JPWO2023089852A5 - - Google Patents
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- Publication number
- JPWO2023089852A5 JPWO2023089852A5 JP2023562114A JP2023562114A JPWO2023089852A5 JP WO2023089852 A5 JPWO2023089852 A5 JP WO2023089852A5 JP 2023562114 A JP2023562114 A JP 2023562114A JP 2023562114 A JP2023562114 A JP 2023562114A JP WO2023089852 A5 JPWO2023089852 A5 JP WO2023089852A5
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- vacuum
- measurement mode
- mass spectrometer
- collision measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000013256 coordination polymer Substances 0.000 description 4
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021186854 | 2021-11-17 | ||
| JP2021186854 | 2021-11-17 | ||
| PCT/JP2022/022452 WO2023089852A1 (ja) | 2021-11-17 | 2022-06-02 | 誘導結合プラズマ質量分析装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023089852A1 JPWO2023089852A1 (https=) | 2023-05-25 |
| JPWO2023089852A5 true JPWO2023089852A5 (https=) | 2024-03-25 |
| JP7540607B2 JP7540607B2 (ja) | 2024-08-27 |
Family
ID=86396576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023562114A Active JP7540607B2 (ja) | 2021-11-17 | 2022-06-02 | 誘導結合プラズマ質量分析装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250014884A1 (https=) |
| EP (1) | EP4435426A4 (https=) |
| JP (1) | JP7540607B2 (https=) |
| CN (1) | CN117981045A (https=) |
| WO (1) | WO2023089852A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240363324A1 (en) * | 2021-07-30 | 2024-10-31 | Shimadzu Corporation | Mass spectrometer |
| TW202311735A (zh) * | 2021-09-06 | 2023-03-16 | 日商富士軟片股份有限公司 | 藥液的檢查方法、藥液的製造方法、藥液的管理方法、半導體元件的製造方法、光阻組成物的檢查方法、光阻組成物的製造方法、光阻組成物的管理方法以及半導體製造裝置的污染狀態確認方法 |
| JP2024064706A (ja) * | 2022-10-28 | 2024-05-14 | 株式会社島津製作所 | 質量分析装置および分析条件の設定方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6140638A (en) * | 1997-06-04 | 2000-10-31 | Mds Inc. | Bandpass reactive collision cell |
| JP5967078B2 (ja) * | 2011-04-04 | 2016-08-10 | 株式会社島津製作所 | 質量分析装置及び質量分析方法 |
| US20180323050A1 (en) * | 2017-05-05 | 2018-11-08 | Thermo Finnigan Llc | Ion integrating and cooling cell for mass spectrometer |
| JP7095579B2 (ja) * | 2018-12-05 | 2022-07-05 | 株式会社島津製作所 | 質量分析装置 |
| WO2020152806A1 (ja) * | 2019-01-23 | 2020-07-30 | 株式会社島津製作所 | イオン分析装置 |
-
2022
- 2022-06-02 EP EP22895141.4A patent/EP4435426A4/en active Pending
- 2022-06-02 CN CN202280063189.1A patent/CN117981045A/zh active Pending
- 2022-06-02 US US18/710,286 patent/US20250014884A1/en active Pending
- 2022-06-02 WO PCT/JP2022/022452 patent/WO2023089852A1/ja not_active Ceased
- 2022-06-02 JP JP2023562114A patent/JP7540607B2/ja active Active
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