JPS5760231A - Multi-wavelength spectrometer - Google Patents

Multi-wavelength spectrometer

Info

Publication number
JPS5760231A
JPS5760231A JP13431580A JP13431580A JPS5760231A JP S5760231 A JPS5760231 A JP S5760231A JP 13431580 A JP13431580 A JP 13431580A JP 13431580 A JP13431580 A JP 13431580A JP S5760231 A JPS5760231 A JP S5760231A
Authority
JP
Japan
Prior art keywords
detectors
filters
light
wavelength
spectra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13431580A
Other languages
Japanese (ja)
Inventor
Yoshio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13431580A priority Critical patent/JPS5760231A/en
Publication of JPS5760231A publication Critical patent/JPS5760231A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE:To eliminate the replacement of filters by arranging them on individual image detectors adapted to simultaneously detect spectra scattered according to the wavelength, as shited perpendicular to the scattered surface. CONSTITUTION:A light coming from a slit 21 is separated into spectra lambdal...lambdan with a grating and a prism. They irradiate image detectors 3, the output of which is processed with an amplifier 4, a scanner 5, an A/D converter 7, a memory 8 and the like to obtain data. The image detector 3 is composed of a plurality of detectors 31-33 and shifted perpendicular to the spectral surface (at the right angle to AA'' in the drawing) and with both ends overlapping, cut filters 36-38 are inserted into the front of the photo detection surface of the detectors as required. This enables simultaneous measurement of multiple wavelength elminating complicated replacement of the filters thereby providing a spectrometer minimizing the mixing of stray light and light of higher order.
JP13431580A 1980-09-29 1980-09-29 Multi-wavelength spectrometer Pending JPS5760231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13431580A JPS5760231A (en) 1980-09-29 1980-09-29 Multi-wavelength spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13431580A JPS5760231A (en) 1980-09-29 1980-09-29 Multi-wavelength spectrometer

Publications (1)

Publication Number Publication Date
JPS5760231A true JPS5760231A (en) 1982-04-12

Family

ID=15125420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13431580A Pending JPS5760231A (en) 1980-09-29 1980-09-29 Multi-wavelength spectrometer

Country Status (1)

Country Link
JP (1) JPS5760231A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917117A (en) * 1982-07-20 1984-01-28 Hamamatsu Tv Kk Spectrophotometric device
JPS5961723A (en) * 1982-10-01 1984-04-09 Matsushita Electric Ind Co Ltd Light spectrum analyzer
JPS6082231U (en) * 1983-11-14 1985-06-07 株式会社オーク製作所 Multi-channel spectroradiometer using stabilized operational amplifier
JPS6290518A (en) * 1985-10-16 1987-04-25 Suga Shikenki Kk Color mixture calculator due to mulipolar sensitive element
JPS62155331U (en) * 1986-03-26 1987-10-02
US4715712A (en) * 1984-03-14 1987-12-29 Hitachi, Ltd. Multiwavelength spectrophotometer
US4822998A (en) * 1986-05-15 1989-04-18 Minolta Camera Kabushiki Kaisha Spectral sensor with interference filter
EP1916507A1 (en) 2006-10-25 2008-04-30 Hamamatsu Photonics K. K. Spectroscopic analyzing apparatus
US7403286B2 (en) 2005-05-27 2008-07-22 Hamamatsu Photonics K.K. Spectroscopic analyzing apparatus
WO2013068627A1 (en) * 2011-11-11 2013-05-16 Consejo Superior De Investigaciones Científicas (Csic) High-sensitivity multifunctional automatic spectrometer and method for using same
JP2015210217A (en) * 2014-04-28 2015-11-24 日本電気株式会社 Spectrum processing apparatus, spectrum processing program, spectrum processing system, and spectrum processing method
JP2017049233A (en) * 2015-08-05 2017-03-09 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． In-situ spectrum process monitoring
US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
US10190910B2 (en) 2014-01-31 2019-01-29 Viavi Solutions Inc. Optical filter and spectrometer

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917117A (en) * 1982-07-20 1984-01-28 Hamamatsu Tv Kk Spectrophotometric device
JPS5961723A (en) * 1982-10-01 1984-04-09 Matsushita Electric Ind Co Ltd Light spectrum analyzer
JPS6082231U (en) * 1983-11-14 1985-06-07 株式会社オーク製作所 Multi-channel spectroradiometer using stabilized operational amplifier
US4715712A (en) * 1984-03-14 1987-12-29 Hitachi, Ltd. Multiwavelength spectrophotometer
JPS6290518A (en) * 1985-10-16 1987-04-25 Suga Shikenki Kk Color mixture calculator due to mulipolar sensitive element
JPS62155331U (en) * 1986-03-26 1987-10-02
US4822998A (en) * 1986-05-15 1989-04-18 Minolta Camera Kabushiki Kaisha Spectral sensor with interference filter
US7403286B2 (en) 2005-05-27 2008-07-22 Hamamatsu Photonics K.K. Spectroscopic analyzing apparatus
EP1916507A1 (en) 2006-10-25 2008-04-30 Hamamatsu Photonics K. K. Spectroscopic analyzing apparatus
WO2013068627A1 (en) * 2011-11-11 2013-05-16 Consejo Superior De Investigaciones Científicas (Csic) High-sensitivity multifunctional automatic spectrometer and method for using same
US10190910B2 (en) 2014-01-31 2019-01-29 Viavi Solutions Inc. Optical filter and spectrometer
JP2015210217A (en) * 2014-04-28 2015-11-24 日本電気株式会社 Spectrum processing apparatus, spectrum processing program, spectrum processing system, and spectrum processing method
JP2017049233A (en) * 2015-08-05 2017-03-09 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． In-situ spectrum process monitoring
US9945790B2 (en) 2015-08-05 2018-04-17 Viavi Solutions Inc. In-situ spectral process monitoring
US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
US10481100B2 (en) 2015-08-05 2019-11-19 Viavi Solutions Inc. In-situ spectral process monitoring
US10753793B2 (en) 2015-08-05 2020-08-25 Viavi Solutions Inc. Optical filter and spectrometer
US11237049B2 (en) 2015-08-05 2022-02-01 Viavi Solutions Inc. Optical filter and spectrometer

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