JPWO2023176056A5 - - Google Patents
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- Publication number
- JPWO2023176056A5 JPWO2023176056A5 JP2024507509A JP2024507509A JPWO2023176056A5 JP WO2023176056 A5 JPWO2023176056 A5 JP WO2023176056A5 JP 2024507509 A JP2024507509 A JP 2024507509A JP 2024507509 A JP2024507509 A JP 2024507509A JP WO2023176056 A5 JPWO2023176056 A5 JP WO2023176056A5
- Authority
- JP
- Japan
- Prior art keywords
- hole
- inorganic film
- film
- semiconductor device
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 19
- 239000012212 insulator Substances 0.000 claims 4
- 150000004767 nitrides Chemical class 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022039205 | 2022-03-14 | ||
| PCT/JP2022/043800 WO2023176056A1 (ja) | 2022-03-14 | 2022-11-28 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023176056A1 JPWO2023176056A1 (https=) | 2023-09-21 |
| JPWO2023176056A5 true JPWO2023176056A5 (https=) | 2024-11-20 |
Family
ID=88023190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024507509A Pending JPWO2023176056A1 (https=) | 2022-03-14 | 2022-11-28 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250006580A1 (https=) |
| JP (1) | JPWO2023176056A1 (https=) |
| CN (1) | CN118872068A (https=) |
| DE (1) | DE112022006632T5 (https=) |
| WO (1) | WO2023176056A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026058856A1 (ja) * | 2024-09-13 | 2026-03-19 | ローム株式会社 | 半導体装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6960602B2 (ja) * | 2016-11-25 | 2021-11-05 | パナソニックＩｐマネジメント株式会社 | 炭化珪素半導体装置 |
| JP6846687B2 (ja) | 2017-09-12 | 2021-03-24 | パナソニックＩｐマネジメント株式会社 | 半導体装置およびその製造方法 |
| WO2021261102A1 (ja) * | 2020-06-26 | 2021-12-30 | ローム株式会社 | 電子部品 |
| JP2022039205A (ja) | 2020-08-28 | 2022-03-10 | 株式会社不二越 | 油圧機器配管ポート閉止用プラグ |
| CN116830262A (zh) * | 2021-03-18 | 2023-09-29 | 罗姆股份有限公司 | 宽带隙半导体装置 |
-
2022
- 2022-11-28 WO PCT/JP2022/043800 patent/WO2023176056A1/ja not_active Ceased
- 2022-11-28 JP JP2024507509A patent/JPWO2023176056A1/ja active Pending
- 2022-11-28 DE DE112022006632.6T patent/DE112022006632T5/de active Pending
- 2022-11-28 CN CN202280093475.2A patent/CN118872068A/zh active Pending
-
2024
- 2024-09-13 US US18/884,144 patent/US20250006580A1/en active Pending
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