JPWO2023180859A5 - - Google Patents
Info
- Publication number
- JPWO2023180859A5 JPWO2023180859A5 JP2024508823A JP2024508823A JPWO2023180859A5 JP WO2023180859 A5 JPWO2023180859 A5 JP WO2023180859A5 JP 2024508823 A JP2024508823 A JP 2024508823A JP 2024508823 A JP2024508823 A JP 2024508823A JP WO2023180859 A5 JPWO2023180859 A5 JP WO2023180859A5
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- insulator
- semiconductor device
- memory cell
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022050551 | 2022-03-25 | ||
| JP2022050549 | 2022-03-25 | ||
| PCT/IB2023/052379 WO2023180859A1 (ja) | 2022-03-25 | 2023-03-13 | 半導体装置及び半導体装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023180859A1 JPWO2023180859A1 (https=) | 2023-09-28 |
| JPWO2023180859A5 true JPWO2023180859A5 (https=) | 2026-03-19 |
Family
ID=88100246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024508823A Pending JPWO2023180859A1 (https=) | 2022-03-25 | 2023-03-13 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250212387A1 (https=) |
| JP (1) | JPWO2023180859A1 (https=) |
| KR (1) | KR20240163678A (https=) |
| TW (1) | TW202347622A (https=) |
| WO (1) | WO2023180859A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI889314B (zh) * | 2024-04-26 | 2025-07-01 | 鴻海精密工業股份有限公司 | 記憶體裝置與其製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110402497B (zh) * | 2017-03-29 | 2024-08-06 | 株式会社半导体能源研究所 | 半导体装置、半导体装置的制造方法 |
| KR20240063206A (ko) * | 2017-09-06 | 2024-05-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| WO2020183277A1 (ja) * | 2019-03-12 | 2020-09-17 | 株式会社半導体エネルギー研究所 | 半導体装置、及び半導体装置の作製方法 |
| US20220271167A1 (en) * | 2019-07-18 | 2022-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor Device and Method For Manufacturing Semiconductor Device |
| TW202129877A (zh) * | 2019-08-30 | 2021-08-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置 |
| CN114424339A (zh) | 2019-09-20 | 2022-04-29 | 株式会社半导体能源研究所 | 半导体装置及半导体装置的制造方法 |
-
2023
- 2023-03-13 WO PCT/IB2023/052379 patent/WO2023180859A1/ja not_active Ceased
- 2023-03-13 TW TW112109137A patent/TW202347622A/zh unknown
- 2023-03-13 KR KR1020247033984A patent/KR20240163678A/ko active Pending
- 2023-03-13 US US18/848,954 patent/US20250212387A1/en active Pending
- 2023-03-13 JP JP2024508823A patent/JPWO2023180859A1/ja active Pending
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