DE69518244T2 - Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen - Google Patents

Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen

Info

Publication number
DE69518244T2
DE69518244T2 DE69518244T DE69518244T DE69518244T2 DE 69518244 T2 DE69518244 T2 DE 69518244T2 DE 69518244 T DE69518244 T DE 69518244T DE 69518244 T DE69518244 T DE 69518244T DE 69518244 T2 DE69518244 T2 DE 69518244T2
Authority
DE
Germany
Prior art keywords
imaging optical
pct
light source
diffraction grating
spectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69518244T
Other languages
English (en)
Other versions
DE69518244D1 (de
Inventor
Peter Lindblom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Multichannel Instruments AB
Original Assignee
Multichannel Instruments AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multichannel Instruments AB filed Critical Multichannel Instruments AB
Application granted granted Critical
Publication of DE69518244D1 publication Critical patent/DE69518244D1/de
Publication of DE69518244T2 publication Critical patent/DE69518244T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G01J3/16—Generating the spectrum; Monochromators using refracting elements, e.g. prisms with autocollimation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1204—Grating and filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1828—Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/24—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order
DE69518244T 1994-05-16 1995-05-15 Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen Expired - Fee Related DE69518244T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9401669A SE502809C2 (sv) 1994-05-16 1994-05-16 Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar
PCT/SE1995/000543 WO1995031703A1 (en) 1994-05-16 1995-05-15 Apparatus for carrying out spectral analysis of an optical light source using image detection and separation of spectral orders

Publications (2)

Publication Number Publication Date
DE69518244D1 DE69518244D1 (de) 2000-09-07
DE69518244T2 true DE69518244T2 (de) 2001-03-29

Family

ID=20394006

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69518244T Expired - Fee Related DE69518244T2 (de) 1994-05-16 1995-05-15 Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen

Country Status (8)

Country Link
US (1) US5859702A (de)
EP (1) EP0764262B1 (de)
AT (1) ATE195179T1 (de)
AU (1) AU2542495A (de)
DE (1) DE69518244T2 (de)
ES (1) ES2151064T3 (de)
SE (1) SE502809C2 (de)
WO (1) WO1995031703A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016124980A1 (de) 2016-01-14 2017-08-03 Analytik Jena Ag Spektrometer mit Zweidimensionalem Spektrum
DE102009003413B4 (de) 2009-01-30 2022-01-20 Leibniz - Institut Für Analytische Wissenschaften - Isas - E.V. Echelle-Spektrometeranordnung mit interner Vordispersion

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19537949A1 (de) * 1995-10-12 1997-04-17 Zeiss Carl Fa Spektralapparat zum konzentrischen Typ mit FEry-Prisma
US5675411A (en) * 1996-05-10 1997-10-07 General Atomics Broad-band spectrometer with high resolution
EP1073886A4 (de) 1998-04-29 2004-05-12 American Holographic Inc Konzentrischer spektrometer mit korrektur
US6603549B2 (en) * 2000-02-25 2003-08-05 Cymer, Inc. Convolution method for measuring laser bandwidth
US6406153B1 (en) * 2000-11-10 2002-06-18 Paul R. Stremple Spectral dispersion device
US6538737B2 (en) * 2001-01-29 2003-03-25 Cymer, Inc. High resolution etalon-grating spectrometer
FR2857746B1 (fr) * 2003-07-16 2005-11-25 Agence Spatiale Europeenne Spectrometre optique miniaturise a haute resolution
US7564552B2 (en) * 2004-05-14 2009-07-21 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US7359052B2 (en) * 2004-05-14 2008-04-15 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US20060023217A1 (en) * 2004-05-28 2006-02-02 Chemimage Corporation Method and apparatus for producing a mosaic image
US7408641B1 (en) 2005-02-14 2008-08-05 Kla-Tencor Technologies Corp. Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
US7495761B2 (en) * 2006-02-03 2009-02-24 Foster-Miller, Inc. Array detector coupled spectroanalytical system and graded blaze angle grating
TWI345050B (en) * 2007-08-03 2011-07-11 Oto Photonics Inc Optical system and method of manufacturing the same
US9146155B2 (en) * 2007-03-15 2015-09-29 Oto Photonics, Inc. Optical system and manufacturing method thereof
DE102008007783A1 (de) * 2008-02-06 2009-08-13 Erwin Kayser-Threde Gmbh Abbildendes Spektrometer, insbesondere für die Fernerkundung
US20090273840A1 (en) 2008-05-02 2009-11-05 Mclaughlin Sheldon Wavelength dispersing device
WO2012142980A1 (en) 2011-04-19 2012-10-26 20Ten Sports, S.R.O. Multipurpose handle endcap
US20170010153A1 (en) 2014-01-30 2017-01-12 Horiba Instruments Incorporated Spectroscopic mapping system and method
TWI715599B (zh) 2016-07-12 2021-01-11 台灣超微光學股份有限公司 光譜儀模組及其製作方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE359648B (de) * 1972-03-17 1973-09-03 N Danielsson
FI75047C (sv) * 1982-05-11 1988-04-11 Scanoptics Oy Anordning för utförande av spektralanalys.
US5139335A (en) * 1990-08-24 1992-08-18 Sets, Inc. Holographic grating imaging spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009003413B4 (de) 2009-01-30 2022-01-20 Leibniz - Institut Für Analytische Wissenschaften - Isas - E.V. Echelle-Spektrometeranordnung mit interner Vordispersion
DE102016124980A1 (de) 2016-01-14 2017-08-03 Analytik Jena Ag Spektrometer mit Zweidimensionalem Spektrum

Also Published As

Publication number Publication date
AU2542495A (en) 1995-12-05
US5859702A (en) 1999-01-12
ES2151064T3 (es) 2000-12-16
SE9401669D0 (sv) 1994-05-16
EP0764262B1 (de) 2000-08-02
SE502809C2 (sv) 1996-01-22
DE69518244D1 (de) 2000-09-07
WO1995031703A1 (en) 1995-11-23
SE9401669L (sv) 1995-11-17
EP0764262A1 (de) 1997-03-26
ATE195179T1 (de) 2000-08-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee