KR100272190B1 - 피검사체의 검사장치 - Google Patents

피검사체의 검사장치 Download PDF

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Publication number
KR100272190B1
KR100272190B1 KR1019950024237A KR19950024237A KR100272190B1 KR 100272190 B1 KR100272190 B1 KR 100272190B1 KR 1019950024237 A KR1019950024237 A KR 1019950024237A KR 19950024237 A KR19950024237 A KR 19950024237A KR 100272190 B1 KR100272190 B1 KR 100272190B1
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KR
South Korea
Prior art keywords
inspection
alignment
substrate
mounting
lcd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019950024237A
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English (en)
Korean (ko)
Other versions
KR960009091A (ko
Inventor
기요시 다케코시
신지 이이노
이타루 이이다
Original Assignee
기리야마겐지
테루.엔지니아링구가부시키가이샤
히가시 데쓰로
동경 엘렉트론주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6249483A external-priority patent/JPH08115954A/ja
Application filed by 기리야마겐지, 테루.엔지니아링구가부시키가이샤, 히가시 데쓰로, 동경 엘렉트론주식회사 filed Critical 기리야마겐지
Publication of KR960009091A publication Critical patent/KR960009091A/ko
Application granted granted Critical
Publication of KR100272190B1 publication Critical patent/KR100272190B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019950024237A 1994-08-05 1995-08-05 피검사체의 검사장치 Expired - Fee Related KR100272190B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP94-184375 1994-08-05
JP18437594 1994-08-05
JP94-249483 1994-10-14
JP6249483A JPH08115954A (ja) 1994-10-14 1994-10-14 検査装置

Publications (2)

Publication Number Publication Date
KR960009091A KR960009091A (ko) 1996-03-22
KR100272190B1 true KR100272190B1 (ko) 2000-12-01

Family

ID=26502466

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950024237A Expired - Fee Related KR100272190B1 (ko) 1994-08-05 1995-08-05 피검사체의 검사장치

Country Status (3)

Country Link
US (1) US5691764A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100272190B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW273011B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100658080B1 (ko) * 2003-08-26 2006-12-15 비오이 하이디스 테크놀로지 주식회사 백라이트 조립용 지그
CN102736008A (zh) * 2011-04-08 2012-10-17 赛科隆股份有限公司 检查发光装置的方法
KR101335916B1 (ko) * 2007-07-11 2013-12-03 삼성전자주식회사 테스트 장치

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW343308B (en) * 1996-10-04 1998-10-21 Adoban Tesuto Kk Image processing method
US6009187A (en) * 1996-12-02 1999-12-28 Motorola, Inc. Wafer prober having an emissive display inspection system and method of use
KR100257584B1 (ko) * 1997-11-11 2000-06-01 윤종용 웨이퍼 테스트 시스템에서 제트축의 높이 설정 장치 및 방법
US6285200B1 (en) * 1998-03-02 2001-09-04 Agilent Technologies, Inc. Apparatus and method for testing integrated circuit devices
JP2001235759A (ja) * 2000-02-24 2001-08-31 Nec Eng Ltd 液晶表示セルの封止装置及び封止方法
US20020135395A1 (en) * 2001-02-08 2002-09-26 Pete Smith System and method for testing a display device
DE10227332A1 (de) * 2002-06-19 2004-01-15 Akt Electron Beam Technology Gmbh Ansteuervorrichtung mit verbesserten Testeneigenschaften
DE10253717B4 (de) * 2002-11-18 2011-05-19 Applied Materials Gmbh Vorrichtung zum Kontaktieren für den Test mindestens eines Testobjekts, Testsystem und Verfahren zum Testen von Testobjekten
JP3906194B2 (ja) * 2002-11-29 2007-04-18 株式会社東芝 キャリブレーション方法、キャリブレーション支援装置、キャリブレーション装置およびカメラシステムの製造方法
JP4137711B2 (ja) * 2003-06-16 2008-08-20 東京エレクトロン株式会社 基板処理装置及び基板搬送手段の位置合わせ方法
JP3745750B2 (ja) * 2003-06-27 2006-02-15 東芝テリー株式会社 表示パネルの検査装置および検査方法
JP4507559B2 (ja) * 2003-10-30 2010-07-21 奇美電子股▲ふん▼有限公司 液晶ディスプレイのアレイ基板の検査装置および検査方法
US6833717B1 (en) * 2004-02-12 2004-12-21 Applied Materials, Inc. Electron beam test system with integrated substrate transfer module
US20060038554A1 (en) * 2004-02-12 2006-02-23 Applied Materials, Inc. Electron beam test system stage
US7319335B2 (en) * 2004-02-12 2008-01-15 Applied Materials, Inc. Configurable prober for TFT LCD array testing
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
US7535238B2 (en) * 2005-04-29 2009-05-19 Applied Materials, Inc. In-line electron beam test system
JP5032170B2 (ja) * 2007-03-23 2012-09-26 東京エレクトロン株式会社 検査装置
JP5829376B2 (ja) * 2006-03-14 2015-12-09 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ マルチカラム電子ビーム検査システムにおけるクロストークの軽減方法
US7602199B2 (en) 2006-05-31 2009-10-13 Applied Materials, Inc. Mini-prober for TFT-LCD testing
US7786742B2 (en) 2006-05-31 2010-08-31 Applied Materials, Inc. Prober for electronic device testing on large area substrates
JP2008129601A (ja) * 2006-11-21 2008-06-05 Lg Electronics Inc 平面表示装置非接触式検査用電気光学モジュレータ組立体、これを用いた検査装置及び検査方法、並びにこの検査方法を用いた平板表示装置の製造方法
TWI398335B (zh) * 2006-11-27 2013-06-11 Nidec Sankyo Corp Workpiece conveying system
JP5120018B2 (ja) * 2007-05-15 2013-01-16 東京エレクトロン株式会社 プローブ装置
USRE43925E1 (en) * 2008-11-21 2013-01-15 Industrial Technology Research Institute Three dimensional profile inspecting apparatus
TWI387721B (zh) * 2008-11-21 2013-03-01 Ind Tech Res Inst 三維形貌檢測裝置
US8432540B2 (en) * 2010-03-31 2013-04-30 Cooper S.K. Kuo Support mechanism for inspection systems
DE102012022502A1 (de) * 2012-11-16 2014-05-22 Muetec Automatisierte Mikroskopie Und Messtechnik Gmbh Verfahren und Vorrichtung zur Inspektion von Wafern
CN106910444B (zh) * 2017-02-28 2020-11-27 京东方科技集团股份有限公司 点灯装置和点灯测试方法
CN107632421B (zh) * 2017-09-13 2020-04-24 昆山龙腾光电股份有限公司 点灯测试装置及测试方法
CN109682837A (zh) * 2019-02-28 2019-04-26 深圳市宝盛自动化设备有限公司 一种全自动lcd点灯检查机

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2694345B2 (ja) * 1988-07-14 1997-12-24 東京エレクトロン株式会社 検査装置
JPH0417347A (ja) * 1990-05-10 1992-01-22 Tokyo Electron Ltd プローブ装置
US5404111A (en) * 1991-08-03 1995-04-04 Tokyo Electron Limited Probe apparatus with a swinging holder for an object of examination
US5465052A (en) * 1991-09-10 1995-11-07 Photon Dynamics, Inc. Method of testing liquid crystal display substrates
US5539676A (en) * 1993-04-15 1996-07-23 Tokyo Electron Limited Method of identifying probe position and probing method in prober

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100658080B1 (ko) * 2003-08-26 2006-12-15 비오이 하이디스 테크놀로지 주식회사 백라이트 조립용 지그
KR101335916B1 (ko) * 2007-07-11 2013-12-03 삼성전자주식회사 테스트 장치
CN102736008A (zh) * 2011-04-08 2012-10-17 赛科隆股份有限公司 检查发光装置的方法
CN102736008B (zh) * 2011-04-08 2015-11-25 细美事有限公司 检查发光装置的方法

Also Published As

Publication number Publication date
TW273011B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-03-21
KR960009091A (ko) 1996-03-22
US5691764A (en) 1997-11-25

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