JPWO2021240962A5 - - Google Patents
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- Publication number
- JPWO2021240962A5 JPWO2021240962A5 JP2021574330A JP2021574330A JPWO2021240962A5 JP WO2021240962 A5 JPWO2021240962 A5 JP WO2021240962A5 JP 2021574330 A JP2021574330 A JP 2021574330A JP 2021574330 A JP2021574330 A JP 2021574330A JP WO2021240962 A5 JPWO2021240962 A5 JP WO2021240962A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- sputtering
- target
- transmitting conductive
- ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 2
- 229910001887 tin oxide Inorganic materials 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 1
- 229910003437 indium oxide Inorganic materials 0.000 claims 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022065809A JP7102637B2 (ja) | 2020-05-25 | 2022-04-12 | 光透過性導電性シートの製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020090595 | 2020-05-25 | ||
| JP2020090595 | 2020-05-25 | ||
| PCT/JP2021/011147 WO2021240962A1 (ja) | 2020-05-25 | 2021-03-18 | 光透過性導電性シートの製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022065809A Division JP7102637B2 (ja) | 2020-05-25 | 2022-04-12 | 光透過性導電性シートの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021240962A1 JPWO2021240962A1 (https=) | 2021-12-02 |
| JP7059455B1 JP7059455B1 (ja) | 2022-04-25 |
| JPWO2021240962A5 true JPWO2021240962A5 (https=) | 2022-05-24 |
Family
ID=78723317
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021574330A Active JP7059455B1 (ja) | 2020-05-25 | 2021-03-18 | 光透過性導電性シートの製造方法 |
| JP2022065809A Active JP7102637B2 (ja) | 2020-05-25 | 2022-04-12 | 光透過性導電性シートの製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022065809A Active JP7102637B2 (ja) | 2020-05-25 | 2022-04-12 | 光透過性導電性シートの製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP7059455B1 (https=) |
| KR (1) | KR20230015894A (https=) |
| CN (1) | CN115667573B (https=) |
| TW (1) | TW202202642A (https=) |
| WO (1) | WO2021240962A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024005997A (ja) * | 2022-06-30 | 2024-01-17 | 日東電工株式会社 | 透明導電性フィルムの製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3176812B2 (ja) | 1994-12-21 | 2001-06-18 | 住友ベークライト株式会社 | 透明導電性フィルム |
| TW521280B (en) * | 2001-03-07 | 2003-02-21 | Ueyama Electric Co Ltd | Method of producing transparent conductive film-laminated substrate and method of producing color filter |
| JP4481593B2 (ja) * | 2003-05-26 | 2010-06-16 | キヤノン株式会社 | 表示素子 |
| WO2011061922A1 (ja) * | 2009-11-19 | 2011-05-26 | 株式会社アルバック | 透明導電膜の製造方法、透明導電膜の製造装置、スパッタリングターゲット及び透明導電膜 |
| JPWO2012161095A1 (ja) * | 2011-05-20 | 2014-07-31 | 旭硝子株式会社 | 導電膜用素材、導電膜積層体、電子機器、及びそれらの製造方法 |
| JP6215062B2 (ja) * | 2013-01-16 | 2017-10-18 | 日東電工株式会社 | 透明導電フィルムの製造方法 |
| JP6239330B2 (ja) * | 2013-09-26 | 2017-11-29 | 日東電工株式会社 | 透明導電性フィルムの製造方法 |
| US10270010B2 (en) * | 2014-01-28 | 2019-04-23 | Kaneka Corporation | Substrate with transparent electrode and method for producing same |
| CN105874545B (zh) * | 2014-03-31 | 2017-07-21 | 株式会社钟化 | 透明导电膜的制造方法 |
| WO2015178298A1 (ja) * | 2014-05-20 | 2015-11-26 | 日東電工株式会社 | 透明導電性フィルムおよびその製造方法 |
| CN107109639B (zh) * | 2015-03-24 | 2019-09-10 | 株式会社钟化 | 带透明电极的基板及带透明电极的基板的制造方法 |
| US20180098422A1 (en) * | 2015-04-06 | 2018-04-05 | Kaneka Corporation | Transparent conductive film and display device |
-
2021
- 2021-03-18 KR KR1020227037763A patent/KR20230015894A/ko not_active Ceased
- 2021-03-18 WO PCT/JP2021/011147 patent/WO2021240962A1/ja not_active Ceased
- 2021-03-18 CN CN202180038168.XA patent/CN115667573B/zh active Active
- 2021-03-18 JP JP2021574330A patent/JP7059455B1/ja active Active
- 2021-03-19 TW TW110110045A patent/TW202202642A/zh unknown
-
2022
- 2022-04-12 JP JP2022065809A patent/JP7102637B2/ja active Active
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