KR0157662B1 - 반도체 디바이스 및 그 제조방법 - Google Patents

반도체 디바이스 및 그 제조방법

Info

Publication number
KR0157662B1
KR0157662B1 KR1019940010400A KR19940010400A KR0157662B1 KR 0157662 B1 KR0157662 B1 KR 0157662B1 KR 1019940010400 A KR1019940010400 A KR 1019940010400A KR 19940010400 A KR19940010400 A KR 19940010400A KR 0157662 B1 KR0157662 B1 KR 0157662B1
Authority
KR
South Korea
Prior art keywords
barrier layer
ultrathin
semiconductor device
region
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019940010400A
Other languages
English (en)
Korean (ko)
Other versions
KR940027148A (ko
Inventor
준이치 니시자와
Original Assignee
오가타 겐지
자이단호진 한도타이겐큐신코카이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오가타 겐지, 자이단호진 한도타이겐큐신코카이 filed Critical 오가타 겐지
Publication of KR940027148A publication Critical patent/KR940027148A/ko
Application granted granted Critical
Publication of KR0157662B1 publication Critical patent/KR0157662B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01—Manufacture or treatment
    • H10D12/021—Manufacture or treatment of gated diodes, e.g. field-controlled diodes [FCD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/01—Manufacture or treatment
    • H10D48/021—Manufacture or treatment of two-electrode devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/812—Charge-trapping diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs

Landscapes

  • Semiconductor Memories (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Non-Volatile Memory (AREA)
KR1019940010400A 1993-05-12 1994-05-12 반도체 디바이스 및 그 제조방법 Expired - Fee Related KR0157662B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP93-147128 1993-05-12
JP14712893 1993-05-12

Publications (2)

Publication Number Publication Date
KR940027148A KR940027148A (ko) 1994-12-10
KR0157662B1 true KR0157662B1 (ko) 1998-10-15

Family

ID=15423194

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940010400A Expired - Fee Related KR0157662B1 (ko) 1993-05-12 1994-05-12 반도체 디바이스 및 그 제조방법

Country Status (5)

Country Link
US (1) US5485017A (enExample)
EP (1) EP0631326B1 (enExample)
KR (1) KR0157662B1 (enExample)
DE (1) DE69416619T2 (enExample)
TW (1) TW241381B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0744777B1 (en) * 1995-05-25 2000-08-30 Matsushita Electric Industrial Co., Ltd. Nonlinear element and bistable memory device
JP3397516B2 (ja) * 1995-06-08 2003-04-14 三菱電機株式会社 半導体記憶装置及び半導体集積回路装置
EP0843360A1 (en) * 1996-11-15 1998-05-20 Hitachi Europe Limited Memory device
JP3853905B2 (ja) * 1997-03-18 2006-12-06 株式会社東芝 量子効果装置とｂｌトンネル素子を用いた装置
US6421682B1 (en) 1999-07-26 2002-07-16 Microsoft Corporation Catalog management system architecture having data table objects and logic table objects
EP2346071B1 (en) * 2008-10-29 2017-04-05 Fujitsu Limited Compound semiconductor device and method for manufacturing the same
US10103226B2 (en) * 2012-04-30 2018-10-16 International Business Machines Corporation Method of fabricating tunnel transistors with abrupt junctions
US9508854B2 (en) 2013-12-06 2016-11-29 Ecole Polytechnique Federale De Lausanne (Epfl) Single field effect transistor capacitor-less memory device and method of operating the same
DE102016015475B3 (de) * 2016-12-28 2018-01-11 3-5 Power Electronics GmbH IGBT Halbleiterstruktur
KR20180129457A (ko) * 2017-05-26 2018-12-05 에스케이하이닉스 주식회사 반도체 장치 및 그 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3972059A (en) * 1973-12-28 1976-07-27 International Business Machines Corporation Dielectric diode, fabrication thereof, and charge store memory therewith
JPS5591166A (en) * 1978-12-28 1980-07-10 Nippon Gakki Seizo Kk Semiconductor memory
JPS56124273A (en) * 1980-03-04 1981-09-29 Semiconductor Res Found Semiconductor device
JPS5940576A (ja) * 1982-08-30 1984-03-06 Junichi Nishizawa フオトサイリスタ
JPS60254777A (ja) * 1984-05-31 1985-12-16 Fujitsu Ltd 半導体装置
JPS61158184A (ja) * 1984-12-29 1986-07-17 Fujitsu Ltd 半導体装置
US5216262A (en) * 1992-03-02 1993-06-01 Raphael Tsu Quantum well structures useful for semiconductor devices

Also Published As

Publication number Publication date
KR940027148A (ko) 1994-12-10
DE69416619D1 (de) 1999-04-01
EP0631326B1 (en) 1999-02-24
DE69416619T2 (de) 1999-09-30
US5485017A (en) 1996-01-16
TW241381B (enExample) 1995-02-21
EP0631326A2 (en) 1994-12-28
EP0631326A3 (en) 1995-05-31

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