JP7632680B2 - 加速度検出装置 - Google Patents
加速度検出装置 Download PDFInfo
- Publication number
- JP7632680B2 JP7632680B2 JP2023557907A JP2023557907A JP7632680B2 JP 7632680 B2 JP7632680 B2 JP 7632680B2 JP 2023557907 A JP2023557907 A JP 2023557907A JP 2023557907 A JP2023557907 A JP 2023557907A JP 7632680 B2 JP7632680 B2 JP 7632680B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rigidity
- acceleration detection
- main surface
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 239000003822 epoxy resin Substances 0.000 description 1
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021180490 | 2021-11-04 | ||
| JP2021180490 | 2021-11-04 | ||
| PCT/JP2022/037390 WO2023079896A1 (ja) | 2021-11-04 | 2022-10-06 | 加速度検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023079896A1 JPWO2023079896A1 (https=) | 2023-05-11 |
| JPWO2023079896A5 JPWO2023079896A5 (https=) | 2024-06-26 |
| JP7632680B2 true JP7632680B2 (ja) | 2025-02-19 |
Family
ID=86241304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023557907A Active JP7632680B2 (ja) | 2021-11-04 | 2022-10-06 | 加速度検出装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7632680B2 (https=) |
| WO (1) | WO2023079896A1 (https=) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006153724A (ja) | 2004-11-30 | 2006-06-15 | Tateyama Kagaku Kogyo Kk | 加速度センサモジュール |
| US20100271787A1 (en) | 2009-03-30 | 2010-10-28 | Martin Holzmann | Sensor module |
| JP2017049122A (ja) | 2015-09-02 | 2017-03-09 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3139246B2 (ja) * | 1993-11-09 | 2001-02-26 | 株式会社村田製作所 | 加速度センサ |
| JP3382030B2 (ja) * | 1994-10-14 | 2003-03-04 | 株式会社日立製作所 | フルモールド実装型加速度センサ |
| JP6575181B2 (ja) * | 2015-07-08 | 2019-09-18 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
| CN205653159U (zh) * | 2016-05-16 | 2016-10-19 | 安徽北方芯动联科微系统技术有限公司 | 多轴mems传感器模块 |
| JP2018072170A (ja) * | 2016-10-31 | 2018-05-10 | 日立オートモティブシステムズ株式会社 | 慣性力センサ装置 |
-
2022
- 2022-10-06 WO PCT/JP2022/037390 patent/WO2023079896A1/ja not_active Ceased
- 2022-10-06 JP JP2023557907A patent/JP7632680B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006153724A (ja) | 2004-11-30 | 2006-06-15 | Tateyama Kagaku Kogyo Kk | 加速度センサモジュール |
| US20100271787A1 (en) | 2009-03-30 | 2010-10-28 | Martin Holzmann | Sensor module |
| JP2017049122A (ja) | 2015-09-02 | 2017-03-09 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2023079896A1 (https=) | 2023-05-11 |
| WO2023079896A1 (ja) | 2023-05-11 |
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