JP7540607B2 - 誘導結合プラズマ質量分析装置 - Google Patents

誘導結合プラズマ質量分析装置 Download PDF

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Publication number
JP7540607B2
JP7540607B2 JP2023562114A JP2023562114A JP7540607B2 JP 7540607 B2 JP7540607 B2 JP 7540607B2 JP 2023562114 A JP2023562114 A JP 2023562114A JP 2023562114 A JP2023562114 A JP 2023562114A JP 7540607 B2 JP7540607 B2 JP 7540607B2
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gas
ions
cell
collision
vacuum chamber
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JP2023562114A
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Japanese (ja)
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JPWO2023089852A5 (https=
JPWO2023089852A1 (https=
Inventor
知義 松下
遼 藤田
純一 谷口
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Shimadzu Corp
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Shimadzu Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • H01J49/0481—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample with means for collisional cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2023562114A 2021-11-17 2022-06-02 誘導結合プラズマ質量分析装置 Active JP7540607B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021186854 2021-11-17
JP2021186854 2021-11-17
PCT/JP2022/022452 WO2023089852A1 (ja) 2021-11-17 2022-06-02 誘導結合プラズマ質量分析装置

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JPWO2023089852A1 JPWO2023089852A1 (https=) 2023-05-25
JPWO2023089852A5 JPWO2023089852A5 (https=) 2024-03-25
JP7540607B2 true JP7540607B2 (ja) 2024-08-27

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US (1) US20250014884A1 (https=)
EP (1) EP4435426A4 (https=)
JP (1) JP7540607B2 (https=)
CN (1) CN117981045A (https=)
WO (1) WO2023089852A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240363324A1 (en) * 2021-07-30 2024-10-31 Shimadzu Corporation Mass spectrometer
TW202311735A (zh) * 2021-09-06 2023-03-16 日商富士軟片股份有限公司 藥液的檢查方法、藥液的製造方法、藥液的管理方法、半導體元件的製造方法、光阻組成物的檢查方法、光阻組成物的製造方法、光阻組成物的管理方法以及半導體製造裝置的污染狀態確認方法
JP2024064706A (ja) * 2022-10-28 2024-05-14 株式会社島津製作所 質量分析装置および分析条件の設定方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002526027A (ja) 1997-06-04 2002-08-13 エムディーエス インコーポレーテッド 反応性バンドパス衝突セル

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5967078B2 (ja) * 2011-04-04 2016-08-10 株式会社島津製作所 質量分析装置及び質量分析方法
US20180323050A1 (en) * 2017-05-05 2018-11-08 Thermo Finnigan Llc Ion integrating and cooling cell for mass spectrometer
JP7095579B2 (ja) * 2018-12-05 2022-07-05 株式会社島津製作所 質量分析装置
WO2020152806A1 (ja) * 2019-01-23 2020-07-30 株式会社島津製作所 イオン分析装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002526027A (ja) 1997-06-04 2002-08-13 エムディーエス インコーポレーテッド 反応性バンドパス衝突セル

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Publication number Publication date
CN117981045A (zh) 2024-05-03
EP4435426A1 (en) 2024-09-25
US20250014884A1 (en) 2025-01-09
JPWO2023089852A1 (https=) 2023-05-25
WO2023089852A1 (ja) 2023-05-25
EP4435426A4 (en) 2025-03-12

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