ES2151064T3 - Aparato para efectuar analisis espectrales de una fuente optica luminosa, utilizando deteccion de imagenes y separacion de ordenes espectrales especiales. - Google Patents
Aparato para efectuar analisis espectrales de una fuente optica luminosa, utilizando deteccion de imagenes y separacion de ordenes espectrales especiales.Info
- Publication number
- ES2151064T3 ES2151064T3 ES95919724T ES95919724T ES2151064T3 ES 2151064 T3 ES2151064 T3 ES 2151064T3 ES 95919724 T ES95919724 T ES 95919724T ES 95919724 T ES95919724 T ES 95919724T ES 2151064 T3 ES2151064 T3 ES 2151064T3
- Authority
- ES
- Spain
- Prior art keywords
- imaging optical
- pct
- diffraction grating
- sorting means
- spectral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003595 spectral effect Effects 0.000 title abstract 3
- 238000000926 separation method Methods 0.000 title abstract 2
- 238000010183 spectrum analysis Methods 0.000 title abstract 2
- 238000001514 detection method Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 abstract 8
- 238000003384 imaging method Methods 0.000 abstract 5
- 230000005855 radiation Effects 0.000 abstract 3
- 238000001228 spectrum Methods 0.000 abstract 3
- 239000006185 dispersion Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000009827 uniform distribution Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
- G01J3/16—Generating the spectrum; Monochromators using refracting elements, e.g. prisms with autocollimation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1204—Grating and filter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J2003/1828—Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/24—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Lenses (AREA)
Abstract
SE PRESENTA UN APARATO PARA LLEVAR A CABO UN ANALISIS ESPECTRAL DE RADIACION OPTICA EMITIDA DESDE UNA FUENTE DE LUZ (11), EL APARTO COMPRENDE UN DETECTOR ESPECTRAL (1) QUE TIENE UNA ABERTURA DE ENTRADA (10) PARA LA RADIACION PROVENIENTE DE LA FUENTE DE LUZ (11), UN PRIMER COMPONENTE OPTICO PARA LA FORMACION DE IMAGENES (12), UNA REJILLA DE DIFRACCION (14) PARA LA DISPERSION DE LA LONGITUD DE ONDA DE LA RADIACION, MEDIOS DE CLASIFICACION DE ORDENES (131, 132) PARA LA SEPARACION DE LOS ORDENES ESPECTRALES DE LA REJILLA DE DIFRACCION (14), UN SEGUNDO COMPONENTE OPTICO PARA LA FORMACION DE IMAGENES (15), Y UNA UNIDAD DETECTORA (16) PARA REGISTRAR EL ESPECTRO DE LA FUENTE DE LUZ DIVIDIDO EN ESPECTROS DE ORDENES A TRAVES DEL MEDIO DE CLASIFICACION DE ORDENES (131, 132). EL MEDIO DE CLASIFICACION DE ORDENES (131, 132) COMPRENDE AL MENOS DOS COMPONENTES OPTICOS REFRACTIVOS MANUFACTURADOS A PARTIR DE MATERIAL DIFERENTE. LOS DOS COMPONENTES OPTICOS REFRACTIVOS JUNTO CON LA REJILLA DE DIFRACCION (14)Y LOS COMPONENTES OPTICOS DE FORMACION DE IMAGENES (12 Y 15) PRODUCEN UNA DISTRIBUCION SUBSTANCIALMENTE UNIFORME DE LOS ESPECTROS DE ORDENES SOBRE LA UNIDAD DETECTORA (16). DE FORMA FAVORABLE EL MEDIO DE CLASIFICACION DE ORDENES, LA REJILLA DE DIFRACCION Y LOS COMPONENTES OPTICOS PARA LA FORMACION DE IMAGENES (12, 15) TAMBIEN COACCIONA PARA PRODUCIR UNA IMAGEN SUBSTANCIALMENTE MARCADA DE LA ABERTURA DE ENTRADA (10) EN AL MENOS UN PUNTO SOBRE LA UNIDAD DETECTORA (16).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9401669A SE502809C2 (sv) | 1994-05-16 | 1994-05-16 | Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2151064T3 true ES2151064T3 (es) | 2000-12-16 |
Family
ID=20394006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES95919724T Expired - Lifetime ES2151064T3 (es) | 1994-05-16 | 1995-05-15 | Aparato para efectuar analisis espectrales de una fuente optica luminosa, utilizando deteccion de imagenes y separacion de ordenes espectrales especiales. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5859702A (es) |
EP (1) | EP0764262B1 (es) |
AT (1) | ATE195179T1 (es) |
AU (1) | AU2542495A (es) |
DE (1) | DE69518244T2 (es) |
ES (1) | ES2151064T3 (es) |
SE (1) | SE502809C2 (es) |
WO (1) | WO1995031703A1 (es) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19537949A1 (de) * | 1995-10-12 | 1997-04-17 | Zeiss Carl Fa | Spektralapparat zum konzentrischen Typ mit FEry-Prisma |
US5675411A (en) * | 1996-05-10 | 1997-10-07 | General Atomics | Broad-band spectrometer with high resolution |
AU4406299A (en) * | 1998-04-29 | 1999-11-16 | American Holographic, Inc. | Corrected concentric spectrometer |
US6603549B2 (en) | 2000-02-25 | 2003-08-05 | Cymer, Inc. | Convolution method for measuring laser bandwidth |
US6406153B1 (en) * | 2000-11-10 | 2002-06-18 | Paul R. Stremple | Spectral dispersion device |
US6538737B2 (en) * | 2001-01-29 | 2003-03-25 | Cymer, Inc. | High resolution etalon-grating spectrometer |
FR2857746B1 (fr) * | 2003-07-16 | 2005-11-25 | Agence Spatiale Europeenne | Spectrometre optique miniaturise a haute resolution |
US7359052B2 (en) * | 2004-05-14 | 2008-04-15 | Kla-Tencor Technologies Corp. | Systems and methods for measurement of a specimen with vacuum ultraviolet light |
US7564552B2 (en) * | 2004-05-14 | 2009-07-21 | Kla-Tencor Technologies Corp. | Systems and methods for measurement of a specimen with vacuum ultraviolet light |
US20060023217A1 (en) * | 2004-05-28 | 2006-02-02 | Chemimage Corporation | Method and apparatus for producing a mosaic image |
US7408641B1 (en) | 2005-02-14 | 2008-08-05 | Kla-Tencor Technologies Corp. | Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system |
US7495761B2 (en) * | 2006-02-03 | 2009-02-24 | Foster-Miller, Inc. | Array detector coupled spectroanalytical system and graded blaze angle grating |
US9146155B2 (en) * | 2007-03-15 | 2015-09-29 | Oto Photonics, Inc. | Optical system and manufacturing method thereof |
TWI345050B (en) * | 2007-08-03 | 2011-07-11 | Oto Photonics Inc | Optical system and method of manufacturing the same |
DE102008007783A1 (de) * | 2008-02-06 | 2009-08-13 | Erwin Kayser-Threde Gmbh | Abbildendes Spektrometer, insbesondere für die Fernerkundung |
US20090273840A1 (en) * | 2008-05-02 | 2009-11-05 | Mclaughlin Sheldon | Wavelength dispersing device |
DE102009003413B4 (de) | 2009-01-30 | 2022-01-20 | Leibniz - Institut Für Analytische Wissenschaften - Isas - E.V. | Echelle-Spektrometeranordnung mit interner Vordispersion |
WO2012142980A1 (en) | 2011-04-19 | 2012-10-26 | 20Ten Sports, S.R.O. | Multipurpose handle endcap |
WO2015117000A1 (en) | 2014-01-30 | 2015-08-06 | Horiba Instruments Incorporated | Spectroscopic mapping system and method |
DE102016124980A1 (de) | 2016-01-14 | 2017-08-03 | Analytik Jena Ag | Spektrometer mit Zweidimensionalem Spektrum |
TWI715599B (zh) | 2016-07-12 | 2021-01-11 | 台灣超微光學股份有限公司 | 光譜儀模組及其製作方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE359648B (es) * | 1972-03-17 | 1973-09-03 | N Danielsson | |
FI75047C (sv) * | 1982-05-11 | 1988-04-11 | Scanoptics Oy | Anordning för utförande av spektralanalys. |
US5139335A (en) * | 1990-08-24 | 1992-08-18 | Sets, Inc. | Holographic grating imaging spectrometer |
-
1994
- 1994-05-16 SE SE9401669A patent/SE502809C2/sv unknown
-
1995
- 1995-05-15 WO PCT/SE1995/000543 patent/WO1995031703A1/en active IP Right Grant
- 1995-05-15 ES ES95919724T patent/ES2151064T3/es not_active Expired - Lifetime
- 1995-05-15 AT AT95919724T patent/ATE195179T1/de not_active IP Right Cessation
- 1995-05-15 EP EP95919724A patent/EP0764262B1/en not_active Expired - Lifetime
- 1995-05-15 DE DE69518244T patent/DE69518244T2/de not_active Expired - Fee Related
- 1995-05-15 US US08/737,339 patent/US5859702A/en not_active Expired - Lifetime
- 1995-05-15 AU AU25424/95A patent/AU2542495A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US5859702A (en) | 1999-01-12 |
DE69518244T2 (de) | 2001-03-29 |
DE69518244D1 (de) | 2000-09-07 |
AU2542495A (en) | 1995-12-05 |
EP0764262A1 (en) | 1997-03-26 |
SE502809C2 (sv) | 1996-01-22 |
WO1995031703A1 (en) | 1995-11-23 |
SE9401669L (sv) | 1995-11-17 |
SE9401669D0 (sv) | 1994-05-16 |
ATE195179T1 (de) | 2000-08-15 |
EP0764262B1 (en) | 2000-08-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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