JPWO2021222292A5 - - Google Patents

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Publication number
JPWO2021222292A5
JPWO2021222292A5 JP2022564501A JP2022564501A JPWO2021222292A5 JP WO2021222292 A5 JPWO2021222292 A5 JP WO2021222292A5 JP 2022564501 A JP2022564501 A JP 2022564501A JP 2022564501 A JP2022564501 A JP 2022564501A JP WO2021222292 A5 JPWO2021222292 A5 JP WO2021222292A5
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Japan
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gas line
temperature
oven
heating element
heating
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JP2022564501A
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English (en)
Japanese (ja)
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JP2023523945A (ja
JP7691439B2 (ja
JP2023523945A5 (https=
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Priority claimed from PCT/US2021/029452 external-priority patent/WO2021222292A1/en
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Publication of JP2023523945A5 publication Critical patent/JP2023523945A5/ja
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JP2022564501A 2020-04-30 2021-04-27 化学物質送達システム用のヒーター設計ソリューション Active JP7691439B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063018288P 2020-04-30 2020-04-30
US63/018,288 2020-04-30
PCT/US2021/029452 WO2021222292A1 (en) 2020-04-30 2021-04-27 Heater design solutions for chemical delivery systems

Publications (4)

Publication Number Publication Date
JP2023523945A JP2023523945A (ja) 2023-06-08
JPWO2021222292A5 true JPWO2021222292A5 (https=) 2024-05-09
JP2023523945A5 JP2023523945A5 (https=) 2024-05-09
JP7691439B2 JP7691439B2 (ja) 2025-06-11

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JP2022564501A Active JP7691439B2 (ja) 2020-04-30 2021-04-27 化学物質送達システム用のヒーター設計ソリューション

Country Status (6)

Country Link
US (1) US12460294B2 (https=)
JP (1) JP7691439B2 (https=)
KR (1) KR20230005931A (https=)
CN (1) CN115485412A (https=)
TW (1) TWI902792B (https=)
WO (1) WO2021222292A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI129734B (en) * 2019-04-25 2022-08-15 Beneq Oy Precursor supply chamber
CN115485412A (zh) 2020-04-30 2022-12-16 朗姆研究公司 用于化学品输送系统的加热器设计方案
CN114318300B (zh) * 2021-12-30 2024-05-10 拓荆科技股份有限公司 一种半导体加工设备及其反应腔室、工艺管路穿腔模块
KR102728765B1 (ko) 2024-01-10 2024-11-13 포이스주식회사 기체상태 화학약품 공급라인의 온도제어시스템
KR102770119B1 (ko) 2024-01-10 2025-02-20 포이스주식회사 기체상태 화학약품 공급라인의 퍼지시스템

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
US3651240A (en) * 1969-01-31 1972-03-21 Trw Inc Heat transfer device
US3677329A (en) * 1970-11-16 1972-07-18 Trw Inc Annular heat pipe
JPH02210822A (ja) 1989-02-10 1990-08-22 Toshiba Corp 気相成長装置
US5451258A (en) 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JPH0897160A (ja) 1994-09-29 1996-04-12 Fujitsu Ltd ガス吹き出し装置及びガス混合装置及び半導体装置製造方法
US5714738A (en) * 1995-07-10 1998-02-03 Watlow Electric Manufacturing Co. Apparatus and methods of making and using heater apparatus for heating an object having two-dimensional or three-dimensional curvature
KR100392047B1 (ko) 1998-12-16 2003-07-23 동경 엘렉트론 주식회사 박막 형성 방법
US6915592B2 (en) 2002-07-29 2005-07-12 Applied Materials, Inc. Method and apparatus for generating gas to a processing chamber
KR20080070893A (ko) 2007-01-29 2008-08-01 (주)티티에스 블록히터가 장착된 가스라인을 갖는 반도체 제조장치
JP2009084625A (ja) * 2007-09-28 2009-04-23 Tokyo Electron Ltd 原料ガスの供給システム及び成膜装置
KR101084275B1 (ko) 2009-09-22 2011-11-16 삼성모바일디스플레이주식회사 소스 가스 공급 유닛, 이를 구비하는 증착 장치 및 방법
TWI518198B (zh) 2014-04-09 2016-01-21 中央研究院 製備薄膜之系統
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
US11421320B2 (en) * 2017-12-07 2022-08-23 Entegris, Inc. Chemical delivery system and method of operating the chemical delivery system
US10975470B2 (en) * 2018-02-23 2021-04-13 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11183400B2 (en) 2018-08-08 2021-11-23 Lam Research Corporation Progressive heating of components of substrate processing systems using TCR element-based heaters
KR20200101141A (ko) * 2019-02-19 2020-08-27 고려대학교 산학협력단 전구체 소스 공급을 위한 금속블록 결합형 히터 어셈블리를 포함하는 증착 장치
CN115485412A (zh) 2020-04-30 2022-12-16 朗姆研究公司 用于化学品输送系统的加热器设计方案

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