JPWO2023089852A1 - - Google Patents
Info
- Publication number
- JPWO2023089852A1 JPWO2023089852A1 JP2023562114A JP2023562114A JPWO2023089852A1 JP WO2023089852 A1 JPWO2023089852 A1 JP WO2023089852A1 JP 2023562114 A JP2023562114 A JP 2023562114A JP 2023562114 A JP2023562114 A JP 2023562114A JP WO2023089852 A1 JPWO2023089852 A1 JP WO2023089852A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
- H01J49/0481—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample with means for collisional cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
- H01J49/4215—Quadrupole mass filters
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021186854 | 2021-11-17 | ||
| JP2021186854 | 2021-11-17 | ||
| PCT/JP2022/022452 WO2023089852A1 (ja) | 2021-11-17 | 2022-06-02 | 誘導結合プラズマ質量分析装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023089852A1 true JPWO2023089852A1 (https=) | 2023-05-25 |
| JPWO2023089852A5 JPWO2023089852A5 (https=) | 2024-03-25 |
| JP7540607B2 JP7540607B2 (ja) | 2024-08-27 |
Family
ID=86396576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023562114A Active JP7540607B2 (ja) | 2021-11-17 | 2022-06-02 | 誘導結合プラズマ質量分析装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250014884A1 (https=) |
| EP (1) | EP4435426A4 (https=) |
| JP (1) | JP7540607B2 (https=) |
| CN (1) | CN117981045A (https=) |
| WO (1) | WO2023089852A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240363324A1 (en) * | 2021-07-30 | 2024-10-31 | Shimadzu Corporation | Mass spectrometer |
| TW202311735A (zh) * | 2021-09-06 | 2023-03-16 | 日商富士軟片股份有限公司 | 藥液的檢查方法、藥液的製造方法、藥液的管理方法、半導體元件的製造方法、光阻組成物的檢查方法、光阻組成物的製造方法、光阻組成物的管理方法以及半導體製造裝置的污染狀態確認方法 |
| JP2024064706A (ja) * | 2022-10-28 | 2024-05-14 | 株式会社島津製作所 | 質量分析装置および分析条件の設定方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6140638A (en) * | 1997-06-04 | 2000-10-31 | Mds Inc. | Bandpass reactive collision cell |
| JP5967078B2 (ja) * | 2011-04-04 | 2016-08-10 | 株式会社島津製作所 | 質量分析装置及び質量分析方法 |
| US20180323050A1 (en) * | 2017-05-05 | 2018-11-08 | Thermo Finnigan Llc | Ion integrating and cooling cell for mass spectrometer |
| JP7095579B2 (ja) * | 2018-12-05 | 2022-07-05 | 株式会社島津製作所 | 質量分析装置 |
| WO2020152806A1 (ja) * | 2019-01-23 | 2020-07-30 | 株式会社島津製作所 | イオン分析装置 |
-
2022
- 2022-06-02 EP EP22895141.4A patent/EP4435426A4/en active Pending
- 2022-06-02 CN CN202280063189.1A patent/CN117981045A/zh active Pending
- 2022-06-02 US US18/710,286 patent/US20250014884A1/en active Pending
- 2022-06-02 WO PCT/JP2022/022452 patent/WO2023089852A1/ja not_active Ceased
- 2022-06-02 JP JP2023562114A patent/JP7540607B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP7540607B2 (ja) | 2024-08-27 |
| CN117981045A (zh) | 2024-05-03 |
| EP4435426A1 (en) | 2024-09-25 |
| US20250014884A1 (en) | 2025-01-09 |
| WO2023089852A1 (ja) | 2023-05-25 |
| EP4435426A4 (en) | 2025-03-12 |
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