JPWO2023062766A5 - - Google Patents
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- Publication number
- JPWO2023062766A5 JPWO2023062766A5 JP2022506158A JP2022506158A JPWO2023062766A5 JP WO2023062766 A5 JPWO2023062766 A5 JP WO2023062766A5 JP 2022506158 A JP2022506158 A JP 2022506158A JP 2022506158 A JP2022506158 A JP 2022506158A JP WO2023062766 A5 JPWO2023062766 A5 JP WO2023062766A5
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- buried region
- light
- semiconductor substrate
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000004065 semiconductor Substances 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 25
- 238000005253 cladding Methods 0.000 claims description 8
- 230000031700 light absorption Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000002161 passivation Methods 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/038000 WO2023062766A1 (ja) | 2021-10-14 | 2021-10-14 | 導波路型受光素子、導波路型受光素子アレイ及び導波路型受光素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7118306B1 JP7118306B1 (ja) | 2022-08-15 |
| JPWO2023062766A1 JPWO2023062766A1 (https=) | 2023-04-20 |
| JPWO2023062766A5 true JPWO2023062766A5 (https=) | 2023-09-20 |
Family
ID=82847638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022506158A Active JP7118306B1 (ja) | 2021-10-14 | 2021-10-14 | 導波路型受光素子及び導波路型受光素子アレイ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240332438A1 (https=) |
| JP (1) | JP7118306B1 (https=) |
| CN (1) | CN118077062A (https=) |
| WO (1) | WO2023062766A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN120266599A (zh) * | 2022-12-01 | 2025-07-04 | 三菱电机株式会社 | 波导型受光元件 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07202263A (ja) * | 1993-12-28 | 1995-08-04 | Ricoh Co Ltd | 端面発光型発光ダイオード、アレイ状光源、側面受光型受光素子、受発光素子、端面発光型発光ダイオードアレイ状光源 |
| JPH10107310A (ja) * | 1996-09-26 | 1998-04-24 | Japan Aviation Electron Ind Ltd | 導波路型フォトダイオードアレイ |
| JP2000150925A (ja) * | 1998-11-05 | 2000-05-30 | Furukawa Electric Co Ltd:The | 導波路型集積半導体装置の作製方法 |
| JP2002033504A (ja) * | 2000-07-18 | 2002-01-31 | Nippon Sheet Glass Co Ltd | 受光素子アレイおよびその実装方法 |
| JP3544352B2 (ja) * | 2000-10-30 | 2004-07-21 | 日本電気株式会社 | 半導体受光素子 |
| JP2002305319A (ja) * | 2001-04-06 | 2002-10-18 | Toshiba Corp | 半導体受光素子および光通信用モジュール |
| JP2004128064A (ja) * | 2002-09-30 | 2004-04-22 | Toshiba Corp | 光半導体装置及びその製造方法 |
| JP2006066488A (ja) * | 2004-08-25 | 2006-03-09 | Mitsubishi Electric Corp | 半導体受光素子およびその製造方法 |
| CN100573925C (zh) * | 2005-05-18 | 2009-12-23 | 三菱电机株式会社 | 雪崩光电二极管 |
-
2021
- 2021-10-14 US US18/576,494 patent/US20240332438A1/en active Pending
- 2021-10-14 WO PCT/JP2021/038000 patent/WO2023062766A1/ja not_active Ceased
- 2021-10-14 JP JP2022506158A patent/JP7118306B1/ja active Active
- 2021-10-14 CN CN202180103085.4A patent/CN118077062A/zh active Pending
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