JPWO2024038533A5 - - Google Patents

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Publication number
JPWO2024038533A5
JPWO2024038533A5 JP2024541339A JP2024541339A JPWO2024038533A5 JP WO2024038533 A5 JPWO2024038533 A5 JP WO2024038533A5 JP 2024541339 A JP2024541339 A JP 2024541339A JP 2024541339 A JP2024541339 A JP 2024541339A JP WO2024038533 A5 JPWO2024038533 A5 JP WO2024038533A5
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JP
Japan
Prior art keywords
optical system
light source
light
illuminated
source unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024541339A
Other languages
English (en)
Japanese (ja)
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JPWO2024038533A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/031191 external-priority patent/WO2024038533A1/ja
Publication of JPWO2024038533A1 publication Critical patent/JPWO2024038533A1/ja
Publication of JPWO2024038533A5 publication Critical patent/JPWO2024038533A5/ja
Pending legal-status Critical Current

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JP2024541339A 2022-08-18 2022-08-18 Pending JPWO2024038533A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/031191 WO2024038533A1 (ja) 2022-08-18 2022-08-18 光源ユニット、照明ユニット、露光装置、及び露光方法

Publications (2)

Publication Number Publication Date
JPWO2024038533A1 JPWO2024038533A1 (https=) 2024-02-22
JPWO2024038533A5 true JPWO2024038533A5 (https=) 2026-04-24

Family

ID=89941575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024541339A Pending JPWO2024038533A1 (https=) 2022-08-18 2022-08-18

Country Status (5)

Country Link
JP (1) JPWO2024038533A1 (https=)
KR (1) KR20250022863A (https=)
CN (1) CN119585678A (https=)
TW (2) TWI876438B (https=)
WO (1) WO2024038533A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3950553B2 (ja) 1998-06-30 2007-08-01 キヤノン株式会社 照明光学系及びそれを有する露光装置
JP4678493B2 (ja) * 2005-05-23 2011-04-27 株式会社ニコン 光源ユニット、照明光学装置、露光装置、および露光方法
US20100283978A1 (en) * 2009-05-07 2010-11-11 Ultratech,Inc. LED-based UV illuminators and lithography systems using same
JP5687013B2 (ja) * 2010-09-14 2015-03-18 株式会社Ｓｃｒｅｅｎホールディングス 露光装置および光源装置
JP7025683B2 (ja) * 2017-06-08 2022-02-25 ウシオ電機株式会社 光源装置

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