KR0146273B1 - 프로브카드의 클리닝장치 및 클리닝장치를 구비한 프로브장치 - Google Patents

프로브카드의 클리닝장치 및 클리닝장치를 구비한 프로브장치

Info

Publication number
KR0146273B1
KR0146273B1 KR1019940033554A KR19940033554A KR0146273B1 KR 0146273 B1 KR0146273 B1 KR 0146273B1 KR 1019940033554 A KR1019940033554 A KR 1019940033554A KR 19940033554 A KR19940033554 A KR 19940033554A KR 0146273 B1 KR0146273 B1 KR 0146273B1
Authority
KR
South Korea
Prior art keywords
probe
cleaning
brush
probe card
under test
Prior art date
Application number
KR1019940033554A
Other languages
English (en)
Korean (ko)
Other versions
KR950021325A (ko
Inventor
사또루 야마시다
구니오 사노
Original Assignee
이노우에 아끼라
도꾜 일렉트론 가부시끼가이샤
이노우에 쥰이찌
도꾜 일렉트론 야마나시 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이노우에 아끼라, 도꾜 일렉트론 가부시끼가이샤, 이노우에 쥰이찌, 도꾜 일렉트론 야마나시 가부시끼가이샤 filed Critical 이노우에 아끼라
Publication of KR950021325A publication Critical patent/KR950021325A/ko
Application granted granted Critical
Publication of KR0146273B1 publication Critical patent/KR0146273B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Measuring Leads Or Probes (AREA)
KR1019940033554A 1993-12-10 1994-12-09 프로브카드의 클리닝장치 및 클리닝장치를 구비한 프로브장치 KR0146273B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05341383A JP3094052B2 (ja) 1993-12-10 1993-12-10 クリーニング装置及びこの装置を用いたプローブ装置
JP93-341383 1993-12-10

Publications (2)

Publication Number Publication Date
KR950021325A KR950021325A (ko) 1995-07-26
KR0146273B1 true KR0146273B1 (ko) 1998-11-02

Family

ID=18345640

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940033554A KR0146273B1 (ko) 1993-12-10 1994-12-09 프로브카드의 클리닝장치 및 클리닝장치를 구비한 프로브장치

Country Status (3)

Country Link
JP (1) JP3094052B2 (ja)
KR (1) KR0146273B1 (ja)
TW (1) TW288178B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101115988B1 (ko) * 2011-11-07 2012-02-13 전형민 칩 패드의 먼지제거시스템

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118290A (en) * 1997-06-07 2000-09-12 Tokyo Electron Limited Prober and method for cleaning probes provided therein
KR100850692B1 (ko) * 2008-01-11 2008-08-07 뉴센트 주식회사 프로브카드의 세척 및 검사 시스템
JP5094554B2 (ja) * 2008-05-23 2012-12-12 株式会社東京精密 搬送パッドのクリーニング機構
JP5594535B2 (ja) * 2008-07-18 2014-09-24 日本電産リード株式会社 ピン先端部のクリーニング機構を有する基板検査装置
JP5615572B2 (ja) * 2009-12-22 2014-10-29 株式会社日本マイクロニクス プローブ清掃ユニット及びそれを備えたパネル検査装置並びにプローブ清掃方法
TWI572863B (zh) * 2014-12-23 2017-03-01 Imt有限公司 包含雷射清理功能的晶圓測試機
JP7129261B2 (ja) * 2018-07-27 2022-09-01 キオクシア株式会社 試験装置
CN111318070B (zh) * 2018-12-13 2022-10-04 夏泰鑫半导体(青岛)有限公司 过滤装置及过滤设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101115988B1 (ko) * 2011-11-07 2012-02-13 전형민 칩 패드의 먼지제거시스템

Also Published As

Publication number Publication date
JP3094052B2 (ja) 2000-10-03
KR950021325A (ko) 1995-07-26
TW288178B (ja) 1996-10-11
JPH07161784A (ja) 1995-06-23

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