JPWO2022244033A5 - - Google Patents
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- Publication number
- JPWO2022244033A5 JPWO2022244033A5 JP2023521983A JP2023521983A JPWO2022244033A5 JP WO2022244033 A5 JPWO2022244033 A5 JP WO2022244033A5 JP 2023521983 A JP2023521983 A JP 2023521983A JP 2023521983 A JP2023521983 A JP 2023521983A JP WO2022244033 A5 JPWO2022244033 A5 JP WO2022244033A5
- Authority
- JP
- Japan
- Prior art keywords
- component
- beam member
- transfer device
- pair
- stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000006096 absorbing agent Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000035939 shock Effects 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/018530 WO2022244033A1 (ja) | 2021-05-17 | 2021-05-17 | 部品移載装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022244033A1 JPWO2022244033A1 (https=) | 2022-11-24 |
| JPWO2022244033A5 true JPWO2022244033A5 (https=) | 2024-01-31 |
| JP7503712B2 JP7503712B2 (ja) | 2024-06-20 |
Family
ID=84141285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023521983A Active JP7503712B2 (ja) | 2021-05-17 | 2021-05-17 | 部品移載装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7503712B2 (https=) |
| KR (1) | KR102828117B1 (https=) |
| DE (1) | DE112021007670T5 (https=) |
| WO (1) | WO2022244033A1 (https=) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3097511B2 (ja) * | 1995-09-22 | 2000-10-10 | 松下電器産業株式会社 | チップの搭載装置 |
| WO2005008726A2 (en) * | 2003-07-09 | 2005-01-27 | Newport Corporation | Flip chip device assembly machine |
| JP2007040468A (ja) * | 2005-08-04 | 2007-02-15 | Matsushita Electric Ind Co Ltd | 衝撃吸収機構、及び該機構を備えた機械装置 |
| JP4824641B2 (ja) * | 2007-07-06 | 2011-11-30 | ヤマハ発動機株式会社 | 部品移載装置 |
| JP2009295741A (ja) | 2008-06-04 | 2009-12-17 | Yamaha Motor Co Ltd | 部品移載方法及び部品移載装置 |
| JP2013117291A (ja) | 2011-12-05 | 2013-06-13 | Hiroshima Aluminum Industry Co Ltd | 衝撃吸収部材 |
| US11137044B2 (en) | 2014-02-24 | 2021-10-05 | Teijin Limited | Resin-made impact absorption member |
| JP6889614B2 (ja) * | 2017-05-31 | 2021-06-18 | ファスフォードテクノロジ株式会社 | 半導体製造装置および半導体装置の製造方法 |
-
2021
- 2021-05-17 KR KR1020237035651A patent/KR102828117B1/ko active Active
- 2021-05-17 WO PCT/JP2021/018530 patent/WO2022244033A1/ja not_active Ceased
- 2021-05-17 DE DE112021007670.1T patent/DE112021007670T5/de active Pending
- 2021-05-17 JP JP2023521983A patent/JP7503712B2/ja active Active
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