JPWO2024209913A5 - - Google Patents

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Publication number
JPWO2024209913A5
JPWO2024209913A5 JP2025512473A JP2025512473A JPWO2024209913A5 JP WO2024209913 A5 JPWO2024209913 A5 JP WO2024209913A5 JP 2025512473 A JP2025512473 A JP 2025512473A JP 2025512473 A JP2025512473 A JP 2025512473A JP WO2024209913 A5 JPWO2024209913 A5 JP WO2024209913A5
Authority
JP
Japan
Prior art keywords
light source
heat sink
unit according
source elements
source unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025512473A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024209913A1 (https=
Publication date
Priority claimed from PCT/JP2023/014075 external-priority patent/WO2024209586A1/ja
Application filed filed Critical
Publication of JPWO2024209913A1 publication Critical patent/JPWO2024209913A1/ja
Publication of JPWO2024209913A5 publication Critical patent/JPWO2024209913A5/ja
Pending legal-status Critical Current

Links

JP2025512473A 2023-04-05 2024-03-18 Pending JPWO2024209913A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2023/014075 WO2024209586A1 (ja) 2023-04-05 2023-04-05 光源ユニット、照明ユニット、露光装置、及び露光方法
PCT/JP2024/010439 WO2024209913A1 (ja) 2023-04-05 2024-03-18 光源ユニット、照明ユニット、露光装置、及び露光方法

Publications (2)

Publication Number Publication Date
JPWO2024209913A1 JPWO2024209913A1 (https=) 2024-10-10
JPWO2024209913A5 true JPWO2024209913A5 (https=) 2026-01-14

Family

ID=92971823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025512473A Pending JPWO2024209913A1 (https=) 2023-04-05 2024-03-18

Country Status (4)

Country Link
JP (1) JPWO2024209913A1 (https=)
KR (1) KR20250160467A (https=)
CN (1) CN120958387A (https=)
WO (2) WO2024209586A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006059828A1 (en) * 2004-09-10 2006-06-08 Seoul Semiconductor Co., Ltd. Light emitting diode package having multiple molding resins
JP4587170B2 (ja) 2005-01-20 2010-11-24 キヤノン株式会社 露光装置及びデバイスの製造方法
JP4678493B2 (ja) * 2005-05-23 2011-04-27 株式会社ニコン 光源ユニット、照明光学装置、露光装置、および露光方法
JP2010274256A (ja) * 2009-01-29 2010-12-09 Kyocera Corp 光照射ヘッド、露光デバイス、画像形成装置、液滴硬化装置、および液滴硬化方法
JP4914998B1 (ja) * 2010-11-17 2012-04-11 国立大学法人九州工業大学 Ｌｅｄモジュール装置及びその製造方法
WO2014031849A2 (en) * 2012-08-22 2014-02-27 Flex-N-Gate Advanced Product Development, Llc Micro-channel heat sink for led headlamp
JP6654956B2 (ja) * 2016-04-01 2020-02-26 シーシーエス株式会社 光照射装置
JP2021193429A (ja) * 2020-06-08 2021-12-23 株式会社ブイ・テクノロジー 露光用の光源装置、照明装置、露光装置、及び露光方法

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