JPWO2022127019A5 - - Google Patents
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- Publication number
- JPWO2022127019A5 JPWO2022127019A5 JP2022512788A JP2022512788A JPWO2022127019A5 JP WO2022127019 A5 JPWO2022127019 A5 JP WO2022127019A5 JP 2022512788 A JP2022512788 A JP 2022512788A JP 2022512788 A JP2022512788 A JP 2022512788A JP WO2022127019 A5 JPWO2022127019 A5 JP WO2022127019A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- hcl
- adsorption
- rectification
- chlorosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 201
- 238000001179 sorption measurement Methods 0.000 claims description 113
- 238000000034 method Methods 0.000 claims description 102
- 238000010521 absorption reaction Methods 0.000 claims description 93
- 239000005046 Chlorosilane Substances 0.000 claims description 66
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 66
- 239000007788 liquid Substances 0.000 claims description 55
- 238000009833 condensation Methods 0.000 claims description 54
- 230000005494 condensation Effects 0.000 claims description 54
- 239000007921 spray Substances 0.000 claims description 49
- 239000002994 raw material Substances 0.000 claims description 34
- 238000000746 purification Methods 0.000 claims description 29
- 238000001704 evaporation Methods 0.000 claims description 22
- 230000008020 evaporation Effects 0.000 claims description 22
- 238000007906 compression Methods 0.000 claims description 20
- 230000006835 compression Effects 0.000 claims description 20
- 238000003795 desorption Methods 0.000 claims description 20
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 19
- 239000001257 hydrogen Substances 0.000 claims description 19
- 229910052739 hydrogen Inorganic materials 0.000 claims description 19
- 239000002250 absorbent Substances 0.000 claims description 16
- 230000002745 absorbent Effects 0.000 claims description 16
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 12
- 238000001312 dry etching Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 9
- 239000002737 fuel gas Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- BSYQEPMUPCBSBK-UHFFFAOYSA-N [F].[SiH4] Chemical compound [F].[SiH4] BSYQEPMUPCBSBK-UHFFFAOYSA-N 0.000 claims description 6
- HICCMIMHFYBSJX-UHFFFAOYSA-N [SiH4].[Cl] Chemical compound [SiH4].[Cl] HICCMIMHFYBSJX-UHFFFAOYSA-N 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 239000003921 oil Substances 0.000 claims description 6
- 239000000779 smoke Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 5
- 229910021641 deionized water Inorganic materials 0.000 claims description 5
- 238000004064 recycling Methods 0.000 claims description 5
- 239000000243 solution Substances 0.000 claims description 5
- 238000004821 distillation Methods 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 3
- 238000011049 filling Methods 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 238000013022 venting Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims 4
- 238000000926 separation method Methods 0.000 claims 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- 230000002378 acidificating effect Effects 0.000 claims 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 2
- 238000005406 washing Methods 0.000 claims 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000010779 crude oil Substances 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910021645 metal ion Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 239000004480 active ingredient Substances 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011485842.2A CN112707373B (zh) | 2020-12-16 | 2020-12-16 | 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法 |
| CN202011485842.2 | 2020-12-16 | ||
| PCT/CN2021/094254 WO2022127019A1 (zh) | 2020-12-16 | 2021-05-18 | 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023535850A JP2023535850A (ja) | 2023-08-22 |
| JPWO2022127019A5 true JPWO2022127019A5 (enrdf_load_stackoverflow) | 2024-03-01 |
| JP7541763B2 JP7541763B2 (ja) | 2024-08-29 |
Family
ID=75543422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022512788A Active JP7541763B2 (ja) | 2020-12-16 | 2021-05-18 | ＦＴｒＰＳＡによるＨＦ／ＨＣｌ含有エッチング排ガスの分離と回収循環再利用方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7541763B2 (enrdf_load_stackoverflow) |
| CN (1) | CN112707373B (enrdf_load_stackoverflow) |
| WO (1) | WO2022127019A1 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112707373B (zh) * | 2020-12-16 | 2022-06-10 | 浙江天采云集科技股份有限公司 | 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法 |
| CN113860257B (zh) * | 2021-11-04 | 2022-04-22 | 浙江容跃环保科技有限公司 | 玻璃薄化废酸液再生回收的方法及系统 |
| CN115231524B (zh) * | 2022-07-12 | 2024-03-12 | 浙江省天正设计工程有限公司 | 一种氟化工生产中含氟化氢尾气的分离纯化方法和装置 |
| CN115650240A (zh) * | 2022-09-08 | 2023-01-31 | 洛阳中硅高科技有限公司 | 一氯硅烷的制备方法 |
| CN115722027A (zh) * | 2022-11-14 | 2023-03-03 | 上海森崚半导体科技有限公司 | 干刻尾气回收三氟化氮的方法及装置 |
| CN117699740A (zh) * | 2023-12-01 | 2024-03-15 | 安徽金禾实业股份有限公司 | 一种从氧化镁生产尾气中回收盐酸的方法 |
| CN119909499B (zh) * | 2025-04-07 | 2025-06-03 | 湘潭大学 | 一种利用白油循环吸收废气中乙醇的工艺 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3025653B2 (ja) * | 1996-01-29 | 2000-03-27 | 東洋エンジニアリング株式会社 | 改良された圧力スイング吸着法 |
| US7790130B2 (en) * | 2007-08-31 | 2010-09-07 | Uop Llc | Wide mesoporous alumina composites having trimodal pore structure |
| JP6433867B2 (ja) | 2015-08-28 | 2018-12-05 | 信越化学工業株式会社 | 水素ガス回収システムおよび水素ガスの分離回収方法 |
| CN105749699B (zh) | 2016-03-31 | 2020-04-21 | 四川天采科技有限责任公司 | 一种全温程变压吸附气体分离提纯与净化的方法 |
| CN105854516A (zh) | 2016-03-31 | 2016-08-17 | 四川天采科技有限责任公司 | 一种炼厂干气同时回收h2和c2及以上组分的全温程变压吸附方法 |
| CN108744882B (zh) * | 2018-05-29 | 2021-02-26 | 浙江天采云集科技股份有限公司 | 一种led-mocvd制程废气全温程变压吸附提氨再利用的方法 |
| CN109092010B (zh) | 2018-05-29 | 2021-01-15 | 浙江天采云集科技股份有限公司 | 一种led-mocvd制程废气全温程变压吸附提氢再利用的方法 |
| CN108715436B (zh) * | 2018-05-29 | 2019-11-08 | 四川天采科技有限责任公司 | 半导体制程常压废氢气全温程变压吸附提纯再利用的方法 |
| CN108658042B (zh) | 2018-05-29 | 2019-11-08 | 四川天采科技有限责任公司 | 一种led-mocvd制程尾气全温程变压吸附全组分回收再利用方法 |
| CN109045965B (zh) | 2018-09-03 | 2024-05-31 | 环境保护部华南环境科学研究所 | 一种废气净化系统及方法 |
| CN211799895U (zh) | 2020-03-17 | 2020-10-30 | 大连海奥膜技术有限公司 | 一种分离含有氯化氢和氢气混合气体的工艺系统 |
| CN112591711B (zh) * | 2020-12-16 | 2022-05-20 | 浙江天采云集科技股份有限公司 | 一种HF/HCl混合气体高纯度高收率的FTrPSA分离与净化提取方法 |
| CN112707373B (zh) * | 2020-12-16 | 2022-06-10 | 浙江天采云集科技股份有限公司 | 一种含HF/HCl蚀刻尾气FTrPSA分离与回收循环再利用方法 |
-
2020
- 2020-12-16 CN CN202011485842.2A patent/CN112707373B/zh active Active
-
2021
- 2021-05-18 WO PCT/CN2021/094254 patent/WO2022127019A1/zh not_active Ceased
- 2021-05-18 JP JP2022512788A patent/JP7541763B2/ja active Active
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