KR100200179B1 - 표면파 장치 - Google Patents

표면파 장치 Download PDF

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Publication number
KR100200179B1
KR100200179B1 KR1019940000626A KR19940000626A KR100200179B1 KR 100200179 B1 KR100200179 B1 KR 100200179B1 KR 1019940000626 A KR1019940000626 A KR 1019940000626A KR 19940000626 A KR19940000626 A KR 19940000626A KR 100200179 B1 KR100200179 B1 KR 100200179B1
Authority
KR
South Korea
Prior art keywords
thin film
substrate
surface wave
love
zno
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940000626A
Other languages
English (en)
Korean (ko)
Inventor
미찌오 가도따
나오끼 미조구찌
Original Assignee
무라따 야스따가
가부시키가이샤 무라타 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5216313A external-priority patent/JPH0774586A/ja
Priority claimed from JP29800093A external-priority patent/JP3395298B2/ja
Application filed by 무라따 야스따가, 가부시키가이샤 무라타 세이사쿠쇼 filed Critical 무라따 야스따가
Application granted granted Critical
Publication of KR100200179B1 publication Critical patent/KR100200179B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
KR1019940000626A 1993-01-14 1994-01-14 표면파 장치 Expired - Fee Related KR100200179B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP1993-4815 1993-01-14
JP481593 1993-01-14
JP1993-216313 1993-08-31
JP5216313A JPH0774586A (ja) 1993-08-31 1993-08-31 表面波装置
JP29800093A JP3395298B2 (ja) 1993-11-29 1993-11-29 表面波装置
JP1993-298000 1993-11-29

Publications (1)

Publication Number Publication Date
KR100200179B1 true KR100200179B1 (ko) 1999-06-15

Family

ID=27276468

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940000626A Expired - Fee Related KR100200179B1 (ko) 1993-01-14 1994-01-14 표면파 장치

Country Status (4)

Country Link
US (1) US5432392A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100200179B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE4400980C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW241397B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100820120B1 (ko) 2006-12-29 2008-04-07 한국표준과학연구원 Ｌｏｖｅ 파를 이용한 유체 점도 측정용 표면 탄성파 센서

Families Citing this family (31)

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TW256966B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1994-03-04 1995-09-11 Murata Manufacturing Co
JPH07283682A (ja) 1994-04-13 1995-10-27 Murata Mfg Co Ltd 弾性表面波共振子フィルタ
JP3173300B2 (ja) * 1994-10-19 2001-06-04 株式会社村田製作所 ラブ波デバイス
JP3407459B2 (ja) * 1995-03-23 2003-05-19 株式会社村田製作所 表面波共振子フィルタ
CN1078334C (zh) * 1995-09-13 2002-01-23 布罗斯尔汽车零件两合公司 用于控制一可移动目标的方法和装置
US6283216B1 (en) 1996-03-11 2001-09-04 Schlumberger Technology Corporation Apparatus and method for establishing branch wells from a parent well
WO1998018204A1 (fr) * 1996-10-18 1998-04-30 Tdk Corporation Dispositif de traitement des ondes acoustiques de surface
JP3196678B2 (ja) * 1997-02-07 2001-08-06 株式会社村田製作所 表面波装置
JPH11136083A (ja) * 1997-08-27 1999-05-21 Murata Mfg Co Ltd 表面波装置
GB2328815B (en) * 1997-08-27 1999-10-20 Murata Manufacturing Co Surface acoustic wave device having a langasite single crystal substrate
JP3353742B2 (ja) 1999-05-07 2002-12-03 株式会社村田製作所 表面波共振子、表面波装置、通信機装置
JP3568025B2 (ja) * 1999-05-14 2004-09-22 株式会社村田製作所 表面波装置及び通信機装置
US6972508B2 (en) * 2000-04-28 2005-12-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
US6892444B1 (en) * 2000-09-21 2005-05-17 Axsun Technologies, Inc. Optical system manufacturing and alignment system
JP3435638B2 (ja) 2000-10-27 2003-08-11 株式会社村田製作所 弾性表面波装置及びその製造方法
JP3918497B2 (ja) * 2000-11-02 2007-05-23 株式会社村田製作所 端面反射型表面波装置
EP1239588A2 (en) * 2001-03-04 2002-09-11 Kazuhiko Yamanouchi Surface acoustic wave substrate and surface acoustic wave functional element
US6717327B2 (en) * 2001-04-23 2004-04-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
AU2002308401B2 (en) * 2001-05-21 2005-08-04 Mnt Innovations Pty Ltd Surface acoustic wave sensor
AUPR511401A0 (en) * 2001-05-21 2001-06-14 Microtechnology Centre Management Limited Surface acoustic wave device
AUPR507601A0 (en) * 2001-05-21 2001-06-14 Microtechnology Centre Management Limited Surface acoustic wave sensor
JP3801083B2 (ja) * 2001-06-06 2006-07-26 株式会社村田製作所 弾性表面波装置
US20030042998A1 (en) * 2001-08-24 2003-03-06 Edmonson Peter J. Leaky surface acoustic wave resonators
FR2864618B1 (fr) * 2003-12-24 2006-03-03 Temex Sa Capteur de temperature ou de temperature et de pression interrogeable a distance
KR100821483B1 (ko) * 2004-01-19 2008-04-10 가부시키가이샤 무라타 세이사쿠쇼 탄성 경계파 장치
WO2005093949A1 (ja) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. 弾性境界波装置の製造方法及び弾性境界波装置
US7439648B2 (en) * 2004-08-27 2008-10-21 Kyocera Corporation Surface acoustic wave device and manufacturing method therefor, and communications equipment
WO2007145056A1 (ja) * 2006-06-16 2007-12-21 Murata Manufacturing Co., Ltd. 弾性表面波装置
WO2007145057A1 (ja) * 2006-06-16 2007-12-21 Murata Manufacturing Co., Ltd. 弾性表面波装置
JP6288760B2 (ja) * 2013-11-20 2018-03-07 日本電波工業株式会社 弾性表面波デバイス、共振子及び発振回路
FR3079667B1 (fr) * 2018-03-28 2020-03-27 Frec'n'sys Dispositif d'onde acoustique de surface sur substrat composite

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941602B2 (ja) * 1978-04-18 1984-10-08 松下電器産業株式会社 表面弾性波素子
US4243960A (en) * 1978-08-14 1981-01-06 The United States Of America As Represented By The Secretary Of The Navy Method and materials for tuning the center frequency of narrow-band surface-acoustic-wave (SAW) devices by means of dielectric overlays
JPS56116317A (en) * 1980-02-19 1981-09-12 Matsushita Electric Ind Co Ltd Material for elastic surface wave
US4544857A (en) * 1983-08-29 1985-10-01 Nec Corporation High electromechanical-coupling coefficient surface acoustic wave device
US4978879A (en) * 1988-07-27 1990-12-18 Fujitsu Limited Acoustic surface wave element
JP2885349B2 (ja) * 1989-12-26 1999-04-19 住友電気工業株式会社 表面弾性波素子
JP3225495B2 (ja) * 1992-02-21 2001-11-05 住友電気工業株式会社 表面弾性波素子及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100820120B1 (ko) 2006-12-29 2008-04-07 한국표준과학연구원 Ｌｏｖｅ 파를 이용한 유체 점도 측정용 표면 탄성파 센서

Also Published As

Publication number Publication date
US5432392A (en) 1995-07-11
DE4400980A1 (de) 1994-07-21
TW241397B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1995-02-21
DE4400980C2 (de) 2000-09-07

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