼성전기주식회사 회절형 광변조기에 있어서 미사용 회절차수의 회절광을이용한 반사부의 변위 변화량 보정 장치 및 그 방법

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US5504575A (en) 1996-04-02
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