JPWO2025017981A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2025017981A5
JPWO2025017981A5 JP2024554238A JP2024554238A JPWO2025017981A5 JP WO2025017981 A5 JPWO2025017981 A5 JP WO2025017981A5 JP 2024554238 A JP2024554238 A JP 2024554238A JP 2024554238 A JP2024554238 A JP 2024554238A JP WO2025017981 A5 JPWO2025017981 A5 JP WO2025017981A5
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing
film
compound
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024554238A
Other languages
English (en)
Japanese (ja)
Other versions
JP7659708B1 (ja
JPWO2025017981A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/014280 external-priority patent/WO2025017981A1/ja
Publication of JPWO2025017981A1 publication Critical patent/JPWO2025017981A1/ja
Application granted granted Critical
Publication of JP7659708B1 publication Critical patent/JP7659708B1/ja
Publication of JPWO2025017981A5 publication Critical patent/JPWO2025017981A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2024554238A 2023-07-14 2024-04-08 半導体素子の製造方法及び半導体素子 Active JP7659708B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023115732 2023-07-14
JP2023115732 2023-07-14
PCT/JP2024/014280 WO2025017981A1 (ja) 2023-07-14 2024-04-08 半導体素子の製造方法及び半導体素子

Publications (3)

Publication Number Publication Date
JPWO2025017981A1 JPWO2025017981A1 (https=) 2025-01-23
JP7659708B1 JP7659708B1 (ja) 2025-04-09
JPWO2025017981A5 true JPWO2025017981A5 (https=) 2025-06-24

Family

ID=94281866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024554238A Active JP7659708B1 (ja) 2023-07-14 2024-04-08 半導体素子の製造方法及び半導体素子

Country Status (7)

Country Link
US (1) US20250081500A1 (https=)
EP (1) EP4521878A4 (https=)
JP (1) JP7659708B1 (https=)
KR (2) KR102936129B1 (https=)
CN (1) CN119654979A (https=)
TW (1) TWI910617B (https=)
WO (1) WO2025017981A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120711792B (zh) * 2025-08-12 2025-12-16 合肥晶合集成电路股份有限公司 半导体器件及其制造方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100390523B1 (ko) * 2001-01-20 2003-07-04 주승기 실리콘 박막 결정화 방법
KR100611744B1 (ko) 2003-11-22 2006-08-10 삼성에스디아이 주식회사 금속 유도 측면 결정화 방법을 이용한 박막 트랜지스터 및그의 제조 방법
KR100623228B1 (ko) * 2003-11-27 2006-09-18 삼성에스디아이 주식회사 박막트랜지스터, 상기 박막트랜지스터를 구비하는유기전계발광표시장치 및 상기 박막트랜지스터의 제조방법
JP2007251030A (ja) * 2006-03-17 2007-09-27 Renesas Technology Corp 半導体装置の製造方法および半導体装置
TWI392092B (zh) * 2008-11-10 2013-04-01 國立中山大學 具π型半導體導通層之半導體裝置及其製造方法
CN102709184B (zh) * 2011-05-13 2016-08-17 京东方科技集团股份有限公司 含有多晶硅有源层的薄膜晶体管、其制造方法及阵列基板
JP2014175348A (ja) 2013-03-06 2014-09-22 Toshiba Corp 不揮発性半導体記憶装置
JP2014179465A (ja) * 2013-03-14 2014-09-25 Toshiba Corp 不揮発性半導体記憶装置およびその製造方法
CN105244414B (zh) * 2015-10-20 2017-04-12 华中科技大学 一种二硫化钼/ 硅异质结太阳能电池及其制备方法
US9780103B2 (en) * 2015-11-16 2017-10-03 Micron Technology, Inc. Methods of forming integrated structures
JP2017174860A (ja) * 2016-03-18 2017-09-28 東芝メモリ株式会社 半導体記憶装置及びその製造方法
CN108022934A (zh) * 2016-11-01 2018-05-11 沈阳硅基科技有限公司 一种薄膜的制备方法
KR102403102B1 (ko) * 2016-12-15 2022-05-26 에이에스엠 아이피 홀딩 비.브이. 반도체 처리 장치
JP2018157069A (ja) * 2017-03-17 2018-10-04 東芝メモリ株式会社 半導体記憶装置
JP7013295B2 (ja) 2018-03-20 2022-01-31 キオクシア株式会社 半導体記憶装置
JP7371507B2 (ja) * 2020-01-22 2023-10-31 富士電機株式会社 炭化珪素半導体装置の製造方法
FR3106932B1 (fr) * 2020-02-04 2023-10-27 Commissariat Energie Atomique Procede de fabrication d’un substrat structure
CN112786614B (zh) 2021-03-22 2022-04-29 长江存储科技有限责任公司 制备三维存储器的方法
CN115548140A (zh) * 2022-10-20 2022-12-30 中建材浚鑫科技有限公司 一种金属化异质结电池及其制备方法

Similar Documents

Publication Publication Date Title
KR100656495B1 (ko) 박막트랜지스터 및 그 제조 방법
TW201119043A (en) Method of fabricating polysilicon layer, thin film transistor, organic light emitting diode display device including the same, and method of fabricating the same
JPH1187243A5 (https=)
KR100666564B1 (ko) 박막트랜지스터의 제조 방법
JPH10242476A5 (https=)
JPWO2025017981A5 (https=)
RU2009123511A (ru) Стальной лист, имеющий высокую интеграцию плоскостей {222}, и способ его производства
JP2010206200A (ja) 有機電界発光表示装置及びその製造方法
JP2003031806A5 (https=)
CN102214556B (zh) 使非晶硅层结晶的方法、薄膜晶体管及其制造方法
JP2010206201A (ja) 多結晶シリコン層の製造方法
TWI265200B (en) Retarding agglomeration of Ni monosilicide using Ni alloys
CN1976006A (zh) 形成半导体结构的方法
WO2020175971A1 (ko) 고순도 압전 박막 및 이 박막을 이용하는 소자를 제조하는 방법
JP2010502025A5 (https=)
JP5593250B2 (ja) 光電変換装置
CN100536075C (zh) 制造薄膜晶体管的方法
JP7659708B1 (ja) 半導体素子の製造方法及び半導体素子
JP2008500728A5 (https=)
JP2003168652A5 (https=)
JP2006128654A5 (https=)
JP2001036078A5 (https=)
JP2001319880A5 (https=)
JP4009719B2 (ja) ニッケルシリサイド膜の作製方法
JP2002184695A5 (https=)