JPWO2022137022A5 - - Google Patents

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Publication number
JPWO2022137022A5
JPWO2022137022A5 JP2022570762A JP2022570762A JPWO2022137022A5 JP WO2022137022 A5 JPWO2022137022 A5 JP WO2022137022A5 JP 2022570762 A JP2022570762 A JP 2022570762A JP 2022570762 A JP2022570762 A JP 2022570762A JP WO2022137022 A5 JPWO2022137022 A5 JP WO2022137022A5
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JP
Japan
Prior art keywords
cluster
load lock
lock chamber
manufacturing apparatus
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022570762A
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English (en)
Japanese (ja)
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JP7756109B2 (ja
JPWO2022137022A1 (https=
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Publication date
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Priority claimed from PCT/IB2021/061730 external-priority patent/WO2022137022A1/ja
Publication of JPWO2022137022A1 publication Critical patent/JPWO2022137022A1/ja
Publication of JPWO2022137022A5 publication Critical patent/JPWO2022137022A5/ja
Priority to JP2025168616A priority Critical patent/JP2025188123A/ja
Application granted granted Critical
Publication of JP7756109B2 publication Critical patent/JP7756109B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022570762A 2020-12-25 2021-12-15 表示装置の製造装置 Active JP7756109B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025168616A JP2025188123A (ja) 2020-12-25 2025-10-06 表示装置の製造装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020216021 2020-12-25
JP2020216021 2020-12-25
PCT/IB2021/061730 WO2022137022A1 (ja) 2020-12-25 2021-12-15 表示装置の製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025168616A Division JP2025188123A (ja) 2020-12-25 2025-10-06 表示装置の製造装置

Publications (3)

Publication Number Publication Date
JPWO2022137022A1 JPWO2022137022A1 (https=) 2022-06-30
JPWO2022137022A5 true JPWO2022137022A5 (https=) 2024-12-20
JP7756109B2 JP7756109B2 (ja) 2025-10-17

Family

ID=82158882

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022570762A Active JP7756109B2 (ja) 2020-12-25 2021-12-15 表示装置の製造装置
JP2025168616A Pending JP2025188123A (ja) 2020-12-25 2025-10-06 表示装置の製造装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025168616A Pending JP2025188123A (ja) 2020-12-25 2025-10-06 表示装置の製造装置

Country Status (3)

Country Link
US (1) US20240057462A1 (https=)
JP (2) JP7756109B2 (https=)
WO (1) WO2022137022A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3654597B2 (ja) * 1993-07-15 2005-06-02 株式会社ルネサステクノロジ 製造システムおよび製造方法
US6017820A (en) * 1998-07-17 2000-01-25 Cutek Research, Inc. Integrated vacuum and plating cluster system
JP4425438B2 (ja) * 1999-07-23 2010-03-03 株式会社半導体エネルギー研究所 Ｅｌ表示装置の作製方法
JP5159010B2 (ja) * 2000-09-08 2013-03-06 株式会社半導体エネルギー研究所 発光装置の作製方法
JP2005285576A (ja) * 2004-03-30 2005-10-13 Mitsubishi-Hitachi Metals Machinery Inc インライン式有機エレクトロルミネセンス製造装置
US9325007B2 (en) * 2009-10-27 2016-04-26 Applied Materials, Inc. Shadow mask alignment and management system
KR102141205B1 (ko) * 2013-08-16 2020-08-05 삼성디스플레이 주식회사 박막 봉지 제조 장치 및 이를 이용한 표시 장치의 제조 방법
JP6937549B2 (ja) * 2016-06-10 2021-09-22 株式会社ジャパンディスプレイ 発光素子の製造装置
JP6830772B2 (ja) * 2016-08-04 2021-02-17 株式会社ジャパンディスプレイ 積層膜の製造装置、及び積層膜の製造方法
KR102648517B1 (ko) * 2018-03-20 2024-03-15 도쿄엘렉트론가부시키가이샤 통합형 반도체 공정 모듈을 포함하는 자기 인식 및 보정 이종 플랫폼, 및 이를 사용하기 위한 방법
WO2022123381A1 (ja) * 2020-12-07 2022-06-16 株式会社半導体エネルギー研究所 発光デバイスの製造装置
US11860528B2 (en) * 2020-12-21 2024-01-02 Applied Materials, Inc. Multi-chamber substrate processing platform

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