JP2022184708A5 - - Google Patents
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- Publication number
- JP2022184708A5 JP2022184708A5 JP2022015103A JP2022015103A JP2022184708A5 JP 2022184708 A5 JP2022184708 A5 JP 2022184708A5 JP 2022015103 A JP2022015103 A JP 2022015103A JP 2022015103 A JP2022015103 A JP 2022015103A JP 2022184708 A5 JP2022184708 A5 JP 2022184708A5
- Authority
- JP
- Japan
- Prior art keywords
- deposition mask
- mask according
- deposition
- opening
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 32
- 239000000463 material Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/015362 WO2022254925A1 (ja) | 2021-05-31 | 2022-03-29 | 蒸着マスク、及び有機電子デバイスの製造方法 |
| US18/515,813 US20240084434A1 (en) | 2021-05-31 | 2023-11-21 | Vapor deposition mask and method for producing organic electronic device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021091159 | 2021-05-31 | ||
| JP2021091159 | 2021-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022184708A JP2022184708A (ja) | 2022-12-13 |
| JP2022184708A5 true JP2022184708A5 (https=) | 2025-02-12 |
Family
ID=84437918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022015103A Pending JP2022184708A (ja) | 2021-05-31 | 2022-02-02 | 蒸着マスク、及び有機電子デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2022184708A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN121263548A (zh) | 2023-08-10 | 2026-01-02 | 凸版控股株式会社 | 蒸镀掩模以及电子器件的制造方法 |
| KR20250078513A (ko) | 2023-08-10 | 2025-06-02 | 도판 홀딩스 가부시키가이샤 | 증착 마스크, 및 전자 디바이스의 제조 방법 |
| KR20250111176A (ko) * | 2023-08-10 | 2025-07-22 | 도판 홀딩스 가부시키가이샤 | 증착 마스크, 및 전자 디바이스의 제조 방법 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004362908A (ja) * | 2003-06-04 | 2004-12-24 | Hitachi Metals Ltd | メタルマスク及びメタルマスクの製造方法 |
| JP2008189990A (ja) * | 2007-02-05 | 2008-08-21 | Seiko Epson Corp | 蒸着用マスクおよび蒸着用マスクの製造方法 |
| US10927443B2 (en) * | 2016-03-29 | 2021-02-23 | Hon Hai Precision Industry Co., Ltd. | Vapor deposition mask, method for manufacturing vapor deposition mask, vapor deposition method, and method for manufacturing organic el display device |
| KR20220116074A (ko) * | 2017-01-17 | 2022-08-19 | 다이니폰 인사츠 가부시키가이샤 | 증착 마스크 및 증착 마스크의 제조 방법 |
-
2022
- 2022-02-02 JP JP2022015103A patent/JP2022184708A/ja active Pending
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