JPWO2025033509A5 - - Google Patents

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Publication number
JPWO2025033509A5
JPWO2025033509A5 JP2024573596A JP2024573596A JPWO2025033509A5 JP WO2025033509 A5 JPWO2025033509 A5 JP WO2025033509A5 JP 2024573596 A JP2024573596 A JP 2024573596A JP 2024573596 A JP2024573596 A JP 2024573596A JP WO2025033509 A5 JPWO2025033509 A5 JP WO2025033509A5
Authority
JP
Japan
Prior art keywords
deposition
substrate
opening
deposition mask
opening width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024573596A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2025033509A1 (https=
JP7708340B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/028531 external-priority patent/WO2025033509A1/ja
Publication of JPWO2025033509A1 publication Critical patent/JPWO2025033509A1/ja
Priority to JP2025112685A priority Critical patent/JP2025129319A/ja
Application granted granted Critical
Publication of JP7708340B2 publication Critical patent/JP7708340B2/ja
Publication of JPWO2025033509A5 publication Critical patent/JPWO2025033509A5/ja
Priority to JP2025179712A priority patent/JP2026012861A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024573596A 2023-08-10 2024-08-08 蒸着マスク及び、電子デバイスの製造方法 Active JP7708340B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2025112685A JP2025129319A (ja) 2023-08-10 2025-07-03 蒸着マスク及び、電子デバイスの製造方法
JP2025179712A JP2026012861A (ja) 2023-08-10 2025-10-24 蒸着マスク及び、電子デバイスの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023130555 2023-08-10
JP2023130555 2023-08-10
PCT/JP2024/028531 WO2025033509A1 (ja) 2023-08-10 2024-08-08 蒸着マスク及び、電子デバイスの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025112685A Division JP2025129319A (ja) 2023-08-10 2025-07-03 蒸着マスク及び、電子デバイスの製造方法

Publications (3)

Publication Number Publication Date
JPWO2025033509A1 JPWO2025033509A1 (https=) 2025-02-13
JP7708340B2 JP7708340B2 (ja) 2025-07-15
JPWO2025033509A5 true JPWO2025033509A5 (https=) 2025-07-15

Family

ID=94534448

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2024573596A Active JP7708340B2 (ja) 2023-08-10 2024-08-08 蒸着マスク及び、電子デバイスの製造方法
JP2025112685A Pending JP2025129319A (ja) 2023-08-10 2025-07-03 蒸着マスク及び、電子デバイスの製造方法
JP2025179712A Pending JP2026012861A (ja) 2023-08-10 2025-10-24 蒸着マスク及び、電子デバイスの製造方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2025112685A Pending JP2025129319A (ja) 2023-08-10 2025-07-03 蒸着マスク及び、電子デバイスの製造方法
JP2025179712A Pending JP2026012861A (ja) 2023-08-10 2025-10-24 蒸着マスク及び、電子デバイスの製造方法

Country Status (4)

Country Link
JP (3) JP7708340B2 (https=)
KR (1) KR20250112824A (https=)
CN (1) CN121263548A (https=)
WO (1) WO2025033509A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121263548A (zh) * 2023-08-10 2026-01-02 凸版控股株式会社 蒸镀掩模以及电子器件的制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008189990A (ja) * 2007-02-05 2008-08-21 Seiko Epson Corp 蒸着用マスクおよび蒸着用マスクの製造方法
US9142779B2 (en) * 2013-08-06 2015-09-22 University Of Rochester Patterning of OLED materials
CN108735915B (zh) * 2017-04-14 2021-02-09 上海视涯技术有限公司 用于oled蒸镀的荫罩及其制作方法、oled面板的制作方法
JP7432133B2 (ja) * 2019-03-25 2024-02-16 大日本印刷株式会社 マスク
JP2022184708A (ja) * 2021-05-31 2022-12-13 キヤノン株式会社 蒸着マスク、及び有機電子デバイスの製造方法
US20250122606A1 (en) * 2022-01-31 2025-04-17 Dai Nippon Printing Co., Ltd. Vapor deposition mask, framed vapor deposition mask, method of manufacturing vapor deposition mask, method of manufacturing organic device, and method of manufacturing framed vapor deposition mask
CN121263548A (zh) * 2023-08-10 2026-01-02 凸版控股株式会社 蒸镀掩模以及电子器件的制造方法

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