ATE195179T1 - Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen - Google Patents

Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen

Info

Publication number
ATE195179T1
ATE195179T1 AT95919724T AT95919724T ATE195179T1 AT E195179 T1 ATE195179 T1 AT E195179T1 AT 95919724 T AT95919724 T AT 95919724T AT 95919724 T AT95919724 T AT 95919724T AT E195179 T1 ATE195179 T1 AT E195179T1
Authority
AT
Austria
Prior art keywords
imaging optical
light source
pct
diffraction grating
sorting means
Prior art date
Application number
AT95919724T
Other languages
English (en)
Inventor
Peter Lindblom
Original Assignee
Multichannel Instr Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multichannel Instr Ab filed Critical Multichannel Instr Ab
Application granted granted Critical
Publication of ATE195179T1 publication Critical patent/ATE195179T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G01J3/16—Generating the spectrum; Monochromators using refracting elements, e.g. prisms with autocollimation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1204—Grating and filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1828—Generating the spectrum; Monochromators using diffraction elements, e.g. grating with order sorter or prefilter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/24—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Lenses (AREA)
AT95919724T 1994-05-16 1995-05-15 Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen ATE195179T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9401669A SE502809C2 (sv) 1994-05-16 1994-05-16 Anordning för spektralanalys av optisk ljuskälla med bilddetektion och uppdelning av spektralordningar
PCT/SE1995/000543 WO1995031703A1 (en) 1994-05-16 1995-05-15 Apparatus for carrying out spectral analysis of an optical light source using image detection and separation of spectral orders

Publications (1)

Publication Number Publication Date
ATE195179T1 true ATE195179T1 (de) 2000-08-15

Family

ID=20394006

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95919724T ATE195179T1 (de) 1994-05-16 1995-05-15 Gerät zur durchführung einer spektralanalyse einer optischen lichtquelle mittels bildaufnahme und trennung bestimmter spektraler ordnungen

Country Status (8)

Country Link
US (1) US5859702A (de)
EP (1) EP0764262B1 (de)
AT (1) ATE195179T1 (de)
AU (1) AU2542495A (de)
DE (1) DE69518244T2 (de)
ES (1) ES2151064T3 (de)
SE (1) SE502809C2 (de)
WO (1) WO1995031703A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19537949A1 (de) * 1995-10-12 1997-04-17 Zeiss Carl Fa Spektralapparat zum konzentrischen Typ mit FEry-Prisma
US5675411A (en) * 1996-05-10 1997-10-07 General Atomics Broad-band spectrometer with high resolution
US6266140B1 (en) 1998-04-29 2001-07-24 American Holographic, Inc. Corrected concentric spectrometer
US6603549B2 (en) 2000-02-25 2003-08-05 Cymer, Inc. Convolution method for measuring laser bandwidth
US6406153B1 (en) * 2000-11-10 2002-06-18 Paul R. Stremple Spectral dispersion device
US6538737B2 (en) * 2001-01-29 2003-03-25 Cymer, Inc. High resolution etalon-grating spectrometer
FR2857746B1 (fr) * 2003-07-16 2005-11-25 Agence Spatiale Europeenne Spectrometre optique miniaturise a haute resolution
US7359052B2 (en) * 2004-05-14 2008-04-15 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US7564552B2 (en) * 2004-05-14 2009-07-21 Kla-Tencor Technologies Corp. Systems and methods for measurement of a specimen with vacuum ultraviolet light
US20060023217A1 (en) * 2004-05-28 2006-02-02 Chemimage Corporation Method and apparatus for producing a mosaic image
US7408641B1 (en) 2005-02-14 2008-08-05 Kla-Tencor Technologies Corp. Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
US7495761B2 (en) * 2006-02-03 2009-02-24 Foster-Miller, Inc. Array detector coupled spectroanalytical system and graded blaze angle grating
US9146155B2 (en) * 2007-03-15 2015-09-29 Oto Photonics, Inc. Optical system and manufacturing method thereof
TWI345050B (en) * 2007-08-03 2011-07-11 Oto Photonics Inc Optical system and method of manufacturing the same
DE102008007783A1 (de) * 2008-02-06 2009-08-13 Erwin Kayser-Threde Gmbh Abbildendes Spektrometer, insbesondere für die Fernerkundung
US20090273840A1 (en) 2008-05-02 2009-11-05 Mclaughlin Sheldon Wavelength dispersing device
DE102009003413B4 (de) 2009-01-30 2022-01-20 Leibniz - Institut Für Analytische Wissenschaften - Isas - E.V. Echelle-Spektrometeranordnung mit interner Vordispersion
WO2012142980A1 (en) 2011-04-19 2012-10-26 20Ten Sports, S.R.O. Multipurpose handle endcap
WO2015117000A1 (en) 2014-01-30 2015-08-06 Horiba Instruments Incorporated Spectroscopic mapping system and method
US10488254B2 (en) 2016-01-14 2019-11-26 Analytik Jena Ag Spectrometer with two-dimensional spectrum
TWI715599B (zh) 2016-07-12 2021-01-11 台灣超微光學股份有限公司 光譜儀模組及其製作方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE359648B (de) * 1972-03-17 1973-09-03 N Danielsson
FI75047C (sv) * 1982-05-11 1988-04-11 Scanoptics Oy Anordning för utförande av spektralanalys.
US5139335A (en) * 1990-08-24 1992-08-18 Sets, Inc. Holographic grating imaging spectrometer

Also Published As

Publication number Publication date
SE502809C2 (sv) 1996-01-22
DE69518244T2 (de) 2001-03-29
AU2542495A (en) 1995-12-05
WO1995031703A1 (en) 1995-11-23
DE69518244D1 (de) 2000-09-07
SE9401669L (sv) 1995-11-17
EP0764262A1 (de) 1997-03-26
ES2151064T3 (es) 2000-12-16
US5859702A (en) 1999-01-12
EP0764262B1 (de) 2000-08-02
SE9401669D0 (sv) 1994-05-16

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee