JPWO2021260943A5 - - Google Patents
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- Publication number
- JPWO2021260943A5 JPWO2021260943A5 JP2022532225A JP2022532225A JPWO2021260943A5 JP WO2021260943 A5 JPWO2021260943 A5 JP WO2021260943A5 JP 2022532225 A JP2022532225 A JP 2022532225A JP 2022532225 A JP2022532225 A JP 2022532225A JP WO2021260943 A5 JPWO2021260943 A5 JP WO2021260943A5
- Authority
- JP
- Japan
- Prior art keywords
- spin coating
- thickness
- resist material
- coating apparatus
- film made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004528 spin coating Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005305 interferometry Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/025336 WO2021260943A1 (ja) | 2020-06-26 | 2020-06-26 | スピンコーティング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021260943A1 JPWO2021260943A1 (https=) | 2021-12-30 |
| JPWO2021260943A5 true JPWO2021260943A5 (https=) | 2023-03-10 |
Family
ID=79282127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022532225A Pending JPWO2021260943A1 (https=) | 2020-06-26 | 2020-06-26 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230266669A1 (https=) |
| EP (1) | EP4173725A4 (https=) |
| JP (1) | JPWO2021260943A1 (https=) |
| KR (1) | KR20230025525A (https=) |
| CN (1) | CN115916420A (https=) |
| WO (1) | WO2021260943A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117637545B (zh) * | 2023-11-30 | 2024-08-23 | 重庆大学 | 一种实验室用半自动化钙钛矿太阳能电池制备方法及其制备系统 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01278021A (ja) * | 1988-04-29 | 1989-11-08 | Nec Corp | レジストの塗布装置 |
| JPH0265225A (ja) * | 1988-08-31 | 1990-03-05 | General Signal Japan Kk | フォトレジストの塗布方法 |
| JPH02142113A (ja) * | 1988-11-22 | 1990-05-31 | Kawasaki Steel Corp | レジスト塗布装置 |
| JP2768720B2 (ja) * | 1989-03-02 | 1998-06-25 | 三菱電機株式会社 | 塗布装置 |
| JPH02233176A (ja) * | 1989-03-06 | 1990-09-14 | Mitsubishi Electric Corp | 塗布装置 |
| JP3960633B2 (ja) * | 1995-02-27 | 2007-08-15 | リソテック ジャパン株式会社 | 膜厚制御方法および装置 |
| JPH10328614A (ja) * | 1997-05-30 | 1998-12-15 | Mitsubishi Chem Corp | 着色レジストの塗布方法 |
| JP3641162B2 (ja) * | 1998-04-20 | 2005-04-20 | 東京エレクトロン株式会社 | 塗布膜形成装置及びその方法並びにパターン形成方法 |
| JP4342327B2 (ja) * | 2004-01-26 | 2009-10-14 | 住友化学株式会社 | 枚葉塗膜形成方法 |
| JP2006030070A (ja) * | 2004-07-20 | 2006-02-02 | Opto One Kk | 膜厚検査装置 |
| JP2006231262A (ja) | 2005-02-28 | 2006-09-07 | Fuji Photo Film Co Ltd | スピンコート製膜法 |
| JP4748192B2 (ja) | 2008-08-07 | 2011-08-17 | 東京エレクトロン株式会社 | 塗布装置、塗布方法、塗布、現像装置及び記憶媒体 |
| JP2012256780A (ja) | 2011-06-10 | 2012-12-27 | Fuji Electric Co Ltd | スピンコート法によるレジスト塗布方法 |
| JP5796555B2 (ja) | 2012-07-13 | 2015-10-21 | トヨタ自動車株式会社 | スピンコート装置 |
| JP6454121B2 (ja) | 2014-10-07 | 2019-01-16 | 積水化学工業株式会社 | スピンコート用シャーレ |
| JP2018202318A (ja) | 2017-06-02 | 2018-12-27 | キヤノン株式会社 | スピンコータ装置、スピンコート方法、ドライフィルムレジストの製造方法および液体吐出ヘッドの製造方法 |
-
2020
- 2020-06-26 CN CN202080102432.7A patent/CN115916420A/zh active Pending
- 2020-06-26 WO PCT/JP2020/025336 patent/WO2021260943A1/ja not_active Ceased
- 2020-06-26 JP JP2022532225A patent/JPWO2021260943A1/ja active Pending
- 2020-06-26 KR KR1020237002125A patent/KR20230025525A/ko not_active Ceased
- 2020-06-26 US US18/012,942 patent/US20230266669A1/en not_active Abandoned
- 2020-06-26 EP EP20942288.0A patent/EP4173725A4/en not_active Withdrawn
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