CN117981045A - 电感耦合等离子体质量分析装置 - Google Patents

电感耦合等离子体质量分析装置 Download PDF

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Publication number
CN117981045A
CN117981045A CN202280063189.1A CN202280063189A CN117981045A CN 117981045 A CN117981045 A CN 117981045A CN 202280063189 A CN202280063189 A CN 202280063189A CN 117981045 A CN117981045 A CN 117981045A
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CN
China
Prior art keywords
gas
ions
cell
vacuum chamber
collision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280063189.1A
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English (en)
Chinese (zh)
Inventor
松下知义
藤田辽
谷口纯一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN117981045A publication Critical patent/CN117981045A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • H01J49/0481—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample with means for collisional cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN202280063189.1A 2021-11-17 2022-06-02 电感耦合等离子体质量分析装置 Pending CN117981045A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021186854 2021-11-17
JP2021-186854 2021-11-17
PCT/JP2022/022452 WO2023089852A1 (ja) 2021-11-17 2022-06-02 誘導結合プラズマ質量分析装置

Publications (1)

Publication Number Publication Date
CN117981045A true CN117981045A (zh) 2024-05-03

Family

ID=86396576

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280063189.1A Pending CN117981045A (zh) 2021-11-17 2022-06-02 电感耦合等离子体质量分析装置

Country Status (5)

Country Link
US (1) US20250014884A1 (https=)
EP (1) EP4435426A4 (https=)
JP (1) JP7540607B2 (https=)
CN (1) CN117981045A (https=)
WO (1) WO2023089852A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240363324A1 (en) * 2021-07-30 2024-10-31 Shimadzu Corporation Mass spectrometer
TW202311735A (zh) * 2021-09-06 2023-03-16 日商富士軟片股份有限公司 藥液的檢查方法、藥液的製造方法、藥液的管理方法、半導體元件的製造方法、光阻組成物的檢查方法、光阻組成物的製造方法、光阻組成物的管理方法以及半導體製造裝置的污染狀態確認方法
JP2024064706A (ja) * 2022-10-28 2024-05-14 株式会社島津製作所 質量分析装置および分析条件の設定方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6140638A (en) * 1997-06-04 2000-10-31 Mds Inc. Bandpass reactive collision cell
JP5967078B2 (ja) * 2011-04-04 2016-08-10 株式会社島津製作所 質量分析装置及び質量分析方法
US20180323050A1 (en) * 2017-05-05 2018-11-08 Thermo Finnigan Llc Ion integrating and cooling cell for mass spectrometer
JP7095579B2 (ja) * 2018-12-05 2022-07-05 株式会社島津製作所 質量分析装置
WO2020152806A1 (ja) * 2019-01-23 2020-07-30 株式会社島津製作所 イオン分析装置

Also Published As

Publication number Publication date
JP7540607B2 (ja) 2024-08-27
EP4435426A1 (en) 2024-09-25
US20250014884A1 (en) 2025-01-09
JPWO2023089852A1 (https=) 2023-05-25
WO2023089852A1 (ja) 2023-05-25
EP4435426A4 (en) 2025-03-12

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