JPWO2024089737A5 - - Google Patents
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- Publication number
- JPWO2024089737A5 JPWO2024089737A5 JP2024552529A JP2024552529A JPWO2024089737A5 JP WO2024089737 A5 JPWO2024089737 A5 JP WO2024089737A5 JP 2024552529 A JP2024552529 A JP 2024552529A JP 2024552529 A JP2024552529 A JP 2024552529A JP WO2024089737 A5 JPWO2024089737 A5 JP WO2024089737A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- elements
- optical element
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/039506 WO2024089737A1 (ja) | 2022-10-24 | 2022-10-24 | 合成光学素子、照明ユニット、露光装置、及び露光方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024089737A1 JPWO2024089737A1 (https=) | 2024-05-02 |
| JPWO2024089737A5 true JPWO2024089737A5 (https=) | 2025-07-04 |
Family
ID=90830265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024552529A Pending JPWO2024089737A1 (https=) | 2022-10-24 | 2022-10-24 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2024089737A1 (https=) |
| KR (1) | KR20250060918A (https=) |
| CN (1) | CN119948408A (https=) |
| TW (1) | TW202422239A (https=) |
| WO (1) | WO2024089737A1 (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006047384A (ja) * | 2004-07-30 | 2006-02-16 | Dainippon Printing Co Ltd | 露光装置 |
| JP4587170B2 (ja) | 2005-01-20 | 2010-11-24 | キヤノン株式会社 | 露光装置及びデバイスの製造方法 |
| CN100468093C (zh) * | 2006-05-25 | 2009-03-11 | 联华电子股份有限公司 | 分色滤光阵列的形成方法 |
| JP2021193429A (ja) * | 2020-06-08 | 2021-12-23 | 株式会社ブイ・テクノロジー | 露光用の光源装置、照明装置、露光装置、及び露光方法 |
-
2022
- 2022-10-24 WO PCT/JP2022/039506 patent/WO2024089737A1/ja not_active Ceased
- 2022-10-24 JP JP2024552529A patent/JPWO2024089737A1/ja active Pending
- 2022-10-24 KR KR1020257011364A patent/KR20250060918A/ko active Pending
- 2022-10-24 CN CN202280100526.XA patent/CN119948408A/zh active Pending
-
2023
- 2023-10-16 TW TW112139317A patent/TW202422239A/zh unknown
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