WO2008149677A1 - チューナブルフィルタ、光源装置およびスペクトル分布測定装置 - Google Patents

チューナブルフィルタ、光源装置およびスペクトル分布測定装置 Download PDF

Info

Publication number
WO2008149677A1
WO2008149677A1 PCT/JP2008/059383 JP2008059383W WO2008149677A1 WO 2008149677 A1 WO2008149677 A1 WO 2008149677A1 JP 2008059383 W JP2008059383 W JP 2008059383W WO 2008149677 A1 WO2008149677 A1 WO 2008149677A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
linearly polarized
reentered
modulated
light components
Prior art date
Application number
PCT/JP2008/059383
Other languages
English (en)
French (fr)
Inventor
Atsushi Katsunuma
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to CA002688562A priority Critical patent/CA2688562A1/en
Priority to JP2009517778A priority patent/JP5333215B2/ja
Priority to EP08753060.6A priority patent/EP2157472B1/en
Priority to CN2008800183325A priority patent/CN101681033B/zh
Publication of WO2008149677A1 publication Critical patent/WO2008149677A1/ja
Priority to US12/627,842 priority patent/US8351033B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1282—Spectrum tailoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1286—Polychromator in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/447—Polarisation spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13363—Birefringent elements, e.g. for optical compensation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/05—Function characteristic wavelength dependent
    • G02F2203/055—Function characteristic wavelength dependent wavelength filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/06—Polarisation independent

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

　入力光を、互いに直交する振動方向を有する２つの直線偏光に分岐する偏光分岐素子と、偏光分岐素子で分岐された２つの直線偏光を、２つの直線偏光に対応し、一方向について空間的に広がりを有する２つのスペクトラム像に分光する波長分散型分光素子と、２つのスペクトラム像に対して互いに独立に、各波長領域の直線偏光を変調して反射する反射型空間変調素子とを備え、反射型空間変調素子で反射された変調光が波長分散型分光素子および偏光分岐素子に再入力されることにより、変調光のうち、反射型空間変調素子で変調された波長領域の出力光と、変調されなかった波長領域の出力光と、が分岐して出力され、偏光分岐素子への入力光および再入力光、並びに、波長分散型分光素子への入力光および再入力光が平行光束であるチューナブルフィルタが提供される。
PCT/JP2008/059383 2007-05-31 2008-05-21 チューナブルフィルタ、光源装置およびスペクトル分布測定装置 WO2008149677A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CA002688562A CA2688562A1 (en) 2007-05-31 2008-05-21 Tunable filter, light source apparatus, and spectral distribution measuring apparatus
JP2009517778A JP5333215B2 (ja) 2007-05-31 2008-05-21 チューナブルフィルタ、光源装置およびスペクトル分布測定装置
EP08753060.6A EP2157472B1 (en) 2007-05-31 2008-05-21 Tunable filter, light source device and spectrum distribution measuring device
CN2008800183325A CN101681033B (zh) 2007-05-31 2008-05-21 可调谐滤光器、光源装置及光谱分布测定装置
US12/627,842 US8351033B2 (en) 2007-05-31 2009-11-30 Tunable filter, light source apparatus, and spectral distribution measuring apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-144429 2007-05-31
JP2007144429 2007-05-31

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/627,842 Continuation US8351033B2 (en) 2007-05-31 2009-11-30 Tunable filter, light source apparatus, and spectral distribution measuring apparatus

Publications (1)

Publication Number Publication Date
WO2008149677A1 true WO2008149677A1 (ja) 2008-12-11

Family

ID=40093502

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059383 WO2008149677A1 (ja) 2007-05-31 2008-05-21 チューナブルフィルタ、光源装置およびスペクトル分布測定装置

Country Status (7)

Country Link
US (1) US8351033B2 (ja)
EP (1) EP2157472B1 (ja)
JP (1) JP5333215B2 (ja)
CN (1) CN101681033B (ja)
CA (1) CA2688562A1 (ja)
TW (1) TWI454745B (ja)
WO (1) WO2008149677A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009198255A (ja) * 2008-02-20 2009-09-03 Nikon Corp チューナブルフィルタとこれを用いた、光源装置、スペクトル測定装置
JP2010032785A (ja) * 2008-07-29 2010-02-12 Nikon Corp チューナブルフィルタ、光源装置およびスペクトル分布測定装置
JP2010217751A (ja) * 2009-03-18 2010-09-30 Nikon Corp 照明装置
JP2015011122A (ja) * 2013-06-27 2015-01-19 古河電気工業株式会社 光操作装置
JP2016051147A (ja) * 2014-09-02 2016-04-11 浜松ホトニクス株式会社 光変調装置および光学システム

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5451238B2 (ja) * 2009-08-03 2014-03-26 浜松ホトニクス株式会社 レーザ加工方法
WO2013095482A2 (en) * 2010-12-29 2013-06-27 3M Innovative Properties Company Refractive polarization converter and polarized color combiner
CN104884894B (zh) * 2012-02-07 2018-05-15 株式会社尼康 成像光学系统、测定装置、形状测定装置、构造物制造系统、及构造物制造方法
CN102722024B (zh) * 2012-06-27 2014-03-12 北京国科世纪激光技术有限公司 一种光可调谐滤波装置和方法
JP6168383B2 (ja) * 2012-12-27 2017-07-26 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． 欠陥検査装置及び欠陥検査方法
DE102013219181B4 (de) * 2013-09-24 2018-05-09 Olympus Soft Imaging Solutions Gmbh Vorrichtung und Verfahren zur optischen Bestimmung von Partikeleigenschaften
JP5781188B1 (ja) * 2014-03-26 2015-09-16 株式会社フジクラ 導光装置、製造方法、及び、ｌｄモジュール
FR3021127B1 (fr) * 2014-05-19 2017-10-13 Commissariat Energie Atomique Systeme et procede d'acquisition d'images hyperspectrales
CN109669270B (zh) * 2018-12-29 2021-10-29 贝耐特光学科技（昆山）有限公司 一种光谱选择装置及光学设备
CN113677254B (zh) * 2019-04-28 2024-01-16 北京航空航天大学 可调谐光源及内窥镜系统
CN114526818B (zh) * 2022-02-17 2023-03-28 清华大学 光谱测量方法、装置、光谱仪和存储介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11101944A (ja) * 1997-09-26 1999-04-13 Satoru Toyooka 光源装置
JP2001228024A (ja) * 2000-02-16 2001-08-24 Univ Saitama 分光画像撮像装置
JP2005115377A (ja) * 2003-10-07 2005-04-28 Agilent Technol Inc 波長に基づいて光信号を選択的に伝送させるための波長選択スイッチングデバイスおよび方法
JP2008170850A (ja) * 2007-01-15 2008-07-24 Nikon Corp チューナブルフィルタ、光源装置、及びスペクトル分布測定装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2888372B2 (ja) 1990-10-02 1999-05-10 日本電信電話株式会社 可変波長フィルタモジュール
CA2084923A1 (en) * 1991-12-20 1993-06-21 Ronald E. Stafford Slm spectrometer
JPH05232384A (ja) 1992-02-18 1993-09-10 Olympus Optical Co Ltd 干渉顕微鏡
JPH05323265A (ja) 1992-05-25 1993-12-07 Nippon Telegr & Teleph Corp <Ntt> 偏波無依存型波長可変フィルタ
US5414540A (en) 1993-06-01 1995-05-09 Bell Communications Research, Inc. Frequency-selective optical switch employing a frequency dispersive element, polarization dispersive element and polarization modulating elements
US6504943B1 (en) * 1998-07-20 2003-01-07 Sandia Corporation Information-efficient spectral imaging sensor
US6394606B1 (en) * 1998-09-29 2002-05-28 Sony Corporation Projection-type display device
US6208774B1 (en) 1999-06-16 2001-03-27 Agilent Technologies, Inc. Polarization independent light switching device based on liquid crystals
IL142773A (en) 2001-03-08 2007-10-31 Xtellus Inc Fiber optic damper
US20030058516A1 (en) * 2001-04-13 2003-03-27 Scott Bradley A. Dynamic spectral equalizer and wavelength selective switch having extremely low polarization dependent loss and polarization mode dispersion
DE10241472B4 (de) * 2002-09-04 2019-04-11 Carl Zeiss Microscopy Gmbh Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität
JP2004228024A (ja) 2003-01-27 2004-08-12 Denso Corp スイッチ及びその製造方法
JP4156977B2 (ja) * 2003-06-04 2008-09-24 オリンパス株式会社 顕微分光装置
KR20050025904A (ko) * 2003-09-08 2005-03-14 소니 가부시끼 가이샤 화상투사장치
DE102005020545A1 (de) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Vorrichtung zur Steuerung von Lichtstrahlung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11101944A (ja) * 1997-09-26 1999-04-13 Satoru Toyooka 光源装置
JP2001228024A (ja) * 2000-02-16 2001-08-24 Univ Saitama 分光画像撮像装置
JP2005115377A (ja) * 2003-10-07 2005-04-28 Agilent Technol Inc 波長に基づいて光信号を選択的に伝送させるための波長選択スイッチングデバイスおよび方法
JP2008170850A (ja) * 2007-01-15 2008-07-24 Nikon Corp チューナブルフィルタ、光源装置、及びスペクトル分布測定装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009198255A (ja) * 2008-02-20 2009-09-03 Nikon Corp チューナブルフィルタとこれを用いた、光源装置、スペクトル測定装置
JP2010032785A (ja) * 2008-07-29 2010-02-12 Nikon Corp チューナブルフィルタ、光源装置およびスペクトル分布測定装置
JP2010217751A (ja) * 2009-03-18 2010-09-30 Nikon Corp 照明装置
JP2015011122A (ja) * 2013-06-27 2015-01-19 古河電気工業株式会社 光操作装置
JP2016051147A (ja) * 2014-09-02 2016-04-11 浜松ホトニクス株式会社 光変調装置および光学システム
US10527864B2 (en) 2014-09-02 2020-01-07 Hamamatsu Photonics K.K. Light modulation device and optical system having increased light use efficiency by correcting phase difference due to an optical path difference between two optical paths

Also Published As

Publication number Publication date
JPWO2008149677A1 (ja) 2010-08-26
TWI454745B (zh) 2014-10-01
US8351033B2 (en) 2013-01-08
EP2157472B1 (en) 2019-10-30
CN101681033A (zh) 2010-03-24
TW200905246A (en) 2009-02-01
EP2157472A1 (en) 2010-02-24
JP5333215B2 (ja) 2013-11-06
CA2688562A1 (en) 2008-12-11
EP2157472A4 (en) 2012-09-26
CN101681033B (zh) 2011-10-05
US20100141950A1 (en) 2010-06-10

Similar Documents

Publication Publication Date Title
WO2008149677A1 (ja) チューナブルフィルタ、光源装置およびスペクトル分布測定装置
CA2890560C (en) Light field projectors and methods
EP3176638B1 (en) Light-emitting device and projection system
JP2002357708A5 (ja)
WO2007019032A3 (en) Differential interferometric light modulator and image display system
JP2014530375A5 (ja)
WO2016020630A3 (en) Waveguide laser illuminator incorporating a despeckler
JP2009538449A5 (ja)
JP2016535862A5 (ja)
JP2008542795A5 (ja)
WO2007087201A3 (en) Polarization light modulator
ATE514119T1 (de) Polarisationsunabhängige optische wellenformungsvorrichtung
EP2905532A3 (en) Display module and light guide device
US9261770B2 (en) Apparatus and method for combining laser beams of different polarization
JP2009544063A5 (ja)
WO2011090575A3 (en) Optical modulator using a dual output laser embedded in a mach zehnder interferometer
EP2042913A3 (en) Optical quaternary phase modulator
MY165878A (en) Resona-assisted control of radio-frequency response in an optical modulator
WO2008048494A3 (en) Combining p and s rays for bright stereoscopic projection
WO2006118881A3 (en) Projection apparatus using lcd panel
JP2019101415A5 (ja)
WO2016067617A3 (en) Optical module implementing with optical source, optical modulator, and wavelength detector, and a method to assemble the same
JP2014106420A5 (ja)
WO2007113777A3 (en) Angular dependent element positioned for color tuning
WO2014162924A1 (ja) 光学モジュールおよび光照射装置

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880018332.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08753060

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009517778

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 2688562

Country of ref document: CA

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2008753060

Country of ref document: EP