JPWO2022270529A5 - - Google Patents
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- Publication number
- JPWO2022270529A5 JPWO2022270529A5 JP2023530082A JP2023530082A JPWO2022270529A5 JP WO2022270529 A5 JPWO2022270529 A5 JP WO2022270529A5 JP 2023530082 A JP2023530082 A JP 2023530082A JP 2023530082 A JP2023530082 A JP 2023530082A JP WO2022270529 A5 JPWO2022270529 A5 JP WO2022270529A5
- Authority
- JP
- Japan
- Prior art keywords
- general formula
- carbon atoms
- group
- negative photosensitive
- photosensitive polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000004432 carbon atom Chemical group C* 0.000 claims 20
- 229920000642 polymer Polymers 0.000 claims 18
- 125000000217 alkyl group Chemical group 0.000 claims 10
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 9
- 125000000962 organic group Chemical group 0.000 claims 8
- 125000003545 alkoxy group Chemical group 0.000 claims 5
- 125000003118 aryl group Chemical group 0.000 claims 5
- 239000011342 resin composition Substances 0.000 claims 5
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 claims 4
- 125000005462 imide group Chemical group 0.000 claims 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims 3
- 125000002947 alkylene group Chemical group 0.000 claims 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims 2
- 239000003431 cross linking reagent Substances 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 2
- ZFPGARUNNKGOBB-UHFFFAOYSA-N 1-Ethyl-2-pyrrolidinone Chemical compound CCN1CCCC1=O ZFPGARUNNKGOBB-UHFFFAOYSA-N 0.000 claims 1
- OVRKATYHWPCGPZ-UHFFFAOYSA-N 4-methyloxane Chemical compound CC1CCOCC1 OVRKATYHWPCGPZ-UHFFFAOYSA-N 0.000 claims 1
- 239000004642 Polyimide Substances 0.000 claims 1
- VILAVOFMIJHSJA-UHFFFAOYSA-N dicarbon monoxide Chemical group [C]=C=O VILAVOFMIJHSJA-UHFFFAOYSA-N 0.000 claims 1
- 125000005567 fluorenylene group Chemical group 0.000 claims 1
- 125000001153 fluoro group Chemical group F* 0.000 claims 1
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 125000005439 maleimidyl group Chemical group C1(C=CC(N1*)=O)=O 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000003504 photosensitizing agent Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000013585 weight reducing agent Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023203906A JP2024022630A (ja) | 2021-06-25 | 2023-12-01 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021105687 | 2021-06-25 | ||
| JP2021105687 | 2021-06-25 | ||
| JP2022019325 | 2022-02-10 | ||
| JP2022019325 | 2022-02-10 | ||
| PCT/JP2022/024842 WO2022270529A1 (ja) | 2021-06-25 | 2022-06-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023203906A Division JP2024022630A (ja) | 2021-06-25 | 2023-12-01 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022270529A1 JPWO2022270529A1 (https=) | 2022-12-29 |
| JPWO2022270529A5 true JPWO2022270529A5 (https=) | 2023-08-10 |
| JP7409564B2 JP7409564B2 (ja) | 2024-01-09 |
Family
ID=84545752
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023530082A Active JP7409564B2 (ja) | 2021-06-25 | 2022-06-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
| JP2023203906A Pending JP2024022630A (ja) | 2021-06-25 | 2023-12-01 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023203906A Pending JP2024022630A (ja) | 2021-06-25 | 2023-12-01 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240272551A1 (https=) |
| JP (2) | JP7409564B2 (https=) |
| KR (1) | KR20240026184A (https=) |
| TW (1) | TW202309195A (https=) |
| WO (1) | WO2022270529A1 (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0812914A (ja) * | 1994-06-29 | 1996-01-16 | Harima Chem Inc | ポリイミドインキ |
| JP6303588B2 (ja) * | 2013-08-08 | 2018-04-04 | Jsr株式会社 | 感放射線性樹脂組成物、絶縁膜及びその形成方法並びに有機ｅｌ素子 |
| US20210278767A1 (en) | 2018-06-26 | 2021-09-09 | Mitsubishi Gas Chemical Company, Inc. | Film forming material for lithography, composition for film formation for lithography, underlayer film for lithography, and method for forming pattern |
| US11535709B2 (en) * | 2019-03-05 | 2022-12-27 | Promerus, Llc | Reactive end group containing polyimides and polyamic acids and photosensitive compositions thereof |
| TWI838478B (zh) | 2019-03-05 | 2024-04-11 | 日商住友電木股份有限公司 | 感光性聚醯亞胺組成物 |
-
2022
- 2022-06-22 US US18/566,685 patent/US20240272551A1/en active Pending
- 2022-06-22 KR KR1020247001960A patent/KR20240026184A/ko active Pending
- 2022-06-22 JP JP2023530082A patent/JP7409564B2/ja active Active
- 2022-06-22 WO PCT/JP2022/024842 patent/WO2022270529A1/ja not_active Ceased
- 2022-06-24 TW TW111123679A patent/TW202309195A/zh unknown
-
2023
- 2023-12-01 JP JP2023203906A patent/JP2024022630A/ja active Pending
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