JPWO2023079896A5 - - Google Patents

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Publication number
JPWO2023079896A5
JPWO2023079896A5 JP2023557907A JP2023557907A JPWO2023079896A5 JP WO2023079896 A5 JPWO2023079896 A5 JP WO2023079896A5 JP 2023557907 A JP2023557907 A JP 2023557907A JP 2023557907 A JP2023557907 A JP 2023557907A JP WO2023079896 A5 JPWO2023079896 A5 JP WO2023079896A5
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JP
Japan
Prior art keywords
substrate
main surface
rigidity
acceleration detection
sealing
Prior art date
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Application number
JP2023557907A
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English (en)
Japanese (ja)
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JPWO2023079896A1 (https=
JP7632680B2 (ja
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Priority claimed from PCT/JP2022/037390 external-priority patent/WO2023079896A1/ja
Publication of JPWO2023079896A1 publication Critical patent/JPWO2023079896A1/ja
Publication of JPWO2023079896A5 publication Critical patent/JPWO2023079896A5/ja
Application granted granted Critical
Publication of JP7632680B2 publication Critical patent/JP7632680B2/ja
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JP2023557907A 2021-11-04 2022-10-06 加速度検出装置 Active JP7632680B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021180490 2021-11-04
JP2021180490 2021-11-04
PCT/JP2022/037390 WO2023079896A1 (ja) 2021-11-04 2022-10-06 加速度検出装置

Publications (3)

Publication Number Publication Date
JPWO2023079896A1 JPWO2023079896A1 (https=) 2023-05-11
JPWO2023079896A5 true JPWO2023079896A5 (https=) 2024-06-26
JP7632680B2 JP7632680B2 (ja) 2025-02-19

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ID=86241304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023557907A Active JP7632680B2 (ja) 2021-11-04 2022-10-06 加速度検出装置

Country Status (2)

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JP (1) JP7632680B2 (https=)
WO (1) WO2023079896A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3139246B2 (ja) * 1993-11-09 2001-02-26 株式会社村田製作所 加速度センサ
JP3382030B2 (ja) * 1994-10-14 2003-03-04 株式会社日立製作所 フルモールド実装型加速度センサ
JP2006153724A (ja) * 2004-11-30 2006-06-15 Tateyama Kagaku Kogyo Kk 加速度センサモジュール
DE102009001969A1 (de) * 2009-03-30 2010-10-07 Robert Bosch Gmbh Sensormodul
JP6575181B2 (ja) * 2015-07-08 2019-09-18 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
JP6597069B2 (ja) * 2015-09-02 2019-10-30 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
CN205653159U (zh) * 2016-05-16 2016-10-19 安徽北方芯动联科微系统技术有限公司 多轴mems传感器模块
JP2018072170A (ja) * 2016-10-31 2018-05-10 日立オートモティブシステムズ株式会社 慣性力センサ装置

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