JPWO2021240962A5 - - Google Patents
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- JPWO2021240962A5 JPWO2021240962A5 JP2021574330A JP2021574330A JPWO2021240962A5 JP WO2021240962 A5 JPWO2021240962 A5 JP WO2021240962A5 JP 2021574330 A JP2021574330 A JP 2021574330A JP 2021574330 A JP2021574330 A JP 2021574330A JP WO2021240962 A5 JPWO2021240962 A5 JP WO2021240962A5
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- JP
- Japan
- Prior art keywords
- light
- sputtering
- target
- transmitting conductive
- ratio
- Prior art date
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- 238000004544 sputter deposition Methods 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 2
- 229910001887 tin oxide Inorganic materials 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 1
- 229910003437 indium oxide Inorganic materials 0.000 claims 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 1
Claims (3)
前記光透過性導電性層を形成する工程は、
前記複数のターゲットに含まれる第１ターゲットであって、酸化インジウムと酸化スズとを含み、前記酸化スズの含有率が８質量％を越えるインジウム－スズ複合酸化物からなる前記第１ターゲットに電力を印加して、内側層を前記基材シートの前記厚み方向一方面に形成する第１工程と、
前記第１ターゲット以外のターゲットに電力を印加して、外側層を前記内側層の厚み方向一方面に形成する第２工程とを備え、
前記複数のターゲットにおける合計の電力密度Ｐに対する、前記第１ターゲットにおける電力密度Ｐ１の比（Ｐ１／Ｐ）が、０．１０以下であることを特徴とする、光透過性導電性シートの製造方法。 A step of forming a light-transmitting conductive layer on one surface in the thickness direction of a base sheet by a plurality of times of sputtering in which electric power is applied to each of a plurality of targets is provided.
The step of forming the light-transmitting conductive layer is
Power is supplied to the first target, which is a first target contained in the plurality of targets and is composed of an indium-tin composite oxide containing indium oxide and tin oxide and having a tin oxide content of more than 8% by mass. A first step of applying to form an inner layer on one side of the base sheet in the thickness direction,
A second step of applying electric power to a target other than the first target to form an outer layer on one surface in the thickness direction of the inner layer is provided.
A method for producing a light transmissive conductive sheet, wherein the ratio (P1 / P) of the power density P1 in the first target to the total power density P in the plurality of targets is 0.10 or less. ..
前記第２工程では、反応性ガスを含むスパッタリングガスの雰囲気下、スパッタリングし、
前記第２工程における前記スパッタリングガスにおける反応性ガスの割合Ｒ２に対する、前記第１工程における前記スパッタリングガスにおける反応性ガスの比Ｒ１の比（Ｒ１／Ｒ２）が、１以下であることを特徴とする、請求項１に記載の光透過性導電性シートの製造方法。 In the first step, sputtering is performed in an atmosphere of a sputtering gas containing a reactive gas.
In the second step, sputtering is performed in an atmosphere of a sputtering gas containing a reactive gas.
The ratio (R1 / R2) of the ratio R1 of the reactive gas in the sputtering gas in the first step to the ratio R2 of the reactive gas in the sputtering gas in the second step is 1 or less. The method for producing a light-transmitting conductive sheet according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022065809A JP7102637B2 (en) | 2020-05-25 | 2022-04-12 | Method for manufacturing a light-transmitting conductive sheet |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020090595 | 2020-05-25 | ||
| JP2020090595 | 2020-05-25 | ||
| PCT/JP2021/011147 WO2021240962A1 (en) | 2020-05-25 | 2021-03-18 | Method for producing light-transmitting conductive sheet |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022065809A Division JP7102637B2 (en) | 2020-05-25 | 2022-04-12 | Method for manufacturing a light-transmitting conductive sheet |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021240962A1 JPWO2021240962A1 (en) | 2021-12-02 |
| JP7059455B1 JP7059455B1 (en) | 2022-04-25 |
| JPWO2021240962A5 true JPWO2021240962A5 (en) | 2022-05-24 |
Family
ID=78723317
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021574330A Active JP7059455B1 (en) | 2020-05-25 | 2021-03-18 | Manufacturing method of light-transmitting conductive sheet |
| JP2022065809A Active JP7102637B2 (en) | 2020-05-25 | 2022-04-12 | Method for manufacturing a light-transmitting conductive sheet |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022065809A Active JP7102637B2 (en) | 2020-05-25 | 2022-04-12 | Method for manufacturing a light-transmitting conductive sheet |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP7059455B1 (en) |
| KR (1) | KR20230015894A (en) |
| CN (1) | CN115667573B (en) |
| TW (1) | TW202202642A (en) |
| WO (1) | WO2021240962A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024005997A (en) * | 2022-06-30 | 2024-01-17 | 日東電工株式会社 | Production method of transparent conductive film |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3176812B2 (en) | 1994-12-21 | 2001-06-18 | 住友ベークライト株式会社 | Transparent conductive film |
| WO2002071414A1 (en) * | 2001-03-07 | 2002-09-12 | Ueyama Electric Co., Ltd. | Substrate with deposited transparent condcutive film and method for fabricating color filter |
| JP4481593B2 (en) * | 2003-05-26 | 2010-06-16 | キヤノン株式会社 | Display element |
| CN102666909B (en) * | 2009-11-19 | 2016-06-22 | 株式会社爱发科 | The manufacture method of nesa coating, the manufacture device of nesa coating, sputtering target and nesa coating |
| CN103548097A (en) * | 2011-05-20 | 2014-01-29 | 旭硝子株式会社 | Material for conductive film, conductive film laminate, electronic apparatus, and method for producing material for conductive film, conductive film laminate and electronic apparatus |
| JP6215062B2 (en) * | 2013-01-16 | 2017-10-18 | 日東電工株式会社 | Method for producing transparent conductive film |
| JP6239330B2 (en) * | 2013-09-26 | 2017-11-29 | 日東電工株式会社 | Method for producing transparent conductive film |
| US10270010B2 (en) * | 2014-01-28 | 2019-04-23 | Kaneka Corporation | Substrate with transparent electrode and method for producing same |
| WO2015151687A1 (en) * | 2014-03-31 | 2015-10-08 | 株式会社カネカ | Method for producing transparent conductive film |
| US20160300632A1 (en) * | 2014-05-20 | 2016-10-13 | Nitto Denko Corporation | Transparent conductive film and manufacturing method thereof |
| WO2016152808A1 (en) * | 2015-03-24 | 2016-09-29 | 株式会社カネカ | Transparent electrode-equipped substrate and method for producing transparent electrode-equipped substrate |
| JPWO2016163323A1 (en) * | 2015-04-06 | 2018-02-01 | 株式会社カネカ | Transparent conductive film and display device |
-
2021
- 2021-03-18 KR KR1020227037763A patent/KR20230015894A/en unknown
- 2021-03-18 CN CN202180038168.XA patent/CN115667573B/en active Active
- 2021-03-18 WO PCT/JP2021/011147 patent/WO2021240962A1/en active Application Filing
- 2021-03-18 JP JP2021574330A patent/JP7059455B1/en active Active
- 2021-03-19 TW TW110110045A patent/TW202202642A/en unknown
-
2022
- 2022-04-12 JP JP2022065809A patent/JP7102637B2/en active Active
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