DE4400980C2 - Oberflächenwellenbauelement - Google Patents
OberflächenwellenbauelementInfo
- Publication number
- DE4400980C2 DE4400980C2 DE4400980A DE4400980A DE4400980C2 DE 4400980 C2 DE4400980 C2 DE 4400980C2 DE 4400980 A DE4400980 A DE 4400980A DE 4400980 A DE4400980 A DE 4400980A DE 4400980 C2 DE4400980 C2 DE 4400980C2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- film
- ratio
- zno
- surface wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 106
- 239000010408 film Substances 0.000 claims description 59
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 31
- 238000010897 surface acoustic wave method Methods 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000008878 coupling Effects 0.000 description 48
- 238000010168 coupling process Methods 0.000 description 48
- 238000005859 coupling reaction Methods 0.000 description 48
- 238000001465 metallisation Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- 229910003327 LiNbO3 Inorganic materials 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005662 electromechanics Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP481593 | 1993-01-14 | ||
| JP5216313A JPH0774586A (ja) | 1993-08-31 | 1993-08-31 | 表面波装置 |
| JP29800093A JP3395298B2 (ja) | 1993-11-29 | 1993-11-29 | 表面波装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE4400980A1 DE4400980A1 (de) | 1994-07-21 |
| DE4400980C2 true DE4400980C2 (de) | 2000-09-07 |
Family
ID=27276468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE4400980A Expired - Fee Related DE4400980C2 (de) | 1993-01-14 | 1994-01-14 | Oberflächenwellenbauelement |
Country Status (4)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6865786B2 (en) | 2000-10-27 | 2005-03-15 | Murata Manufacturing Co., Ltd. | Method for manufacturing a surface acoustic wave device using a shear horizontal type surface acoustic wave |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW256966B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1994-03-04 | 1995-09-11 | Murata Manufacturing Co | |
| JPH07283682A (ja) | 1994-04-13 | 1995-10-27 | Murata Mfg Co Ltd | 弾性表面波共振子フィルタ |
| JP3173300B2 (ja) * | 1994-10-19 | 2001-06-04 | 株式会社村田製作所 | ラブ波デバイス |
| JP3407459B2 (ja) * | 1995-03-23 | 2003-05-19 | 株式会社村田製作所 | 表面波共振子フィルタ |
| US6088641A (en) * | 1995-09-13 | 2000-07-11 | Brose Fahrzeugteile Gmbh & Co. Kg | Method and device for controlling a movable object |
| US6283216B1 (en) | 1996-03-11 | 2001-09-04 | Schlumberger Technology Corporation | Apparatus and method for establishing branch wells from a parent well |
| US6121713A (en) * | 1996-10-18 | 2000-09-19 | Tdk Corporation | Surface acoustic wave device |
| JP3196678B2 (ja) * | 1997-02-07 | 2001-08-06 | 株式会社村田製作所 | 表面波装置 |
| GB2328815B (en) * | 1997-08-27 | 1999-10-20 | Murata Manufacturing Co | Surface acoustic wave device having a langasite single crystal substrate |
| JPH11136083A (ja) * | 1997-08-27 | 1999-05-21 | Murata Mfg Co Ltd | 表面波装置 |
| JP3353742B2 (ja) | 1999-05-07 | 2002-12-03 | 株式会社村田製作所 | 表面波共振子、表面波装置、通信機装置 |
| JP3568025B2 (ja) * | 1999-05-14 | 2004-09-22 | 株式会社村田製作所 | 表面波装置及び通信機装置 |
| US6972508B2 (en) * | 2000-04-28 | 2005-12-06 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
| US6892444B1 (en) * | 2000-09-21 | 2005-05-17 | Axsun Technologies, Inc. | Optical system manufacturing and alignment system |
| JP3918497B2 (ja) * | 2000-11-02 | 2007-05-23 | 株式会社村田製作所 | 端面反射型表面波装置 |
| EP1239588A2 (en) * | 2001-03-04 | 2002-09-11 | Kazuhiko Yamanouchi | Surface acoustic wave substrate and surface acoustic wave functional element |
| US6717327B2 (en) * | 2001-04-23 | 2004-04-06 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
| AUPR511401A0 (en) * | 2001-05-21 | 2001-06-14 | Microtechnology Centre Management Limited | Surface acoustic wave device |
| AUPR507601A0 (en) * | 2001-05-21 | 2001-06-14 | Microtechnology Centre Management Limited | Surface acoustic wave sensor |
| AU2002308401B2 (en) * | 2001-05-21 | 2005-08-04 | Mnt Innovations Pty Ltd | Surface acoustic wave sensor |
| JP3801083B2 (ja) * | 2001-06-06 | 2006-07-26 | 株式会社村田製作所 | 弾性表面波装置 |
| US20030042998A1 (en) * | 2001-08-24 | 2003-03-06 | Edmonson Peter J. | Leaky surface acoustic wave resonators |
| FR2864618B1 (fr) * | 2003-12-24 | 2006-03-03 | Temex Sa | Capteur de temperature ou de temperature et de pression interrogeable a distance |
| EP1635459B1 (en) * | 2004-01-19 | 2017-10-25 | Murata Manufacturing Co., Ltd. | Acoustic boundary wave device |
| WO2005093949A1 (ja) * | 2004-03-29 | 2005-10-06 | Murata Manufacturing Co., Ltd. | 弾性境界波装置の製造方法及び弾性境界波装置 |
| US7439648B2 (en) * | 2004-08-27 | 2008-10-21 | Kyocera Corporation | Surface acoustic wave device and manufacturing method therefor, and communications equipment |
| JP5137828B2 (ja) * | 2006-06-16 | 2013-02-06 | 株式会社村田製作所 | 弾性表面波装置 |
| WO2007145056A1 (ja) * | 2006-06-16 | 2007-12-21 | Murata Manufacturing Co., Ltd. | 弾性表面波装置 |
| KR100820120B1 (ko) | 2006-12-29 | 2008-04-07 | 한국표준과학연구원 | Ｌｏｖｅ 파를 이용한 유체 점도 측정용 표면 탄성파 센서 |
| JP6288760B2 (ja) * | 2013-11-20 | 2018-03-07 | 日本電波工業株式会社 | 弾性表面波デバイス、共振子及び発振回路 |
| FR3079667B1 (fr) * | 2018-03-28 | 2020-03-27 | Frec'n'sys | Dispositif d'onde acoustique de surface sur substrat composite |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0435189A2 (en) * | 1989-12-26 | 1991-07-03 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941602B2 (ja) * | 1978-04-18 | 1984-10-08 | 松下電器産業株式会社 | 表面弾性波素子 |
| US4243960A (en) * | 1978-08-14 | 1981-01-06 | The United States Of America As Represented By The Secretary Of The Navy | Method and materials for tuning the center frequency of narrow-band surface-acoustic-wave (SAW) devices by means of dielectric overlays |
| JPS56116317A (en) * | 1980-02-19 | 1981-09-12 | Matsushita Electric Ind Co Ltd | Material for elastic surface wave |
| US4544857A (en) * | 1983-08-29 | 1985-10-01 | Nec Corporation | High electromechanical-coupling coefficient surface acoustic wave device |
| US4978879A (en) * | 1988-07-27 | 1990-12-18 | Fujitsu Limited | Acoustic surface wave element |
| JP3225495B2 (ja) * | 1992-02-21 | 2001-11-05 | 住友電気工業株式会社 | 表面弾性波素子及びその製造方法 |
-
1994
- 1994-01-12 TW TW083100189A patent/TW241397B/zh not_active IP Right Cessation
- 1994-01-13 US US08/180,604 patent/US5432392A/en not_active Expired - Lifetime
- 1994-01-14 KR KR1019940000626A patent/KR100200179B1/ko not_active Expired - Fee Related
- 1994-01-14 DE DE4400980A patent/DE4400980C2/de not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0435189A2 (en) * | 1989-12-26 | 1991-07-03 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6865786B2 (en) | 2000-10-27 | 2005-03-15 | Murata Manufacturing Co., Ltd. | Method for manufacturing a surface acoustic wave device using a shear horizontal type surface acoustic wave |
Also Published As
| Publication number | Publication date |
|---|---|
| TW241397B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1995-02-21 |
| KR100200179B1 (ko) | 1999-06-15 |
| US5432392A (en) | 1995-07-11 |
| DE4400980A1 (de) | 1994-07-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |
Effective date: 20120801 |