JPWO2024038538A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2024038538A5
JPWO2024038538A5 JP2024541344A JP2024541344A JPWO2024038538A5 JP WO2024038538 A5 JPWO2024038538 A5 JP WO2024038538A5 JP 2024541344 A JP2024541344 A JP 2024541344A JP 2024541344 A JP2024541344 A JP 2024541344A JP WO2024038538 A5 JPWO2024038538 A5 JP WO2024038538A5
Authority
JP
Japan
Prior art keywords
light source
unit according
source unit
light
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024541344A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024038538A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/031214 external-priority patent/WO2024038538A1/ja
Publication of JPWO2024038538A1 publication Critical patent/JPWO2024038538A1/ja
Publication of JPWO2024038538A5 publication Critical patent/JPWO2024038538A5/ja
Pending legal-status Critical Current

Links

JP2024541344A 2022-08-18 2022-08-18 Pending JPWO2024038538A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/031214 WO2024038538A1 (ja) 2022-08-18 2022-08-18 光源ユニット、照明ユニット、露光装置、及び露光方法

Publications (2)

Publication Number Publication Date
JPWO2024038538A1 JPWO2024038538A1 (https=) 2024-02-22
JPWO2024038538A5 true JPWO2024038538A5 (https=) 2025-06-09

Family

ID=89941582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024541344A Pending JPWO2024038538A1 (https=) 2022-08-18 2022-08-18

Country Status (4)

Country Link
JP (1) JPWO2024038538A1 (https=)
KR (1) KR20250036877A (https=)
CN (1) CN119678106A (https=)
WO (1) WO2024038538A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3950553B2 (ja) 1998-06-30 2007-08-01 キヤノン株式会社 照明光学系及びそれを有する露光装置
JP4678493B2 (ja) * 2005-05-23 2011-04-27 株式会社ニコン 光源ユニット、照明光学装置、露光装置、および露光方法
JP6654956B2 (ja) * 2016-04-01 2020-02-26 シーシーエス株式会社 光照射装置
JP2021117326A (ja) * 2020-01-24 2021-08-10 株式会社ブイ・テクノロジー レンズアレイ、ｌｅｄ照明ユニット、露光装置、及び露光方法
JP2021193429A (ja) * 2020-06-08 2021-12-23 株式会社ブイ・テクノロジー 露光用の光源装置、照明装置、露光装置、及び露光方法
JP2022090891A (ja) * 2020-12-08 2022-06-20 キヤノン株式会社 光源装置、冷却方法、及び物品の製造方法

Similar Documents

Publication Publication Date Title
TWI448833B (zh) An exposure device and a light source device
TWI392897B (zh) 微型光學透鏡、含此透鏡之發光二極體封裝結構、及微型光學透鏡角度的設計方法
KR960001905A (ko) 조명 광학 장치 및 그를 사용하는 주사형 노광 장치
USRE34634E (en) Light illumination device
JP2006018196A5 (https=)
JPWO2024038538A5 (https=)
US20080079921A1 (en) Substrate Exposure Apparatus and Illumination Apparatus
JP2006133635A (ja) 照明光学装置及び光学装置
TWI649632B (zh) Exposure device and exposure method
CN105209976B (zh) 曝光装置和照明单元
JP2006186302A (ja) 走査型露光用光源ユニット
JPWO2024038537A5 (https=)
WO2007029561A1 (ja) 露光装置
JPWO2024038533A5 (https=)
JPWO2024038535A5 (https=)
JP6700982B2 (ja) 光学系、露光装置および物品製造方法
KR20120047666A (ko) 노광 장치
TW202447350A (zh) 光源裝置以及曝光裝置
JPWO2023120172A5 (https=)
JPWO2024089737A5 (https=)
JP6641316B2 (ja) 照明装置
JP5229630B2 (ja) 光照射装置
HK1121536B (en) Substrate exposure apparatus and illumination apparatus
JPWO2024209913A5 (https=)
JP2019015974A (ja) 露光装置及び露光方法