KR100216110B1 - 기판의 주변부 노광장치 - Google Patents

기판의 주변부 노광장치 Download PDF

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Publication number
KR100216110B1
KR100216110B1 KR1019960041228A KR19960041228A KR100216110B1 KR 100216110 B1 KR100216110 B1 KR 100216110B1 KR 1019960041228 A KR1019960041228 A KR 1019960041228A KR 19960041228 A KR19960041228 A KR 19960041228A KR 100216110 B1 KR100216110 B1 KR 100216110B1
Authority
KR
South Korea
Prior art keywords
exposure
exposure lamp
lamp
electrode
light irradiation
Prior art date
Application number
KR1019960041228A
Other languages
English (en)
Korean (ko)
Other versions
KR970023645A (ko
Inventor
유키히코 이나가키
시게루 사사다
모리유키 이토오
Original Assignee
이시다 아키라
다이닛뽕스크린 세이조오 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이시다 아키라, 다이닛뽕스크린 세이조오 가부시키가이샤 filed Critical 이시다 아키라
Publication of KR970023645A publication Critical patent/KR970023645A/ko
Application granted granted Critical
Publication of KR100216110B1 publication Critical patent/KR100216110B1/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
    • G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
KR1019960041228A 1995-10-05 1996-09-20 기판의 주변부 노광장치 KR100216110B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-286830 1995-10-05
JP28683095A JP3377347B2 (ja) 1995-10-05 1995-10-05 基板の周辺部露光装置

Publications (2)

Publication Number Publication Date
KR970023645A KR970023645A (ko) 1997-05-30
KR100216110B1 true KR100216110B1 (ko) 1999-08-16

Family

ID=17709595

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960041228A KR100216110B1 (ko) 1995-10-05 1996-09-20 기판의 주변부 노광장치

Country Status (2)

Country Link
JP (1) JP3377347B2 (ja)
KR (1) KR100216110B1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3275838B2 (ja) * 1998-07-21 2002-04-22 ウシオ電機株式会社 光照射装置
JP4522024B2 (ja) * 2001-07-27 2010-08-11 キヤノン株式会社 水銀ランプ、照明装置及び露光装置
JP5935827B2 (ja) * 2014-06-09 2016-06-15 株式会社ニコン メンテナンス方法
JP6323492B2 (ja) * 2016-05-12 2018-05-16 株式会社ニコン 光源装置
JP6645532B2 (ja) * 2018-04-11 2020-02-14 株式会社ニコン 光源装置、露光装置、およびデバイス製造方法
JP7178240B2 (ja) * 2018-11-14 2022-11-25 東京エレクトロン株式会社 光照射装置
JP2020060798A (ja) * 2020-01-09 2020-04-16 株式会社ニコン 光源装置、露光装置、ランプ、メンテナンス方法およびデバイス製造方法

Also Published As

Publication number Publication date
KR970023645A (ko) 1997-05-30
JP3377347B2 (ja) 2003-02-17
JPH09102455A (ja) 1997-04-15

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