JPWO2022270546A5 - - Google Patents
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- Publication number
- JPWO2022270546A5 JPWO2022270546A5 JP2023530097A JP2023530097A JPWO2022270546A5 JP WO2022270546 A5 JPWO2022270546 A5 JP WO2022270546A5 JP 2023530097 A JP2023530097 A JP 2023530097A JP 2023530097 A JP2023530097 A JP 2023530097A JP WO2022270546 A5 JPWO2022270546 A5 JP WO2022270546A5
- Authority
- JP
- Japan
- Prior art keywords
- general formula
- group
- carbon atoms
- divalent
- negative photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000004432 carbon atom Chemical group C* 0.000 claims 57
- 229920000642 polymer Polymers 0.000 claims 33
- 125000000217 alkyl group Chemical group 0.000 claims 20
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 20
- 125000003545 alkoxy group Chemical group 0.000 claims 19
- 125000000962 organic group Chemical group 0.000 claims 17
- 150000003949 imides Chemical group 0.000 claims 12
- 125000002947 alkylene group Chemical group 0.000 claims 11
- 125000003118 aryl group Chemical group 0.000 claims 6
- 125000005567 fluorenylene group Chemical group 0.000 claims 5
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims 4
- VILAVOFMIJHSJA-UHFFFAOYSA-N dicarbon monoxide Chemical group [C]=C=O VILAVOFMIJHSJA-UHFFFAOYSA-N 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 3
- 239000011342 resin composition Substances 0.000 claims 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims 2
- 239000004642 Polyimide Substances 0.000 claims 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 claims 2
- 125000001153 fluoro group Chemical group F* 0.000 claims 2
- 229920001721 polyimide Polymers 0.000 claims 2
- 239000002904 solvent Substances 0.000 claims 2
- ZFPGARUNNKGOBB-UHFFFAOYSA-N 1-Ethyl-2-pyrrolidinone Chemical compound CCN1CCCC1=O ZFPGARUNNKGOBB-UHFFFAOYSA-N 0.000 claims 1
- OVRKATYHWPCGPZ-UHFFFAOYSA-N 4-methyloxane Chemical compound CC1CCOCC1 OVRKATYHWPCGPZ-UHFFFAOYSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 1
- 125000002723 alicyclic group Chemical group 0.000 claims 1
- 125000001931 aliphatic group Chemical group 0.000 claims 1
- 239000004202 carbamide Substances 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000003431 cross linking reagent Substances 0.000 claims 1
- 125000004185 ester group Chemical group 0.000 claims 1
- 125000005842 heteroatom Chemical group 0.000 claims 1
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000013585 weight reducing agent Substances 0.000 claims 1
- -1 γ-butyl lactone Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023198341A JP2024019205A (ja) | 2021-06-25 | 2023-11-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021105682 | 2021-06-25 | ||
| JP2021105682 | 2021-06-25 | ||
| JP2022019323 | 2022-02-10 | ||
| JP2022019323 | 2022-02-10 | ||
| PCT/JP2022/024912 WO2022270546A1 (ja) | 2021-06-25 | 2022-06-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023198341A Division JP2024019205A (ja) | 2021-06-25 | 2023-11-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022270546A1 JPWO2022270546A1 (https=) | 2022-12-29 |
| JPWO2022270546A5 true JPWO2022270546A5 (https=) | 2023-07-13 |
| JP7405309B2 JP7405309B2 (ja) | 2023-12-26 |
Family
ID=84545449
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023530097A Active JP7405309B2 (ja) | 2021-06-25 | 2022-06-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
| JP2023198341A Pending JP2024019205A (ja) | 2021-06-25 | 2023-11-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023198341A Pending JP2024019205A (ja) | 2021-06-25 | 2023-11-22 | ネガ型感光性ポリマー、ポリマー溶液、ネガ型感光性樹脂組成物、硬化膜および半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240301115A1 (https=) |
| JP (2) | JP7405309B2 (https=) |
| KR (1) | KR20240025621A (https=) |
| WO (1) | WO2022270546A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20240025621A (ko) * | 2021-06-25 | 2024-02-27 | 스미또모 베이크라이트 가부시키가이샤 | 네거티브형 감광성 폴리머, 폴리머 용액, 네거티브형 감광성 수지 조성물, 경화막 및 반도체 장치 |
| WO2026071165A1 (ja) * | 2024-09-30 | 2026-04-02 | 富士フイルム株式会社 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、半導体デバイス、及び、ポリイミド |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7795370B2 (en) * | 2005-11-15 | 2010-09-14 | Mitsubishi Chemical Corporation | Tetracarboxylic acid compound, polyimide thereof, and production method thereof |
| JP2018070829A (ja) | 2016-11-02 | 2018-05-10 | 東レ株式会社 | 樹脂組成物 |
| JP7289353B2 (ja) * | 2019-06-17 | 2023-06-09 | 富士フイルム株式会社 | 硬化性樹脂組成物、硬化膜、積層体、硬化膜の製造方法、半導体デバイス、及び、ポリイミド、又は、ポリイミド前駆体 |
| WO2020255825A1 (ja) | 2019-06-17 | 2020-12-24 | 富士フイルム株式会社 | 硬化性樹脂組成物、硬化膜、積層体、硬化膜の製造方法、半導体デバイス、及び、ポリイミド、ポリベンゾオキサゾール、ポリイミド前駆体、又は、ポリベンゾオキサゾール前駆体 |
| KR20240025621A (ko) * | 2021-06-25 | 2024-02-27 | 스미또모 베이크라이트 가부시키가이샤 | 네거티브형 감광성 폴리머, 폴리머 용액, 네거티브형 감광성 수지 조성물, 경화막 및 반도체 장치 |
-
2022
- 2022-06-22 KR KR1020247002186A patent/KR20240025621A/ko active Pending
- 2022-06-22 JP JP2023530097A patent/JP7405309B2/ja active Active
- 2022-06-22 WO PCT/JP2022/024912 patent/WO2022270546A1/ja not_active Ceased
- 2022-06-22 US US18/570,237 patent/US20240301115A1/en active Pending
-
2023
- 2023-11-22 JP JP2023198341A patent/JP2024019205A/ja active Pending
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