JPWO2023026803A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2023026803A5
JPWO2023026803A5 JP2023543780A JP2023543780A JPWO2023026803A5 JP WO2023026803 A5 JPWO2023026803 A5 JP WO2023026803A5 JP 2023543780 A JP2023543780 A JP 2023543780A JP 2023543780 A JP2023543780 A JP 2023543780A JP WO2023026803 A5 JPWO2023026803 A5 JP WO2023026803A5
Authority
JP
Japan
Prior art keywords
main surface
silicon carbide
thickness
insulating film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023543780A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023026803A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/029771 external-priority patent/WO2023026803A1/ja
Publication of JPWO2023026803A1 publication Critical patent/JPWO2023026803A1/ja
Publication of JPWO2023026803A5 publication Critical patent/JPWO2023026803A5/ja
Pending legal-status Critical Current

Links

JP2023543780A 2021-08-25 2022-08-03 Pending JPWO2023026803A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021137290 2021-08-25
PCT/JP2022/029771 WO2023026803A1 (ja) 2021-08-25 2022-08-03 炭化珪素半導体装置及び炭化珪素半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023026803A1 JPWO2023026803A1 (https=) 2023-03-02
JPWO2023026803A5 true JPWO2023026803A5 (https=) 2024-05-20

Family

ID=85323134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023543780A Pending JPWO2023026803A1 (https=) 2021-08-25 2022-08-03

Country Status (5)

Country Link
US (1) US20240332414A1 (https=)
JP (1) JPWO2023026803A1 (https=)
CN (1) CN117716512A (https=)
DE (1) DE112022004091T5 (https=)
WO (1) WO2023026803A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025049885A (ja) * 2023-09-22 2025-04-04 株式会社東芝 半導体装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10127885B4 (de) * 2001-06-08 2009-09-24 Infineon Technologies Ag Trench-Leistungshalbleiterbauelement
JP3708057B2 (ja) * 2001-07-17 2005-10-19 株式会社東芝 高耐圧半導体装置
DE112009005538B3 (de) * 2009-07-15 2020-02-13 Mitsubishi Electric Corporation Leistungshalbleitervorrichtung
JP5881322B2 (ja) * 2011-04-06 2016-03-09 ローム株式会社 半導体装置
EP2782130B1 (en) * 2011-11-14 2020-01-08 Fuji Electric Co., Ltd. High-voltage-resistance semiconductor device
JP5812029B2 (ja) 2012-06-13 2015-11-11 株式会社デンソー 炭化珪素半導体装置およびその製造方法
US9257511B2 (en) * 2013-03-26 2016-02-09 Infineon Technologies Ag Silicon carbide device and a method for forming a silicon carbide device
DE112015004374B4 (de) * 2014-09-26 2019-02-14 Mitsubishi Electric Corporation Halbleitervorrichtung
JP6404697B2 (ja) * 2014-12-10 2018-10-10 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
CN107112353B (zh) * 2014-12-23 2020-12-22 Abb电网瑞士股份公司 反向传导半导体装置
JP6260553B2 (ja) * 2015-02-27 2018-01-17 豊田合成株式会社 半導体装置およびその製造方法
JP6611960B2 (ja) * 2016-11-01 2019-11-27 三菱電機株式会社 炭化珪素半導体装置および電力変換装置
JP7237411B2 (ja) 2020-03-04 2023-03-13 株式会社藤商事 遊技機
CN115917757A (zh) * 2020-07-31 2023-04-04 罗姆股份有限公司 SiC半导体装置

Similar Documents

Publication Publication Date Title
JP2024020477A5 (https=)
US11145711B2 (en) Capacitor and method for manufacturing capacitor
US20060113577A1 (en) Semiconductor device
JP2025143353A5 (https=)
JP2017123432A (ja) 半導体装置
JP3485959B2 (ja) 薄膜トランジスタの製造方法
CN1707786A (zh) 半导体装置
CN111584364A (zh) 半导体装置的制造方法及半导体装置
US20180069022A1 (en) Thin-film transistor and method of fabricating the same
JP2025113483A5 (https=)
JPWO2023026803A5 (https=)
JP2000012687A5 (https=)
CN113594038B (zh) 一种半导体器件制备方法
CN115663032A (zh) 一种薄膜晶体管及其制备方法、阵列基板、显示装置
JP3484726B2 (ja) 半導体装置およびその製造方法
JP3697776B2 (ja) 半導体装置とその製造方法
JPWO2024101131A5 (https=)
US20220238651A1 (en) Semiconductor device and semiconductor package
JPWO2023180859A5 (https=)
TW202335049A (zh) 半導體結構及半導體製造方法
JPH0837289A (ja) 半導体装置及びその製造方法
US12136652B2 (en) Semiconductor device
CN115939222B (zh) 半导体器件及其制备方法
KR20210101236A (ko) 최적화된 흡수 속도를 갖는 검출 구조물을 제조하는 방법 및 그러한 구조물
JP2002252280A (ja) 半導体装置およびその製造方法