JPWO2023233597A5 - - Google Patents

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Publication number
JPWO2023233597A5
JPWO2023233597A5 JP2024524084A JP2024524084A JPWO2023233597A5 JP WO2023233597 A5 JPWO2023233597 A5 JP WO2023233597A5 JP 2024524084 A JP2024524084 A JP 2024524084A JP 2024524084 A JP2024524084 A JP 2024524084A JP WO2023233597 A5 JPWO2023233597 A5 JP WO2023233597A5
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JP
Japan
Prior art keywords
shutter mechanism
substrate transport
substrate
controller
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024524084A
Other languages
English (en)
Japanese (ja)
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JPWO2023233597A1 (https=
JP7752243B2 (ja
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Publication date
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Priority claimed from PCT/JP2022/022370 external-priority patent/WO2023233597A1/ja
Publication of JPWO2023233597A1 publication Critical patent/JPWO2023233597A1/ja
Publication of JPWO2023233597A5 publication Critical patent/JPWO2023233597A5/ja
Application granted granted Critical
Publication of JP7752243B2 publication Critical patent/JP7752243B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024524084A 2022-06-01 2022-06-01 基板搬送装置 Active JP7752243B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/022370 WO2023233597A1 (ja) 2022-06-01 2022-06-01 基板搬送装置

Publications (3)

Publication Number Publication Date
JPWO2023233597A1 JPWO2023233597A1 (https=) 2023-12-07
JPWO2023233597A5 true JPWO2023233597A5 (https=) 2025-02-27
JP7752243B2 JP7752243B2 (ja) 2025-10-09

Family

ID=89026155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024524084A Active JP7752243B2 (ja) 2022-06-01 2022-06-01 基板搬送装置

Country Status (4)

Country Link
US (1) US20250316514A1 (https=)
JP (1) JP7752243B2 (https=)
DE (1) DE112022006917T5 (https=)
WO (1) WO2023233597A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211764A (ja) * 1994-01-20 1995-08-11 Nikon Corp レーザ応用装置
JPH11135594A (ja) * 1997-10-30 1999-05-21 Kokusai Electric Co Ltd カセット搬送方法および装置
JP2002110756A (ja) * 2000-09-22 2002-04-12 Applied Materials Inc オープンカセット用ロードポート
JP2007250563A (ja) * 2006-03-13 2007-09-27 Disco Abrasive Syst Ltd 研削装置
JP5825948B2 (ja) 2011-09-14 2015-12-02 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
JP6217567B2 (ja) 2014-09-08 2017-10-25 信越半導体株式会社 半導体製造装置、半導体基板の製造方法及び搬送ロボット
JP6822953B2 (ja) 2014-11-25 2021-01-27 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板キャリア及びパージチャンバの環境制御を伴う基板処理のシステム、装置、及び方法

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