KR930013777A - 공간 광 변조기 분광기 및 광 분석 방법 - Google Patents

공간 광 변조기 분광기 및 광 분석 방법 Download PDF

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KR930013777A
KR930013777A KR1019920024776A KR920024776A KR930013777A KR 930013777 A KR930013777 A KR 930013777A KR 1019920024776 A KR1019920024776 A KR 1019920024776A KR 920024776 A KR920024776 A KR 920024776A KR 930013777 A KR930013777 A KR 930013777A
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deformable mirror
mirror device
spectrometer
spectrum
detector
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KR1019920024776A
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KR100275422B1 (ko
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이. 스태포드 로날드
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윌리엄 이. 힐러
텍사스 인스트루먼츠 인코포레이티드
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements
    • G01N2201/0675—SLM

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

입사한 복사선을 관련 파장 스펙트럼으로 분산하는 프리즘(44)에 복사선의 평행 광선을 제공하기 위해 입구슬릿(40)과 시준기(42)를 채택한 SLM 분광기가 제공된다. 프리즘(44)로부터의 스펙트럼은 변형가능 미러 장치(DMD)와 같은 공간 광 변조기(SLM)(46)에 입사된다. SLM 표면의 작은 부분을 선택적으로 활성화(또는 불활성화)함으로써 SLM에 입사한 스펙트럼의 일부분을 파라볼라 접속 미러(48)과 같은 집속 장치에 선택적으로 반사 또는 전송하는 것이 가능하다. 집속장치는 SLM 상의 선택된 셀에 의해 반사된 스펙트럼의 부분을 다시 감지기(50)에 집속한다. 선택된 파장은 SLM에서 어느 열의 셀들이 활성화(또는 불활성화)되었는지의 함수이다. 본 발명의 SLM 분광기는 가시광과, 근적외선 또는 자외선과 같은 가시광에 가까운 광을 분석하는 데에 사용될 수 있다. 감지기 또는 검출기의 출력은 적절히 증폭되어, 적절한 캘리브레이션 후에 특정 파장 또는 파장 대역에 있는 에너지의 양을 결정하기 위해 채택될 수 있다.

Description

공간 광 변조기 분광기 및 광 분석 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 SLM 분광기의 구성 요소들의 기능 블럭도,
제2도는 본 발명의 SLM 분광기의 구성 요소들의 일반적인 배치도,
제3도는 본 발명의 SLM 분광기의 구성 요소들의 다른 일반적인 배치도,
제4도는 샘플의 투과 분석을 위하여 배치된 본 발명의 SLM 분광기의 구성 요소들의 일반적인 배치도,
제5도는 샘플의 반사 분석을 위하여 배치된 본 발명의 SLM 분광기의 구성 요소들의 일반적인 배치도.

Claims (18)

  1. a) 광원으로부터 복사선을 분광학적으로 분산시키기 위한 분산 소자; b) 상기 분산 소자로부터 분산된 스펙트럼의 적어도 일부분을 수신하도록 배치된 변형가능 미러 장치; 및 c) 상기 변형 가능 미러 장치에 의해 결정된 파장의 에너지의 세기를 감지하기 위한 검출기를 포함하는 것을 특징으로 하는 분광기.
  2. 제1항에 있어서, 시준기를 더 포함하는 것을 특징으로 하는 분광기.
  3. 제1항에 있어서, 입구 슬릿을 더 포함하는 것을 특징으로 하는 분광기.
  4. 제1항에 있어서, 상기 변형가능 미러장치가 분산된 스펙트럼을 적어도 512개의 대역 파장으로 분리할 수 있는 것을 특징으로 하는 분광기.
  5. 제1항에 있어서, 상기 변형가능 미러 장치 열들이 활성화되고 불활성화되는 프로세서를 더 포함하는 것을 특징으로 하는 분광기.
  6. 제5항에 있어서, 상기 검출기의 출력을 수신하여 상기 프로세서를 위해 디지탈화된 출력을 제공하고 이것에 의해 프로세서가 상기 디지탈화된 출력에 응답하여 상기 변형가능 미러장치를 활성화 및 불활성화할 수 있는 디지타이저를 더 포함하는 것을 특징으로 하는 분광기.
  7. 제1항에 있어서, 상기 변형가능 미러 장치로부터의 복사선을 상기 검출기에 일치하는 선정된 촛점면에 지향하기 위한 집속 수단을 더 포함하는 것을 특징으로 하는 분광기.
  8. 제1항에 있어서, 상기 집속 장치가 미러인 것을 특징으로 하는 분광기.
  9. 제1항에 있어서, 상기 집속 장치가 하나의 렌즈를 포함하는 것을 특징으로 하는 분광기.
  10. a) 통과한 입사 복사선을 평행하게 하기 위한 시준기; b) 상기 시준기로부터의 평행 복사선을 분광학적으로 분산시키기 위한 분산 소자; c) 상기 분산 소자로부터 분산된 스펙트럼의 적어도 일부분을 수신하도록 배치된 변형가능 미러장치; 및 d) 상기 변형가능 미러장치에 의해 결정된 파장의 에너지의 세기를 감지하기 위한 검출기를 포함하는 것을 특징으로 하는 분광기.
  11. 제10항에 있어서, 입구 슬릿을 더 포함하는 것을 특징으로 하는 분광기.
  12. 제10항에 있어서, 상기 변형가능 미러 장치가 분산된 스펙트럼을 적어도 512개의 대역 파장으로 분리할 수 있는 것을 특징으로 하는 분광기.
  13. a) 입구 슬릿; b) 상기 슬릿으로부터의 복사선을 평행하게 만들기 위한 시준기; c) 상기 시준기로부터 수신된 복사선을 분광학적으로 분산시키기 위한 프리즘; d) 선택적으로 활성화된 셀상에 상기 분산 소자로부터 분산된 스펙트럼의 적어도 일부분을 수신하도록 배치된 변형 가능 미러장치; e) 상기 변형가능 미러장치의 선택된 셀들로부터의 복사선을 선정된 촛점면에 집속하기 위한 파라볼라 미러; 및 f) 상기 변형가능 미러장치로부터 반사된 파장에서의 에너지의 세기를 감지하기 위해 상기 촛점면에 배치된 검출기를 포함하는 것을 특징으로 하는 분광기.
  14. 제13항에 있어서, 상기 변형가능 미러장치가 분산된 스펙트럼을 적어도 512개의 대역 파장으로 분리할 수 있는 것을 특징으로 하는 분광기.
  15. 제13항에 있어서, 상기 변형가능 미러장치의 열들이 활성화 및 불활성화되는 프로세서를 더 포함하는 것을 특징으로 하는 분광기.
  16. 제15항에 있어서 상기 검출기의 출력을 수신하여 상기 프로세서를 위해 디지탈화된 출력을 제공하고 이것에 의해 프로세서가 상기 디지탈화된 출력에 응답하여 상기 변형가능 미러 장치를 활성화 및 불활성화할 수 있는 디지타이저를 더 포함하는 것을 특징으로 하는 분광기.
  17. a) 분석될 샘플을 광으로 조명하는 단계; b) 상기 샘플로부터의 광을 분광학적으로 분산시키는 단계; c) 상기 스펙트럼의 선정된 차수의 파장의 적어도 일부분을 수신하기 위해 변형가능 미러장치를 배치하는 단계; d) 요구되는 주파수 대역을 검출기로 지향하기 위하여 상기 스펙트럼의 선정된 차수의 파장의 상기 부분을 변조하는 단계; 및 e) 상기 주파수 대역의 에너지의 세기를 검출하는 단계를 포함하는 것을 특징으로 하는 광을 분석하는 방법.
  18. 제17항에 있어서, a) 상기 검출된 세기를 디지탈화하는 단계 b) 상기 디지탈화된 세기를 프로세서에 수신한 단계; c) 상기 수신된 디지탈화된 세기를 분석하는 단계; 및 d) 상기 분석에 응답하여 상기 변형가능 미러 장치의 열들을 활성화 및 불활성화시키는 단계를 더 포함하는 것을 특징으로 하는 광을 분석하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019920024776A 1991-12-20 1992-12-19 공간 광 변조기 분광기 및 광 분석 방법 KR100275422B1 (ko)

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US81250891A 1991-12-20 1991-12-20
US812,508 1991-12-20

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KR100275422B1 KR100275422B1 (ko) 2000-12-15

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US (1) US5504575A (ko)
EP (1) EP0548830B1 (ko)
JP (1) JPH06207853A (ko)
KR (1) KR100275422B1 (ko)
CA (1) CA2084923A1 (ko)
DE (1) DE69218150T2 (ko)
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Families Citing this family (155)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
EP0742940A4 (en) * 1994-01-31 1998-09-30 Sdl Inc LASER-LIGHTED DISPLAY SYSTEM
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5748308A (en) * 1996-02-02 1998-05-05 Abbott Laboratories Programmable standard for use in an apparatus and process for the noninvasive measurement of optically absorbing compounds
WO1998000689A1 (en) * 1996-07-01 1998-01-08 Sony Electronics Inc. System for controlling the spectral distribution of light
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
JP3137020B2 (ja) * 1997-02-14 2001-02-19 日本電気株式会社 分光計
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US5815261A (en) * 1997-04-16 1998-09-29 General Atomics Correlation spectrometer with high-resolution, broad-band optical characteristics
US6421179B1 (en) 1997-05-02 2002-07-16 Interscience, Inc. Wavelength division multiplexing system and method using a reconfigurable diffraction grating
DE19733193B4 (de) * 1997-08-01 2005-09-08 Carl Zeiss Jena Gmbh Mikroskop mit adaptiver Optik
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
ATE272224T1 (de) * 1997-11-17 2004-08-15 Max Planck Gesellschaft Konfokales spektroskopiesystem und -verfahren
US5930027A (en) * 1998-02-12 1999-07-27 Mcdonnell Douglas Corporation Digitally controlled fiber optic light modulation system
DE19821127A1 (de) * 1998-05-12 1999-11-18 Inst Physikalische Hochtech Ev Steuerbare Mikrocodezeile, insbesondere für Spektrometer
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6999165B2 (en) * 1998-06-26 2006-02-14 Aspectrics, Inc. Method and apparatus for radiation analysis and encoder
US6271917B1 (en) 1998-06-26 2001-08-07 Thomas W. Hagler Method and apparatus for spectrum analysis and encoder
US6678048B1 (en) 1998-07-20 2004-01-13 Sandia Corporation Information-efficient spectral imaging sensor with TDI
US6504943B1 (en) 1998-07-20 2003-01-07 Sandia Corporation Information-efficient spectral imaging sensor
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
DE19835072A1 (de) * 1998-08-04 2000-02-10 Zeiss Carl Jena Gmbh Anordnung zur Beleuchtung und/oder Detektion in einem Mikroskop
DE19842288A1 (de) * 1998-08-04 2000-02-10 Zeiss Carl Jena Gmbh Einstellbare Einkopplung und/oder Detektion einer oder mehrerer Wellenlängen in einem Mikroskop
USH1979H1 (en) * 1998-08-31 2001-08-07 The United States Of America As Represented By The Secretary Of The Air Force Electronic streak camera
JP2000199855A (ja) 1998-11-02 2000-07-18 Olympus Optical Co Ltd 走査型光学顕微鏡装置
DE19904749A1 (de) * 1999-02-05 2000-08-31 Agfa Gevaert Ag Vorrichtung und Verfahren zum Kalibrieren eines Lichtmodulators
US7180588B2 (en) * 1999-04-09 2007-02-20 Plain Sight Systems, Inc. Devices and method for spectral measurements
US6859275B2 (en) * 1999-04-09 2005-02-22 Plain Sight Systems, Inc. System and method for encoded spatio-spectral information processing
US7219086B2 (en) 1999-04-09 2007-05-15 Plain Sight Systems, Inc. System and method for hyper-spectral analysis
US6128078A (en) * 1999-04-09 2000-10-03 Three Lc, Inc. Radiation filter, spectrometer and imager using a micro-mirror array
US20050270528A1 (en) * 1999-04-09 2005-12-08 Frank Geshwind Hyper-spectral imaging methods and devices
US6046808A (en) * 1999-04-09 2000-04-04 Three Lc, Inc. Radiation filter, spectrometer and imager using a micro-mirror array
FI109149B (fi) * 1999-09-29 2002-05-31 Valtion Teknillinen Spektrometri ja menetelmä optisen spektrin mittaamiseksi
DE19948542A1 (de) 1999-10-08 2001-05-23 Zeiss Carl Jena Gmbh Anordnung, bei der von einer Lichtquelle aus Licht auf eine Fläche gerichtet wird
DE10006800A1 (de) * 2000-02-15 2001-08-16 Leica Microsystems Vorrichtung zur Selektion und Detektion mindestens eines Spektralbereichs eines spektral aufgefächerten Lichtstrahls
DE10016361B4 (de) * 2000-04-03 2010-08-26 Leica Microsystems Cms Gmbh Optische Anordnung
WO2001091342A2 (en) * 2000-05-24 2001-11-29 Purdue Research Foundation Method and system for polarization control and polarization mode dispersion compensation for wideband optical signals
US6958811B2 (en) 2000-06-29 2005-10-25 Carl Zeiss Jena Gmbh Method for the detection of dyes in fluorescence microscopy
US6747737B2 (en) 2000-06-29 2004-06-08 Carl Zeiss Jena Gmbh Method for optical detection of an illuminated specimen in a plurality of detection channels
DE10038049A1 (de) * 2000-08-02 2002-02-14 Leica Microsystems Optische Anordnung zur Selektion und Detektion des Spektalbereichs eines Lichtstrahls
US6947133B2 (en) 2000-08-08 2005-09-20 Carl Zeiss Jena Gmbh Method for increasing the spectral and spatial resolution of detectors
US6858852B2 (en) 2000-08-08 2005-02-22 Carl Zeiss Jena Gmbh Method and apparatus for rapid change of fluorescence bands in the detection of dyes in fluorescence microscopy
US6762661B1 (en) * 2000-09-29 2004-07-13 Rockwell Scientific Licensing, Llc Shutter switch for millimeter wave beams and method for switching
US6781691B2 (en) * 2001-02-02 2004-08-24 Tidal Photonics, Inc. Apparatus and methods relating to wavelength conditioning of illumination
FR2821670B1 (fr) * 2001-03-02 2004-07-09 Jobin Yvon Sas Spectrometre a reponse adaptable par optique matricielle active
US6934069B2 (en) 2001-04-03 2005-08-23 Cidra Corporation Chromatic dispersion compensation device having an array of micromirrors
EP1386193A2 (en) * 2001-04-03 2004-02-04 CiDra Corporation Variable optical source
US6956687B2 (en) * 2001-04-03 2005-10-18 Cidra Corporation Optical blocking filter having an array of micro-mirrors
US6922277B2 (en) 2001-09-25 2005-07-26 Cidra Corporation Optical interleaver/deinterleaver device having an array of micro-mirrors
US20030095307A1 (en) * 2001-09-25 2003-05-22 Cidra Corporation Reconfigurable optical add/drop multiplexer having an array of micro-mirrors
US7019883B2 (en) * 2001-04-03 2006-03-28 Cidra Corporation Dynamic optical filter having a spatial light modulator
US7126740B2 (en) * 2001-04-03 2006-10-24 Cidra Corporation Multifunctional optical device having a spatial light modulator with an array of micromirrors
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US7126682B2 (en) * 2001-04-11 2006-10-24 Rio Grande Medical Technologies, Inc. Encoded variable filter spectrometer
AU2002257138A1 (en) 2001-04-13 2002-10-28 Movaz Networks, Inc. Reconfigurable free space wavelength cross connect
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6785001B2 (en) 2001-08-21 2004-08-31 Silicon Light Machines, Inc. Method and apparatus for measuring wavelength jitter of light signal
WO2003028266A2 (en) * 2001-09-25 2003-04-03 Cidra Corporation Optical channel monitor having an array of micro-mirrors
US7177496B1 (en) * 2001-12-27 2007-02-13 Capella Photonics, Inc. Optical spectral power monitors employing time-division-multiplexing detection schemes
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US20050117189A1 (en) * 2002-02-06 2005-06-02 National Institute Of Advanced Industrial Science And Technology Variable-shape mirror adjusting method, adjusting apparatus, and processing program for performing the adjusting method
US6940593B2 (en) * 2002-02-19 2005-09-06 Finisar Corporation Wedged optical filter stack
JP2005519309A (ja) * 2002-03-06 2005-06-30 アドバンスト フォトメトリクス， インク． 放射エンコーディング及び分析のための方法及び装置
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
KR100448870B1 (ko) * 2002-11-23 2004-09-16 삼성전자주식회사 광파장의 선택적 조합을 이용한 이미지 획득 방법 및 장치
WO2004057284A1 (en) * 2002-12-19 2004-07-08 Koninklijke Philips Electronics N.V. Optical analysis system
US20040218172A1 (en) * 2003-01-24 2004-11-04 Deverse Richard A. Application of spatial light modulators for new modalities in spectrometry and imaging
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US7190451B2 (en) * 2003-07-15 2007-03-13 Leica Microsystems Cms Gmbh Detection device
CA2581668A1 (en) 2003-09-26 2005-04-07 Tidal Photonics, Inc Apparatus and methods relating to expanded dynamic range imaging endoscope systems
US7196789B2 (en) * 2003-10-15 2007-03-27 Polychromix Corporation Light processor providing wavelength control and method for same
US7433042B1 (en) * 2003-12-05 2008-10-07 Surface Optics Corporation Spatially corrected full-cubed hyperspectral imager
US7242478B1 (en) * 2003-12-05 2007-07-10 Surface Optics Corporation Spatially corrected full-cubed hyperspectral imager
WO2005082007A2 (en) * 2004-02-25 2005-09-09 B & W Tek, Inc. Fourier transform spectrometer apparatus multi-element mems
US7652765B1 (en) 2004-03-06 2010-01-26 Plain Sight Systems, Inc. Hyper-spectral imaging methods and devices
US7209230B2 (en) 2004-06-18 2007-04-24 Luckoff Display Corporation Hand-held spectra-reflectometer
WO2006004769A2 (en) 2004-06-28 2006-01-12 Aspectrics, Inc. Encoder spectrograph for analyzing radiation using spatial modulation of radiation dispersed by wavelength
DE102004059951A1 (de) * 2004-08-17 2006-02-23 Giesecke & Devrient Gmbh Vorrichtung zur Untersuchung von Dokumenten
CN101010575B (zh) * 2004-08-26 2010-04-14 皇家飞利浦电子股份有限公司 光学分析系统的自动校准
WO2006021928A1 (en) * 2004-08-27 2006-03-02 Koninklijke Philips Electronics N.V. Optical analysis system with background signal compensation
WO2006126154A1 (en) * 2005-05-24 2006-11-30 Koninklijke Philips Electronics N.V. Non-invasive measurement of blood analytes using thermal emission spectroscopy
US7233394B2 (en) 2005-06-20 2007-06-19 Luckoff Display Corporation Compact spectrometer
US7295748B2 (en) * 2005-08-08 2007-11-13 Jds Uniphase Corporation Variable optical attenuator with wavelength dependent loss compensation
US7492450B2 (en) * 2005-10-24 2009-02-17 General Electric Company Methods and apparatus for inspecting an object
DE102005059338A1 (de) * 2005-12-08 2007-06-14 Carl Zeiss Jena Gmbh Verfahren und Anordnung zur Untersuchung von Proben
US7508506B2 (en) * 2006-04-04 2009-03-24 Custom Sensors And Technology Method and apparatus for performing spectroscopy downhole within a wellbore
US7440098B2 (en) * 2006-04-04 2008-10-21 Custom Sensors And Technology Spectroscope and method of performing spectroscopy utilizing a micro mirror array
US7324196B2 (en) 2006-04-13 2008-01-29 Neil Goldstein Spectral encoder
KR100897672B1 (ko) * 2006-05-24 2009-05-14 삼성전기주식회사 회절형 광변조기에 있어서 미사용 회절차수의 회절광을이용한 반사부의 변위 변화량 보정 장치 및 그 방법
WO2008034432A2 (de) * 2006-09-21 2008-03-27 Ruped Systems Gmbh Verfahren und vorrichtung zum identifizieren von eigenschaften von objekten
JP4824527B2 (ja) * 2006-11-01 2011-11-30 株式会社トプコン 試料分析装置
DE102007002583A1 (de) * 2006-11-03 2008-05-08 Leica Microsystems Cms Gmbh Optische Anordnung und Verfahren zum Steuern und Beeinflussen eines Lichtstrahls
US8131123B2 (en) 2006-11-07 2012-03-06 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches and monitoring
US7720329B2 (en) 2006-11-07 2010-05-18 Olympus Corporation Segmented prism element and associated methods for manifold fiberoptic switches
US7702194B2 (en) 2006-11-07 2010-04-20 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches
US8000568B2 (en) 2006-11-07 2011-08-16 Olympus Corporation Beam steering element and associated methods for mixed manifold fiberoptic switches
US7873246B2 (en) 2006-11-07 2011-01-18 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches and monitoring
US7769255B2 (en) 2006-11-07 2010-08-03 Olympus Corporation High port count instantiated wavelength selective switch
EP1925929A1 (en) * 2006-11-27 2008-05-28 Koninklijke Philips Electronics N.V. Multivariate detection of molecules in bioassay
US7777878B2 (en) * 2006-12-19 2010-08-17 J.A. Woollam Co., Inc. Application of digital light processor in scanning spectrometer and imaging ellipsometer and the like systems
WO2008149677A1 (ja) * 2007-05-31 2008-12-11 Nikon Corporation チューナブルフィルタ、光源装置およびスペクトル分布測定装置
FR2918467B1 (fr) * 2007-07-06 2009-11-20 Thales Sa Dispositif d'imagerie multispectral a filtre de type moems pour observation satellitaire
US7916300B2 (en) * 2007-08-07 2011-03-29 Fujifilm Corporation Spectroscopy device, spectroscopy apparatus and spectroscopy method
US7817274B2 (en) * 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
US8345226B2 (en) 2007-11-30 2013-01-01 Jingyun Zhang Spectrometers miniaturized for working with cellular phones and other portable electronic devices
US8190025B2 (en) * 2008-02-28 2012-05-29 Olympus Corporation Wavelength selective switch having distinct planes of operation
US8406859B2 (en) 2008-08-10 2013-03-26 Board Of Regents, The University Of Texas System Digital light processing hyperspectral imaging apparatus
US8144321B2 (en) * 2008-10-22 2012-03-27 Texas Instruments Incorporated Encoding optical spectra using a DMD array
WO2010060460A1 (en) * 2008-11-25 2010-06-03 Institut De Ciències Fotòniques, Fundació Privada Device for multispectral and spatial shaping
DE102009043745A1 (de) 2009-09-30 2011-04-07 Carl Zeiss Microlmaging Gmbh Spektraldetektor mit variabler Filterung durch räumliche Farbtrennung und Laser-Scanning- Mikroskop
US8164050B2 (en) 2009-11-06 2012-04-24 Precision Energy Services, Inc. Multi-channel source assembly for downhole spectroscopy
US8735803B2 (en) * 2009-11-06 2014-05-27 Precision Energy Services, Inc Multi-channel detector assembly for downhole spectroscopy
US8436296B2 (en) * 2009-11-06 2013-05-07 Precision Energy Services, Inc. Filter wheel assembly for downhole spectroscopy
KR101195841B1 (ko) * 2010-06-08 2012-10-30 주식회사 이엔씨 테크놀로지 고속 광학 측정 장치
US8542353B2 (en) 2010-09-30 2013-09-24 Precision Energy Services, Inc. Refractive index sensor for fluid analysis
US8411262B2 (en) 2010-09-30 2013-04-02 Precision Energy Services, Inc. Downhole gas breakout sensor
WO2014012570A1 (en) 2012-07-16 2014-01-23 Foss Analytical Ab Spectrometer comprising a spatial light modulator
US9374563B2 (en) * 2012-11-01 2016-06-21 Raytheon Company Multispectral imaging camera
US9182278B2 (en) * 2013-03-14 2015-11-10 Sciaps, Inc. Wide spectral range spectrometer
BR112016001699B1 (pt) * 2013-07-30 2022-12-06 Dolby Laboratories Licensing Corporation Sistema de exibição de projetor tendo direcionamento de feixe de espelho não mecânico
CN103808410B (zh) * 2014-02-21 2016-02-24 清华大学 对偶编码压缩高光谱成像的装置
US10091440B1 (en) 2014-05-05 2018-10-02 Lockheed Martin Corporation System and method for providing compressive infrared imaging
DE102014213575B3 (de) * 2014-07-11 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren für eine spektral aufgelöste Vermessung eines Objekts
DE102014116782A1 (de) 2014-11-17 2016-05-19 Carl Zeiss Microscopy Gmbh Detektorvorrichtung für ein Mikroskop
CN104764474B (zh) * 2015-03-10 2018-01-12 清华大学 基于光束轨道角动量的光纤传感器
KR20170141784A (ko) 2015-04-30 2017-12-26 지멘스 악티엔게젤샤프트 광 방출 측정 디바이스 및 광 방출을 측정하기 위한 방법
US9755758B2 (en) * 2016-01-13 2017-09-05 Viavi Solutions Inc. Spectral analysis using a spatial light modulator
JP2017219330A (ja) * 2016-06-03 2017-12-14 株式会社リコー 分光器、分光装置及び分析装置
CN106370642A (zh) * 2016-08-17 2017-02-01 中国计量大学 一种检测食品和药品专用的便携拉曼光谱仪
CN106323471B (zh) * 2016-09-26 2019-03-08 中国科学院重庆绿色智能技术研究院 一种基于dlp技术和压缩感知理论的超灵敏光谱检测方法及系统
US10969277B2 (en) 2017-11-28 2021-04-06 Texas Instruments Incorporated Spatial light modulator spectroscopy
CN108303392A (zh) * 2018-01-05 2018-07-20 厦门理工学院 一种红外水分仪及光谱采集方法
CN109357760A (zh) * 2018-08-06 2019-02-19 北京理工大学 一种基于空间光调制器的成像光谱仪系统
CN109357761B (zh) * 2018-08-06 2021-02-12 北京理工大学 一种局部光谱高分辨成像光谱仪系统
CN109357759B (zh) * 2018-08-06 2021-02-12 北京理工大学 一种基于微柱透镜的局部高分辨成像光谱仪
DE102018133152A1 (de) * 2018-12-20 2020-06-25 Endress+Hauser Conducta Gmbh+Co. Kg Verfahren zur Kalibrierung eines Spektrometers
CN113677254B (zh) * 2019-04-28 2024-01-16 北京航空航天大学 可调谐光源及内窥镜系统
TR202022701A1 (tr) * 2020-12-31 2022-07-21 Orta Dogu Teknik Ueniversitesi Kompakt holografi̇k slm spektrometre
US20220404197A1 (en) * 2021-06-18 2022-12-22 Samsung Electronics Co., Ltd. Spectrometer, metrology system, and semiconductor inspection method
JP2023000800A (ja) 2021-06-18 2023-01-04 三星電子株式会社 分光器及び計測システム
CN114199379B (zh) * 2021-12-14 2023-11-17 深圳思凯测试技术有限公司 光谱仪和基于dlp技术的光强检测方法
SE546014C2 (en) * 2022-09-30 2024-04-16 Spec Imaging Ab An assembly for measurements of one or more optical parameters of a medium and a method of using the assembly

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2721259A (en) * 1952-05-31 1955-10-18 Raytheon Mfg Co Method and system for signalling having spectral modulation
US4193691A (en) * 1977-05-02 1980-03-18 Rca Corporation Spectrometer
DE3014646C2 (de) * 1980-04-16 1983-12-15 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Vorrichtung zur Spektralanalyse
AU8706982A (en) * 1981-09-17 1983-05-12 Miles Laboratories Inc. Spectrophotometer for analytic and diagnostic purposes
US4799795A (en) * 1984-03-19 1989-01-24 D.O.M. Associates, Inc. Stationary, electrically alterable, optical masking device and spectroscopic apparatus employing same
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
DE3539667A1 (de) * 1985-11-08 1987-05-14 Bruker Analytische Messtechnik Optisches spektrometer, insbesondere infrarot-spektrometer
US4810092A (en) * 1986-02-21 1989-03-07 Midac Corporation Economical spectrometer unit having simplified structure
US4743112A (en) * 1986-07-18 1988-05-10 Santa Barbara Research Center Imaging spectrometer
US4790654A (en) * 1987-07-17 1988-12-13 Trw Inc. Spectral filter
JP2837868B2 (ja) * 1988-05-24 1998-12-16 アンリツ株式会社 分光装置
JP2791038B2 (ja) * 1988-06-24 1998-08-27 株式会社日立製作所 分光器及びそれを用いた投影露光装置並びに投影露光方法
US4930865A (en) * 1988-11-04 1990-06-05 Miles Inc. Optical transmission spectrometer
US5037173A (en) * 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
US5090807A (en) * 1990-01-10 1992-02-25 Environmental Research Institute Of Michigan Real time optical pre-detection processing of multispectral image data
US5144374A (en) * 1990-04-27 1992-09-01 Cselt - Centro Studi E Laboratori Telecommunicazioni S.P.A. Optical spectroscopy system

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US5504575A (en) 1996-04-02
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